Mass Flow Controller Mass Flow Meter CS200
Nta
1. Cov neeg raug siab thiab teb ceev ceev
Qhov tseeb ntawm CS200 MFC tau raug txhim kho rau ± 1.0% ntawm SP, thiab cov qauv siab tshaj plaws tau txo qis lub sijhawm teb tsawg dua 0.8 sec.
2. Tsawg Zero Drift thiab Kub Coefficient
Lub invention ntawm tshiab sensor technology enables CS200 MFC kom muaj kev ruaj ntseg thiab tiv taus kub hloov.Yog tsis muaj nws pib xoom amplifier, qhov kev cia siab zero drift yog tsawg dua 0.6% FS / xyoo, thiab qhov kub coefficient tsawg dua 0.02% FS / ℃ (zero), 0.05% FS / ℃ (span).
3. Cov qauv hlau-sealed thiab siab purity feature
Txoj kev wetted ntws ntawm-tus-tus-kab CS200 MFC yog tsim los ntawm nto-passivated stainless hlau.Txhua CS200 MFCs tau sib sau ua ke hauv Sevenstar's ultraclean Class 100-chav huv chav ua haujlwm raws li SEMI thiab ISO 9001 cov qauv.
4. Compatible Interfaces
Lub CS200 MFC yog sib xws nrog cov nram qab no interfaces, uas tej zaum yuav xaiv los ntawm tus neeg muas zaub: ± 8V-± 16V ob-kawg fais fab mov thiab + 14V- + 28V ib leeg-kawg fais fab mov;digital lossis analog teeb liab input thiab tso zis;SEMI tus qauv tshuab qhov ntev;thiab RS-485 lossis DeviceNet kev sib txuas lus module.
5. Lwm yam ua haujlwm
Cov neeg siv khoom muaj zog software los ntawm tus qauv nrog txhua tus qauv, thaum muaj kev ua haujlwm ntxiv xws li ntau lub roj, ntau yam, tsis siv neeg xoom, tswb, pib muag muag, thiab ncua sijhawm yog muaj raws li cov neeg siv khoom xaiv.
Specification
| SIB 200 | |||||||
| Hom | CS200A | CS 200 C | CS200D | ||||
| Tag nrho cov nplais (N2) | (0～5,10,20,30,50,100,200,300,500) SCCM | (0～2,3,5,10,20,30,50,100,200,300,500) SCCM | |||||
| (0～1,2,3,5,10,20,30,50) SLM | (0～1,2,3,5,10,20,30) SLM | ||||||
| Qhov tseeb | ± 1.0% SP (≥35% FS) ± 0.35% FS? (＜35% FS) | ||||||
| Linearity | ± 0.5% FS | ||||||
| Rov ua dua | ± 0.2% FS | ||||||
| Teb Sijhawm | ≤ 1 sec | ≤0.8 sec (SEMI E17-0600) | |||||
| Valve Rest Position | Nquag kaw los yog | Tsis muaj Valve | Nquag kaw los yog | Tsis muaj Valve | Nquag kaw los yog | Tsis muaj Valve | |
| Nquag Qhib (100 sccm≤FS≤5 slm) | Nquag Qhib (100 sccm≤FS≤5 slm) | Nquag Qhib (100 sccm≤FS≤5 slm) | |||||
| Siab sib txawv | 0.05 ~ 0.35MPa (Flow ≤10slm) | ＜0.02MPa | (0.05 ~ 0.35) MPa (≤10slm) | ＜0.02MPa | (0.05 ~ 0.35) MPa (≤10slm) | ＜0.02MPa | |
| 0.1 ~ 0.35MPa (10slm ＜Flow≤30slm) | (0.1 ~ 0.35) MPa (＞ 10slm) | (0.1 ~ 0.35) MPa (＞ 10slm) | |||||
| 0.2 ~ 0.45MPa (Flow ~ 30slm) | |||||||
| Kev ua haujlwm siab tshaj plaws | 0.45MPa | |||||
| Kub | Zero: ≤ ± 0.05% FS / ℃; | Zero: ≤ ± 0.02% FS / ℃;Ntev: ≤ ± 0.05% FS / ℃ | ||||
| Coefficient | Ntev: ≤ ± 0.1% FS / ℃ (Flow≤30slm) | |||||
| Ntev: ≤ ± 0.2% FS / ℃ (Flow> 30slm) | ||||||
| Pov thawj siab | 3MPa (435pisg) | |||||
| Zero Drift | ＜0.6% FS ib xyoo tsis muaj autozero | |||||
| Leak kev ncaj ncees | 1 × 10-9 atm·cc / sec Nws | 1 × 10-10atm·cc / sec Nws | ||||
| Cov ntaub ntub dej | Viton; | Hlau? (Stainless hlau V / V, 5Ra) | Hlau | |||
| Nto Chemistry | —— | Cr / Fe piv 2.0;CrO thickness 20 Angstroms | ||||
| Nto tiav | 25 ra | 10 Raj | 25 ra | |||
| Kev ua haujlwm kub | (5 ~ 45 ℃ | (0 ~ 50 ℃ | ||||
| Input Signal | Digital: RS485 lossis ProfiBus | N/A | Digital: RS485 lossis ProfiBus lossis DeviceNetTM | N/A | Digital: RS485 lossis ProfiBus lossis DeviceNetTM | N/A |
| los yog DeviceNetTM | Analog: (0 ~ 5)VDC lossis (4 ~ 20)mA lossis (0 ~ 20)mA | Analog: (0 ~ 5)VDC lossis (4 ~ 20)mA lossis (0 ~ 20)mA | |||||
| Analog: (0 ~ 5)VDC lossis (4 ~ 20)mA lossis (0 ~ 20)mA | |||||||
| Tso zis teeb liab | Digital: RS485 lossis DeviceNetTM lossis ProfiBus Analog: (0 ~ 5)VDC lossis (4 ~ 20)mA lossis (0 ~ 20)mA | ||||||
| Fais fab mov | ± 8 ~ ± 16 VDC lossis + 14 ~ + 28 VDC (400mA) | ||||||
| Electronic Connector | 9 tus pin txiv neej sub-D, 15 tus pin txiv neej sub-D, DeviceNetTM,ProfiBus, Analog | ||||||
| Fittings | VCR1/4" M; VCO1/4" M; | VCR 1/4 "M; | |||||
| Compression Fitting Φ10; Compression Haum Φ6; | Compression haum Φ6, | ||||||
| Compression Fitting 3/8 ";Compression Fitting 1/4 "; | Compression haum Φ3, | ||||||
| Compression Fitting 1/8 ";Compression haum Φ3; | Compression Fitting 1/4 ", | ||||||
| Ф6 ( puab ) × 1 hose ; ф5 ( puab ) × 1.5hose ; ф4 ( puab ) × 1 hose ; | W- foob, | ||||||
| A-sael; | C- foob | ||||||
| Qhov hnyav | 1kg ua | 0.8kg ib | 1.2 kg ib | 1kg ua | 1.2 kg ib | 1kg ua | |
