Mass Flow Controller Mass Flow Meter CS200
Karakteristik
1. Segondè presizyon ak repons rapid
Presizyon CS200 MFC a te amelyore a ± 1.0% nan SP, ak modèl ki pi avanse yo gen yon tan repons redwi nan mwens pase 0.8 sec.
2. Ba zewo drift ak koyefisyan tanperati
Envansyon nan nouvo teknoloji Capteur pèmèt CS200 MFC a kenbe estabilite ak kenbe tèt ak fluctuations tanperati.San yo pa yon anplifikatè oto-zewo, derive zewo espere mwens pase 0.6% FS / ane, ak koyefisyan tanperati a se mwens pase 0.02% FS / ℃ (zewo) ， 0.05% FS / ℃ (span).
3. Modèl metal-sele ak karakteristik pite segondè
Chemen koule mouye nan liy lan CS200 MFC konstwi soti nan sifas-passive asye pur.Tout MFC CS200 yo reyini nan chanm pwòp klas 100 klas ultrapwòpte Sevenstar yo an akò ak estanda SEMI ak ISO 9001.
4. Entèfas konpatib
CS200 MFC a konpatib ak koòdone sa yo, ki ka chwazi pa kliyan an: ± 8V-± 16V doub-fen ekipman pou pouvwa ak + 14V-+28V yon sèl-fen ekipman pou pouvwa;Antre ak pwodiksyon siyal dijital oswa analòg;SEMI estanda dimansyon mekanik;ak RS-485 oswa modil kominikasyon DeviceNet.
5. Fonksyon divès
Lojisyèl kliyan pwisan vini estanda ak chak modèl, pandan y ap fonksyon adisyonèl tankou milti-gaz, milti-ranje, oto-zewo, alam, demaraj mou, ak reta ki disponib kòm seleksyon kliyan.
Spesifikasyon
| CS200 | |||||||
| Kalite | CS200A | CS200C | CS200D | ||||
| Ranje echèl konplè (N2) | (0~5,10,20,30,50,100,200,300,500)SCCM | (0~2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| (0~1,2,3,5,10,20,30,50)SLM | (0~1,2,3,5,10,20,30)SLM | ||||||
| Presizyon | ±1.0% SP (≥35% FS) ±0.35% FS?(＜35% FS) | ||||||
| Linearite | ± 0.5% FS | ||||||
| Repetebilite | ± 0.2% FS | ||||||
| Tan repons | ≤1sec | ≤0.8 sec (SEMI E17-0600) | |||||
| Pozisyon repo valv | Nòmalman fèmen oswa | Pa gen Valv | Nòmalman fèmen oswa | Pa gen Valv | Nòmalman fèmen oswa | Pa gen Valv | |
| Nòmalman louvri（100 sccm≤FS≤5 slm) | Nòmalman louvri（100 sccm≤FS≤5 slm) | Nòmalman louvri（100 sccm≤FS≤5 slm) | |||||
| Presyon diferans | 0.05~0.35MPa （Flow≤10slm） | ＜0.02MPa | (0.05~0.35) MPa（≤10slm） | ＜0.02MPa | (0.05~0.35) MPa（≤10slm） | ＜0.02MPa | |
| 0.1~0.35MPa（10slm＜Flow≤30slm） | (0.1~0.35) MPa（＞10slm） | (0.1~0.35) MPa（＞10slm） | |||||
| 0.2~0.45MPa （Flow＞30slm） | |||||||
| Maksimòm Presyon Fonksyònman | 0.45MPa | |||||
| Tanperati | Zewo: ≤±0.05% FS / ℃; | Zewo: ≤±0.02% FS / ℃;Span: ≤±0.05% FS/℃ | ||||
| Koefisyan | Dispans: ≤±0.1% FS/℃（Flow≤30slm） | |||||
| Dispans: ≤±0.2% FS/℃（Flow>30slm） | ||||||
| Prèv Presyon | 3MPa (435pisg) | |||||
| Zewo drift | ＜0.6% FS pa ane san otozero | |||||
| Entegrite koule | 1×10-9 atm·cc / sec He | 1×10-10atm·cc / sec He | ||||
| Materyèl mouye | Viton; | Metal? (Nerjaveèi V/V, 5Ra) | Metal | |||
| Sifas Chimi | —— | rapò Cr/Fe ＞2.0;CrO epesè > 20 Angstròm | ||||
| Sifas fini | 25Ra | 10Ra | 25Ra | |||
| Tanperati operasyon | （5～45）℃ | （0~50）℃ | ||||
| Siyal Antre | Digital: RS485 oswa ProfiBus | N/A | Digital: RS485 oswa ProfiBus oswa DeviceNetTM | N/A | Digital: RS485 oswa ProfiBus oswa DeviceNetTM | N/A |
| oswa DeviceNetTM | Analòg: (0~5)VDC oswa (4~20)mA oswa (0~20)mA | Analòg: (0 ~ 5) VDC oswa (4 ~ 20) mA? oswa (0 ~ 20) mA | |||||
| Analòg: (0~5)VDC oswa (4~20)mA oswa (0~20)mA | |||||||
| Siyal Sòti | Digital: RS485 oswa DeviceNetTM oswa ProfiBus Analòg: (0~5)VDC oswa (4~20)mA oswa (0~20)mA | ||||||
| Ekipman pou pouvwa | ±8 ~ ±16 VDC oswa +14 ~ +28 VDC (400mA) | ||||||
| Elektwonik Connector | 9 pin gason sub-D, 15 pin gason sub-D, DeviceNetTM,ProfiBus ，Analòg | ||||||
| Fittings | VCR1/4" M； VCO1/4" M； | VCR1/4” M; | |||||
| Fitting konpresyonΦ10;Fitting konpresyonΦ6; | Konpresyon FittingΦ6, | ||||||
| Konpresyon Fitting 3/8 ";Fitting konpresyon 1/4 "; | Fitting konpresyonΦ3, | ||||||
| Konpresyon Fitting1/8”;Fitting konpresyonΦ3; | Fitting konpresyon 1/4 ", | ||||||
| Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose; | W-sele, | ||||||
| A-sael ; | C-sele | ||||||
| Pwa | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg | |
