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I-Mass Flow Controller Imitha yokugeleza kweMisa CS200

Incazelo emfushane:

Ama-CS200 MFC anenzwa ethuthukisiwe nobuchwepheshe besinxephezelo sezinga lokushisa angafinyelela ukunemba okungu-±1%SP kanye ne-coefficient ephansi yezinga lokushisa.Ngaphezu kwalokho, ama-CS200 MFC anohlelo lokulawula oluthuthukisiwe anesilinganiso sesikhathi sokuphendula esingu-800ms sazo zonke izinguquko zamaphuzu amisiwe, okunciphisa noma imaphi amaphutha esistimu.


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Izici

1. Ukunemba Okuphezulu kanye Nempendulo Esheshayo

Ukunemba kwe-CS200 MFC kuthuthukisiwe kwaba ngu-±1.0% we-SP, futhi amamodeli athuthuke kakhulu anesikhathi sokuphendula esincishisiwe esingaphansi kwamasekhondi angu-0.8.

2. I-low Zero Drift kanye ne-Temperature Coefficient

Ukusungulwa kobuchwepheshe bezinzwa obusha kwenza i-CS200 MFC ikwazi ukugcina uzinzo futhi imelane nokuguquguquka kwezinga lokushisa.Ngaphandle kwe-auto-zero amplifier, i-zero drift elindelwe ingaphansi kuka-0.6%FS/ngonyaka, futhi izinga lokushisa lingaphansi kuka-0.02%FS/℃(zero),0.05%FS/ ℃ (i-span).

3. Amamodeli Avalwe Ngensimbi Nesici Sokuhlanzeka Okuphezulu

Indlela yokugeleza emanzi yomugqa we-CS200 MFC yakhiwe ngensimbi engenasici.Wonke ama-CS200 MFCs ahlanganiswe kumagumbi okuhlanza ekilasi le-100 le-Sevenstar le-ultraclean ngokuya ngawo womabili amazinga e-SEMI kanye ne-ISO 9001.

4. Izixhumanisi Ezivumelanayo

I-CS200 MFC ihambisana nezixhumi ezibonakalayo ezilandelayo, ezingase zikhethwe ikhasimende: ±8V-±16V ugesi ophuma kabili kanye +14V-+28V ugesi wesiphetho esisodwa;okokufaka kanye nokuphumayo kwesignali yedijithali noma ye-analog;Ubukhulu bemishini obujwayelekile be-SEMI;kanye ne-RS-485 noma imojuli yezokuxhumana ye-DeviceNet.

5. Imisebenzi Ehlukahlukene

Isofthiwe yekhasimende enamandla iza indinganiso ngemodeli ngayinye, kuyilapho imisebenzi eyengeziwe efana ne-multi-gas, i-multi-range, i-auto-zero, ama-alamu, isiqalo esithambile, nokubambezeleka kuyatholakala njengokukhethwa kwamakhasimende.

Ukucaciswa

CS200

Uhlobo

CS200A

I-CS200C

I-CS200D

Ibanga lesikali esigcwele (N2)

( 0~5,10,20,30,50,100,200,300,500)SCCM

( 0~2,3,5,10,20,30,50,100,200,300,500)SCCM

( 0~1,2,3,5,10,20,30,50)SLM

( 0~1,2,3,5,10,20,30)SLM

Ukunemba

±1.0% SP (≥35% FS) ±0.35% FS?(<35% FS)

Umugqa

±0.5% FS

Ukuphindaphinda

±0.2% FS

Isikhathi sokuphendula

≤1sec

≤0.8 isekhondi (SEMI E17-0600)

I-Valve Rest Position

Ngokujwayelekile Kuvaliwe noma

Ayikho iValve

Ngokujwayelekile Kuvaliwe noma

Ayikho iValve

Ngokujwayelekile Kuvaliwe noma

Ayikho iValve

Ivamise Ukuvula (100 sccm≤FS≤5 slm) Ivamise Ukuvula (100 sccm≤FS≤5 slm) Ivamise Ukuvula (100 sccm≤FS≤5 slm)

Ukucindezela Okuhlukile

0.05~0.35MPa (Ukugeleza≤10slm)

0.02MPa

(0.05–0.35) MPa (≤10slm)

0.02MPa

(0.05–0.35) MPa (≤10slm)

0.02MPa

0.1 - 0.35MPa (10slm) Flow≤30slm)

(0.1–0.35) MPa ((>10slm)

(0.1–0.35) MPa ((>10slm)

0.2–0.45MPa (Ukugeleza) 30slm)

Ingcindezi Yokusebenza Ephezulu

0.45MPa

Izinga lokushisa

Uziro:≤±0.05% FS/℃;

Uziro:≤±0.02% FS/℃;Isikhathi:≤±0.05% FS/℃

I-Coefficient

Isikhathi: ≤±0.1% FS/℃ (Ukugeleza≤30slm)

Isikhathi: ≤±0.2% FS/℃ (Ukugeleza>30slm)

Ingcindezi Yobufakazi

I-3MPa (435pisg)

I-Zero Drift

0.6%FS ngonyaka ngaphandle kwe-autozero

Ukuvuza ubuqotho

1×10-9 atm · cc / sec He

1×10-10atm · cc / umzuzwana He

Izinto Ezimanzi

Viton;

Insimbi?(Insimbi Engagqwali V/V, 5Ra)

Insimbi

I-Surface Chemistry

—-

Isilinganiso se-Cr/Fe >2.0;Ubukhulu be-CrO >20 Angstroms

I-Surface Qeda

25Ra

10Ra

25Ra

Operation Temperature

(5~45℃

(0~50)℃

Isiginali Yokufaka

Idijithali: RS485 noma i-ProfiBus

N/A

Idijithali: I-RS485 noma i-ProfiBus noma i-DeviceNetTM

N/A

Idijithali:RS485 noma i-ProfiBus noma i-DeviceNetTM

N/A

noma i-DeviceNetTM

I-Analog:(0~5)VDC noma (4~20)mA noma (0~20)mA

I-Analog:(0~5)VDC noma (4~20)mA?noma (0~20)mA

I-Analog:(0~5)VDC noma (4~20)mA noma(0~20)mA

Isiginali yokuphumayo

Idijithali: RS485 noma i-DeviceNetTM noma i-ProfiBus Analog:(0~5)VDC noma (4~20)mA noma (0~20)mA

Ukunikezwa kwamandla kagesi

±8 ~ ±16 VDC noma +14 ~ +28 VDC(400mA)

Isixhumi sikagesi

9 ophini owesilisa sub-D ,15 pin owesilisa sub-D ,DeviceNetTM,I-ProfiBus, i-Analog

Ukufakwa

VCR1/4” M; VCO1/4” M;

VCR1/4” M;

I-Compression FittingΦ10;I-Compression FittingΦ6;

I-Compression FittingΦ6,

I-Compress Fitting 3/8";I-Compress Fitting1/4”;

I-Compression FittingΦ3,

Ukucindezelwa Fitting1/8”;I-Compression FittingΦ3;

Ukucindezelwa Fitting1/4”,

Ф6(ngaphakathi)×1hose;ф5(ngaphakathi)×1.5hose;ф4(ngaphakathi)×1hose;

I-W-seal,

A-sael ;

I-C-seal

Isisindo

1kg

0.8kg

1.2kg

1kg

1.2kg

1kg

 

 

 

 

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