Mass Flow Controller Misa Flow Meter CS200
Mawonekedwe
1. Kulondola Kwambiri ndi Kuyankha Mwachangu
Kulondola kwa CS200 MFC kwasinthidwa kukhala ± 1.0% ya SP, ndipo zitsanzo zapamwamba kwambiri zimakhala ndi nthawi yocheperapo yoyankha yosakwana 0.8 sec.
2. Low Zero Drift ndi Temperature Coefficient
Kupangidwa kwaukadaulo watsopano wa sensa kumathandizira CS200 MFC kukhala yokhazikika komanso kupirira kusinthasintha kwa kutentha.Popanda amplifier ya auto-zero, zero drift yomwe ikuyembekezeka ndi yochepera 0.6%FS/chaka, ndipo kutentha kumakhala kochepera 0.02%FS/℃(zero)，0.05%FS/ ℃ (span).
3. Zitsanzo Zosindikizidwa Zitsulo ndi Mawonekedwe Oyera Kwambiri
Njira yonyowa yolowera pa mzere wa CS200 MFC imapangidwa kuchokera kuzitsulo zosapanga dzimbiri zosapanga dzimbiri.Ma CS200 MFC onse amasonkhanitsidwa m'zipinda zoyera za Sevenstar's ultraclean Class 100 motsatira miyezo ya SEMI ndi ISO 9001.
4. Zogwirizana Zogwirizana
CS200 MFC imagwirizana ndi mawonekedwe otsatirawa, omwe angasankhidwe ndi kasitomala: ± 8V- ± 16V magetsi otsiriza awiri ndi + 14V-+28V magetsi amodzi;kulowetsa ndi kutulutsa kwa digito kapena analogi;SEMI miyeso yokhazikika yamakina;ndi RS-485 kapena DeviceNet communications module.
5. Ntchito Zosiyanasiyana
Mapulogalamu amphamvu amakasitomala amabwera ndi mtundu uliwonse, pomwe ntchito zowonjezera monga ma gasi ambiri, osiyanasiyana, auto-zero, ma alarm, zoyambira zofewa, ndi kuchedwa zimapezeka ngati zosankha zamakasitomala.
Kufotokozera
| CS200 | |||||||
| Mtundu | CS200A | CS200C | Chithunzi cha CS200D | ||||
| Mulingo wathunthu (N2) | ( 0～5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0-1,2,3,5,10,20,30)SLM | ||||||
| Kulondola | ± 1.0% SP (≥35% FS) ± 0.35% FS? (＜35% FS) | ||||||
| Linearity | ± 0.5% FS | ||||||
| Kubwerezabwereza | ± 0.2% FS | ||||||
| Nthawi Yoyankha | ≤1sec | ≤0.8 sec (SEMI E17-0600) | |||||
| Valve Rest Position | Nthawi zambiri Kutsekedwa kapena | Palibe Vavu | Nthawi zambiri Kutsekedwa kapena | Palibe Vavu | Nthawi zambiri Kutsekedwa kapena | Palibe Vavu | |
| Nthawi zambiri Otsegula (100 sccm≤FS≤5 slm) | Nthawi zambiri Otsegula (100 sccm≤FS≤5 slm) | Nthawi zambiri Otsegula (100 sccm≤FS≤5 slm) | |||||
| Kupanikizika Kosiyanasiyana | 0.05-0.35MPa (Flow≤10slm) | ＜0.02MPa | (0.05-0.35) MPa (≤10slm) | ＜0.02MPa | (0.05-0.35) MPa (≤10slm) | ＜0.02MPa | |
| 0.1 ~ 0.35MPa (10slm) Flow≤30slm) | (0.1-0.35) MPa ((((((~10slm)) | (0.1-0.35) MPa ((((((~10slm)) | |||||
| 0.2-0.45MPa (Flow) 30slm | |||||||
| Kuthamanga Kwambiri Kwambiri | 0.45MPa | |||||
| Kutentha | Ziro: ≤± 0.05% FS/℃; | Ziro: ≤± 0.02% FS/℃;Kutalika: ≤± 0.05% FS/℃ | ||||
| Coefficient | Kutalika: ≤± 0.1% FS/℃ (Flow≤30slm) | |||||
| Kutalika: ≤± 0.2% FS/℃ (Kuyenda> 30slm) | ||||||
| Umboni Wopanikizika | 3MPa (435pisg) | |||||
| Zero Drift | ＜0.6% FS pachaka popanda autozero | |||||
| Kutayikira umphumphu | 1 × 10-9 atm · cc / sec Iye | 1 × 10-10atm · cc / mphindi Iye | ||||
| Zida Zonyowetsedwa | Viton; | Chitsulo? (Stainless Steel V/V, 5Ra) | Chitsulo | |||
| Surface Chemistry | —- | Chiŵerengero cha Cr/Fe ＞2.0;makulidwe a CrO ＞20 Angstroms | ||||
| Pamwamba Pamwamba | 25ra | 10ra | 25ra | |||
| Kutentha kwa Ntchito | (5 ~45℃ | (0 ~ 50℃ | ||||
| Lowetsani Chizindikiro | Digital: RS485 kapena ProfiBus | N / A | Digital: RS485 kapena ProfiBus kapena DeviceNetTM | N / A | Digital: RS485 kapena ProfiBus kapena DeviceNetTM | N / A |
| kapena DeviceNetTM | Analogi:(0～5)VDC kapena (4～20)mA kapena (0～20)mA | Analogi:(0～5)VDC kapena (4～20)mA?or (0～20)mA | |||||
| Analogi:(0～5)VDC kapena (4～20)mA kapena(0～20)mA | |||||||
| Chizindikiro Chotulutsa | Digital: RS485 kapena DeviceNetTM kapena ProfiBus Analogi:(0～5)VDC kapena (4～20)mA kapena (0～20)mA | ||||||
| Magetsi | ± 8 ~ ± 16 VDC kapena +14 ~ +28 VDC (400mA) | ||||||
| Cholumikizira chamagetsi | 9 pini chachimuna cham'munsi-D, 15 pini chachimuna chaching'ono-D,DeviceNetTM,ProfiBus, Analogi | ||||||
| Zosakaniza | VCR1/4”M; VCO1/4”M; | VCR1/4”M; | |||||
| Compression FittingΦ10;Compression FittingΦ6; | Compression FittingΦ6, | ||||||
| Kuphatikizika kokwanira 3/8";Compress Fitting1/4”; | Compression FittingΦ3, | ||||||
| Compress Fitting1/8";Compression FittingΦ3; | Compress Fitting1/4”, | ||||||
| Ф6(mkati)×1hose;ф5(mkati)×1.5hose;ф4(mkati)×1hose; | W-chisindikizo, | ||||||
| A-sael; | C-chisindikizo | ||||||
| Kulemera | 1kg | 0.8kg pa | 1.2kg | 1kg | 1.2kg | 1kg | |
