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Bolaoli ba Phallo ea Boipheliso Boima ba Phallo Meter CS200

Tlhaloso e Khutšoanyane:

Li-MFC tsa CS200 tse nang le sensor e tsoetseng pele le thekenoloji ea matšeliso a mocheso li ka finyella ± 1% SP ho nepahala le coefficient e tlase ea mocheso.Ho feta moo, li-MFC tsa CS200 tse nang le sistimi e tsoetseng pele ea taolo li nka nako ea karabelo ea 800ms bakeng sa liphetoho tsohle tse behiloeng, ho fokotsa liphoso tsa sistimi ts'ebetsong.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Likaroloana

1. Ho Nepaha ha Phahameng le Karabelo e potlakileng

Ho nepahala ha CS200 MFC ho ntlafalitsoe ho ± 1.0% ea SP, 'me mefuta e tsoetseng pele ka ho fetisisa e na le nako e fokolang ea karabo e ka tlaase ho 0.8 sec.

2. Tlase Zero Drift le Temperature Coefficient

Ho qaptjoa ha theknoloji e ncha ea sensor ho nolofalletsa CS200 MFC ho boloka botsitso le ho mamella ho fetoha ha mocheso.Ntle le amplifier ea auto-zero, leqhubu le lebelletsoeng la zero le ka tlase ho 0.6%FS/selemo, 'me tekanyo ea mocheso e ka tlase ho 0.02%FS/℃(zero),0.05%FS/ ℃ (span).

3. Mehlala e Tiisitsoeng ka Metal le Tšobotsi ea Bohloeki bo Phahameng

Tsela ea ho phalla e kolobisitsoeng ea CS200 MFC e hahiloe ka tšepe e sa hloekang.Li-MFC tsohle tsa CS200 li bokane ka har'a likamore tsa bohloeki tsa sehlopha sa 100 sa ultraclean sa Sevenstar ho latela maemo a SEMI le ISO 9001 ka bobeli.

4. Li-interfaces tse lumellanang

CS200 MFC e tsamaisana le likhokahano tse latelang, tse ka khethoang ke moreki: ± 8V-± 16V phepelo ea matla a habeli le +14V-+28V phepelo ea motlakase e le 'ngoe;tlhahiso le tlhahiso ea pontšo ea digital kapa ea analog;SEMI litekanyo tse tloaelehileng tsa mochini;le RS-485 kapa mojule oa puisano oa DeviceNet.

5. Mesebetsi e Mechane

Software e matla ea bareki e tla e tloaelehileng ka mofuta o mong le o mong, ha mesebetsi e meng e joalo ka khase e mengata, mefuta e mengata, auto-zero, lialamo, qalo e bonolo, le tieho li fumaneha joalo ka khetho ea bareki.

Tlhaloso

CS200

Mofuta

CS200A

CS200C

CS200D

Sekala se felletseng (N2)

( 0~5,10,20,30,50,100,200,300,500)SCCM

( 0~2,3,5,10,20,30,50,100,200,300,500)SCCM

( 0~1,2,3,5,10,20,30,50)SLM

( 0~1,2,3,5,10,20,30)SLM

Ho nepahala

± 1.0% SP (≥35% FS) ± 0.35% FS?(<35% FS)

Linearity

± 0.5% FS

Pheta-pheta

± 0.2% FS

Nako ea Karabelo

≤1sec

≤0.8 sec (SEMI E17-0600)

Sebaka sa Phomolo ea Valve

Ka tloaelo Ho Koaletsoe kapa

Ha ho Velve

Ka tloaelo Ho Koaletsoe kapa

Ha ho Velve

Ka tloaelo Ho Koaletsoe kapa

Ha ho Velve

Ka tloaelo Bula (100 sccm≤FS≤5 slm) Ka tloaelo Bula (100 sccm≤FS≤5 slm) Ka tloaelo Bula (100 sccm≤FS≤5 slm)

Khatello e sa Tšoaneng

0.05 ~ 0.35MPa (Flow≤10slm)

0.02MPa

(0.05–0.35) MPa (≤10slm)

0.02MPa

(0.05–0.35) MPa (≤10slm)

0.02MPa

0.1 ~ 0.35MPa (10slm<Flow≤30slm)

(0.1–0.35) MPa (>10slm)

(0.1–0.35) MPa (>10slm)

0.2–0.45MPa (Phallo>30slm)

Khatello e Phahameng ea Ts'ebetso

0.45MPa

Mocheso

Zero: ≤± 0.05% FS/℃;

Zero: ≤± 0.02% FS/℃;Nako:≤±0.05% FS/℃

Coefficient

Nako: ≤±0.1% FS/℃ (Flow≤30slm)

Nako: ≤± 0.2% FS/℃ (Phallo> 30slm)

Khatello ea Bopaki

3MPa (435pisg)

Zero Drift

0.6% FS ka selemo ntle le autozero

Leak botšepehi

1 × 10-9 atm · cc / sec He

1 × 10-10atm · cc / sec He

Lisebelisoa tse metsi

Viton;

Tšepe?(Stainless Steel V/V, 5Ra)

Tšepe

Surface Chemistry

—-

Cr/Fe karo-karolelano >2.0;CrO botenya >20 Angstroms

Surface Finish

25Ra

10Ra

25Ra

Mocheso oa Ts'ebetso

5 -45℃

0~50)℃

Kena Letshwao

Digital: RS485 kapa ProfiBus

N/A

Digital: RS485 kapa ProfBus kapa DeviceNetTM

N/A

Digital: RS485 kapa ProfBus kapa DeviceNetTM

N/A

kapa DeviceNetTM

Analogi:(0~5)VDC kapa (4~20)mA kapa (0~20)mA

Analog:(0~5)VDC kapa (4~20)mA?or (0~20)mA

Analogi:(0~5)VDC kapa (4~20)mA kapa(0~20)mA

Sephetho sa Pontsho

Digital: RS485 kapa DeviceNetTM kapa ProfiBus Analog:(0~5)VDC kapa (4~20)mA kapa (0~20)mA

Phepelo ea motlakase

±8 ~ ±16 VDC kapa +14 ~ +28 VDC(400mA)

Sehokelo sa Elektronike

9 pin male sub-D ,15 pin male sub-D ,DeviceNetTM,ProfiBus, Analog

Lisebelisoa

VCR1/4” M; VCO1/4” M;

VCR1/4” M;

Compress FittingΦ10;Compression FittingΦ6;

Compression FittingΦ6,

Compress Fitting 3/8";Compress Fitting1/4”;

Compress FittingΦ3,

Compress Fitting1/8”;Compress FittingΦ3;

Compress Fitting1/4”,

Ф6(ka hare)×1hose;ф5(ka hare)×1.5hose;ф4(ka hare)×1hose;

W-seal,

A-sael ;

C-tiiso

Boima ba 'mele

1kg

0.8kg

1.2kg

1kg

1.2kg

1kg

 

 

 

 

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  • E 'ngoe:

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