Pengontrol Aliran Massa Meter Aliran Massa CS200
Fitur
1. Akurasi Dhuwur lan Respon Cepet
Akurasi saka CS200 MFC wis apik kanggo ± 1,0% saka SP, lan model paling maju wis suda wektu nanggepi kurang saka 0,8 detik.
2. Low Zero Drift lan Koefisien Suhu
Penemuan teknologi sensor anyar ngidini CS200 MFC njaga stabilitas lan tahan fluktuasi suhu.Tanpa amplifier nul otomatis, drift nul sing dikarepake kurang saka 0,6% FS / taun, lan koefisien suhu kurang saka 0,02% FS / ℃ (nol), 0,05% FS / ℃ (span).
3. Model Metal-Sealed lan Fitur High Purity
Jalur aliran wetted saka-the-line CS200 MFC dibangun saka stainless steel lumahing-passivated.Kabeh MFC CS200 dirakit ing kamar resik kelas 100 kelas ultraclean Sevenstar sesuai karo standar SEMI lan ISO 9001.
4. Antarmuka sing kompatibel
MFC CS200 kompatibel karo antarmuka ing ngisor iki, sing bisa dipilih dening pelanggan: ± 8V-± 16V sumber daya pindho mburi lan + 14V-+28V sumber daya siji-mburi;input lan output sinyal digital utawa analog;ukuran mekanik standar SEMI;lan RS-485 utawa modul komunikasi DeviceNet.
5. Aneka Fungsi
Piranti lunak pelanggan sing kuat dadi standar karo saben model, dene fungsi tambahan kayata multi-gas, multi-range, nul otomatis, weker, wiwitan alus, lan wektu tundha kasedhiya minangka pilihan pelanggan.
Spesifikasi
| CS200 | |||||||
| Jinis | CS200A | CS200C | CS200D | ||||
| Range skala penuh (N2) | ( 0～ 5,10,20,30,50,100,200,300,500)SCCM | ( 0～ 2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| Akurasi | ±1,0% SP (≥35% FS) ±0,35% FS?(＜35% FS) | ||||||
| Linearitas | ± 0,5% FS | ||||||
| Repeatability | ± 0,2% FS | ||||||
| Wektu Respon | ≤1 detik | ≤0,8 detik (SEMI E17-0600) | |||||
| Posisi Istirahat Katup | Biasane Ditutup utawa | Ora Valve | Biasane Ditutup utawa | Ora Valve | Biasane Ditutup utawa | Ora Valve | |
| Biasane mbukak（100 sccm≤FS≤5 slm） | Biasane mbukak（100 sccm≤FS≤5 slm） | Biasane mbukak（100 sccm≤FS≤5 slm） | |||||
| Tekanan Diferensial | 0.05～0.35MPa (Arus ≤10slm) | <0.02MPa | (0.05～0.35) MPa（≤10slm） | <0.02MPa | (0.05～0.35) MPa（≤10slm） | <0.02MPa | |
| 0.1～0.35MPa（10slm＜Arus≤30slm） | (0.1～0.35) MPa（（10slm） | (0.1～0.35) MPa（（10slm） | |||||
| 0.2～0.45MPa (Arus>30slm) | |||||||
| Tekanan Operasi Maksimum | 0,45 MPa | |||||
| Suhu | Nol: ≤ ± 0,05% FS / ℃; | Nol: ≤±0,02% FS/℃;Span: ≤±0,05% FS/℃ | ||||
| Koefisien | Span: ≤±0.1% FS/℃（Aliran≤30slm） | |||||
| Span: ≤±0.2% FS/℃(Alur>30slm) | ||||||
| Tekanan Bukti | 3MPa (435 pig) | |||||
| Zero Drift | <0,6% FS saben taun tanpa nol otomatis | |||||
| Integritas bocor | 1×10-9 atm·cc/detik | 1×10-10atm·cc/detik | ||||
| Bahan Basah | Viton; | Logam? (Stainless Steel V/V, 5Ra) | logam | |||
| Kimia lumahing | —— | rasio Cr/Fe ＞2.0;Ketebalan CrO > 20 Angstrom | ||||
| Lumahing Rampung | 25 Ra | 10 Ra | 25 Ra | |||
| Suhu Operasi | (5～45） ℃ | (0～50） ℃ | ||||
| Sinyal Input | Digital: RS485 utawa ProfiBus | N/A | Digital: RS485 utawa ProfiBus utawa DeviceNetTM | N/A | Digital: RS485 utawa ProfiBus utawa DeviceNetTM | N/A |
| utawa DeviceNetTM | Analog: (0～5)VDC utawa (4～20)mA utawa (0～20)mA | Analog: (0～5)VDC utawa (4～20)mA?utawa (0～20)mA | |||||
| Analog: (0～5)VDC utawa (4～20)mA utawa (0～20)mA | |||||||
| Sinyal Output | Digital: RS485 utawa DeviceNetTM utawa Analog ProfiBus:(0～5)VDC utawa (4～20)mA utawa (0～20)mA | ||||||
| Power Supply | ± 8 ~ ± 16 VDC utawa +14 ~ +28 VDC (400mA) | ||||||
| Konektor Elektronik | 9 pin lanang sub-D ，15 pin lanang sub-D ，DeviceNetTM,ProfiBus, Analog | ||||||
| Fitting | VCR1/4” M； VCO1/4” M； | VCR1/4” M; | |||||
| Kompresi FittingΦ10;Compression FittingΦ6； | Kompresi FittingΦ6, | ||||||
| Kompresi Fitting 3/8";Kompresi Fitting 1/4"; | Kompresi FittingΦ3, | ||||||
| Kompresi Fitting 1/8";Kompresi FittingΦ3； | Kompresi Fitting 1/4" | ||||||
| Ф6(dalam)×1selang;ф5(dalam)×1.5selang;ф4(dalam)×1selang; | W-segel, | ||||||
| A-sael ; | C-segel | ||||||
| Bobot | 1 kg | 0,8 kg | 1,2 kg | 1 kg | 1,2 kg | 1 kg | |
