Ibi sisan Adarí Ibi sisan Mita CS200
Awọn ẹya ara ẹrọ
1. Ga Yiye ati Yara Esi
Awọn išedede ti CS200 MFC ti ni ilọsiwaju si ± 1.0% ti SP, ati awọn awoṣe ilọsiwaju julọ ni akoko idahun ti o dinku ti o kere ju 0.8 iṣẹju-aaya.
2. Low Zero Drift ati otutu olùsọdipúpọ
Ipilẹṣẹ ti imọ-ẹrọ sensọ tuntun n jẹ ki CS200 MFC ṣetọju iduroṣinṣin ati duro awọn iyipada otutu.Laisi ampilifaya odo-aifọwọyi, fiseete odo ti a nireti ko kere ju 0.6% FS / ọdun, ati iye iwọn otutu ko kere ju 0.02% FS/℃ (odo) 0.05% FS/ ℃ (igba).
3. Awọn awoṣe Igbẹhin Irin-irin ati Ẹya Mimọ ti o ga julọ
Ọna ṣiṣan tutu ti-ni-ila CS200 MFC ti wa ni itumọ lati inu irin alagbara irin ti o kọja-ilẹ.Gbogbo awọn MFC CS200 ni a pejọ ni awọn yara mimọ Kilasi 100-kilasi ultraclean ti Sevenstar ni ibamu pẹlu mejeeji SEMI ati awọn iṣedede ISO 9001.
4. ibaramu atọkun
CS200 MFC ni ibamu pẹlu awọn atọkun atẹle, eyiti o le yan nipasẹ alabara: ± 8V-± 16V ipese agbara meji-opin ati + 14V-+ 28V ipese agbara-opin;oni tabi afọwọṣe ifihan agbara igbewọle ati wu;SEMI boṣewa darí mefa;ati RS-485 tabi DeviceNet awọn ibaraẹnisọrọ module.
5. Awọn iṣẹ oriṣiriṣi
Sọfitiwia alabara ti o lagbara wa ni boṣewa pẹlu awoṣe kọọkan, lakoko ti awọn iṣẹ afikun bii gaasi pupọ, iwọn-pupọ, odo-odo, awọn itaniji, ibẹrẹ rirọ, ati idaduro wa bi awọn yiyan alabara.
Sipesifikesonu
| CS200 | |||||||
| Iru | CS200A | CS200C | CS200D | ||||
| Iwọn iwọn kikun (N2) | ( 0～5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| Yiye | ± 1.0% SP (≥35% FS) ± 0.35% FS?(＜35% FS) | ||||||
| Ìlànà | ± 0,5% FS | ||||||
| Atunṣe | ± 0,2% FS | ||||||
| Akoko Idahun | ≤1 iṣẹju-aaya | ≤0.8 iṣẹju-aaya (SEMI E17-0600) | |||||
| Àtọwọdá Isinmi Ipo | Ni deede pipade tabi | Ko si àtọwọdá | Ni deede pipade tabi | Ko si àtọwọdá | Ni deede pipade tabi | Ko si àtọwọdá | |
| Ṣii ni deede (100 sccm≤FS≤5 slm) | Ṣii ni deede (100 sccm≤FS≤5 slm) | Ṣii ni deede (100 sccm≤FS≤5 slm) | |||||
| Iyatọ Ipa | 0.05 ~ 0.35MPa (Sisan≤10slm) | .0.02MPa | (0.05 ~ 0.35) MPa (≤10slm) | .0.02MPa | (0.05 ~ 0.35) MPa (≤10slm) | .0.02MPa | |
| 0.1～0.35MPa (10slm | Flow≤30slm) | (0.1 ~ 0.35) MPa (10slm) | (0.1 ~ 0.35) MPa (10slm) | |||||
| 0.2 ~ 0.45MPa (Sisan: 30slm) | |||||||
| Iwọn Iṣiṣẹ ti o pọju | 0.45MPa | |||||
| Iwọn otutu | Odo: ≤± 0.05% FS/℃; | Odo: ≤± 0.02% FS/℃;Igba: ≤± 0.05% FS/℃ | ||||
| olùsọdipúpọ | Igba: ≤± 0.1% FS/℃（Flow≤30slm) | |||||
| Igba: ≤± 0.2% FS/℃（San>30slm) | ||||||
| Imudaniloju Ipa | 3MPa (435pisg) | |||||
| Fiseete odo | .0.6% FS fun ọdun kan laisi autozero | |||||
| Iduroṣinṣin jo | 1× 10-9 atm·cc / iṣẹju-aaya Oun | 1× 10-10atm·cc / iṣẹju-aaya Oun | ||||
| Awọn ohun elo tutu | Viton; | Irin?( Irin Alagbara V/V, 5Ra) | Irin | |||
| Kemistri dada | —— | Iwọn Cr/Fe · 2.0;sisanra Cro: 20 Angstroms | ||||
| Dada Ipari | 25Ra | 10Ra | 25Ra | |||
| Isẹ otutu | (5～45)℃ | (0～50)℃ | ||||
| Ifihan agbara igbewọle | Digital: RS485 tabi ProfiBus | N/A | Digital: RS485 tabi ProfiBus tabi DeviceNetTM | N/A | Digital:RS485 tabi ProfiBus tabi DeviceNetTM | N/A |
| tabi DeviceNetTM | Afọwọṣe: (0～5) VDC tabi (4～20) mA tabi (0～20) mA | Afọwọṣe: (0～5)VDC tabi (4～20)mA?tabi (0～20)mA | |||||
| Afọwọṣe: (0～5) VDC tabi (4～20) mA tabi (0～20) mA | |||||||
| Ifihan agbara jade | Digital: RS485 tabi DeviceNetTM tabi ProfiBus Analog:(0～5)VDC tabi (4～20)mA tabi (0～20)mA | ||||||
| Ibi ti ina elekitiriki ti nwa | ± 8 ~ ± 16 VDC tabi +14 ~ +28 VDC(400mA) | ||||||
| Itanna Asopọmọra | 9 pin akọ iha-D ，15 pin akọ iha-D ， DeviceNetTM,ProfiBus, Afọwọṣe | ||||||
| Awọn ohun elo | VCR1/4" M; VCO1/4" M; | VCR1/4” M; | |||||
| Imudara funmorawonΦ10; Ibamu funmorawonΦ6; | Ibamu funmorawonΦ6, | ||||||
| Funmorawon Fitting 3/8 ";Ibamu funmorawon 1/4"; | Ibamu funmorawonΦ3, | ||||||
| Funmorawon Fitting1/8";Ibamu funmorawonΦ3; | Ibamu funmorawon 1/4” | ||||||
| Ф6 (inu) × 1hose; ф5 (inu) × 1.5hose; ф4 (inu) × 1hose; | W-ididi | ||||||
| A-saeli ; | C-ididi | ||||||
| Iwọn | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg | |
