Mass Flow Controller Mass Flow Meter CS200
Features
1. Hege Accuracy en Fast Response
De krektens fan 'e CS200 MFC is ferbettere nei ± 1,0% fan SP, en de meast avansearre modellen hawwe in fermindere antwurdtiid fan minder dan 0,8 sek.
2. Low Zero Drift en temperatuer Coefficient
De útfining fan nije sensortechnology stelt de CS200 MFC yn steat om stabiliteit te behâlden en temperatuerfluktuaasjes te wjerstean.Sûnder in auto-nul-fersterker is de ferwachte nuldrift minder dan 0,6% FS / jier, en de temperatuerkoëffisjint is minder dan 0,02% FS / ℃ (nul), 0,05% FS / ℃ (span).
3. Metal-Sealed modellen en High Purity Feature
It wiette streampaad fan 'e-de-line CS200 MFC is konstruearre fan oerflak-passivearre roestfrij stiel.Alle CS200 MFC's wurde gearstald yn Sevenstar's ultraclean Class 100-klasse skjinne keamers yn oerienstimming mei sawol SEMI as ISO 9001 noarmen.
4. Kompatible Schnittstellen
De CS200 MFC is kompatibel mei de folgjende ynterfaces, dy't kinne wurde selektearre troch de klant: ± 8V-± 16V dûbele-ein-voeding en + 14V- + 28V single-end voeding;digitale of analoge sinjaal input en output;SEMI standert meganyske ôfmjittings;en RS-485 of DeviceNet kommunikaasje module.
5. Diverse Funksjes
Krêftige klantsoftware komt standert mei elk model, wylst ekstra funksjes lykas multi-gas, multi-berik, auto-nul, alaarms, sêfte start en fertraging beskikber binne as klantseleksjes.
Spesifikaasje
| CS200 | |||||||
| Type | CS200A | CS200C | CS200D | ||||
| Folsleine skaalberik (N2) | ( 0~5,10,20,30,50,100,200,300,500)SCCM | ( 0~2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0~1,2,3,5,10,20,30,50)SLM | ( 0~1,2,3,5,10,20,30)SLM | ||||||
| Krektens | ±1.0% SP (≥35% FS) ±0.35% FS?(~35% FS) | ||||||
| Lineariteit | ±0,5% FS | ||||||
| Repeatabiliteit | ±0,2% FS | ||||||
| Reaksjetiid | ≤1 sek | ≤0.8 sek (SEMI E17-0600) | |||||
| Valve Rest Posysje | Normaal sletten of | Gjin Valve | Normaal sletten of | Gjin Valve | Normaal sletten of | Gjin Valve | |
| Normaal iepen (100 sccm≤FS≤5 slm) | Normaal iepen (100 sccm≤FS≤5 slm) | Normaal iepen (100 sccm≤FS≤5 slm) | |||||
| Differinsjaal druk | 0.05 ~ 0.35 MPa （Flow≤10slm） | ＜0,02 MPa | (0.05~0.35) MPa（≤10slm） | ＜0,02 MPa | (0.05~0.35) MPa（≤10slm） | ＜0,02 MPa | |
| 0.1~0.35MPa(10slm＜Flow≤30slm) | (0.1~0.35) MPa（＞10slm） | (0.1~0.35) MPa（＞10slm） | |||||
| 0.2–0.45 MPa (Flow＞30slm) | |||||||
| Maksimum wurkdruk | 0,45 MPa | |||||
| Temperatuer | Nul: ≤±0,05% FS/℃; | Nul: ≤±0,02% FS/℃;Span: ≤±0.05% FS/℃ | ||||
| Koëffisjint | Span: ≤±0.1% FS/℃（Flow≤30slm） | |||||
| Span: ≤±0.2% FS/℃ (Flow>30slm) | ||||||
| Bewiis druk | 3 MPa (435 pisg) | |||||
| Zero Drift | ＜0,6% FS per jier sûnder autonul | |||||
| Leak yntegriteit | 1×10-9 atm·cc / sek He | 1×10-10atm·cc / sek He | ||||
| Wette materialen | Viton; | Metaal? (Rustfrij stiel V/V, 5Ra) | Metaal | |||
| Surface Chemistry | —— | Cr/Fe ferhâlding ＞2.0;CrO dikte ＞20 Angstrom | ||||
| Oerflakte ôfwurking | 25 Ra | 10 Ra | 25 Ra | |||
| Operaasje temperatuer | (5 ~ 45 ℃ | (0-50℃ | ||||
| Ynput sinjaal | Digitaal: RS485 of ProfiBus | N/A | Digitaal: RS485 of ProfiBus of DeviceNetTM | N/A | Digitaal: RS485 of ProfiBus of DeviceNetTM | N/A |
| of DeviceNetTM | Analog: (0~5)VDC of (4~20)mA of (0~20)mA | Analog: (0~5)VDC of (4~20)mA?of (0~20)mA | |||||
| Analog: (0~5)VDC of (4~20)mA of (0~20)mA | |||||||
| Utfier sinjaal | Digitaal: RS485 of DeviceNetTM of ProfiBus Analog: (0~5)VDC of (4~20)mA of (0~20)mA | ||||||
| Streamtafier | ±8 ~ ±16 VDC of +14 ~ +28 VDC (400mA) | ||||||
| Elektroanyske Connector | 9 pin male sub-D ， 15 pin male sub-D ，DeviceNetTM,ProfiBus ，Analoog | ||||||
| Fittings | VCR1/4” M; VCO1/4” M； | VCR1/4” M; | |||||
| KompresjefittingΦ10;KompresjefittingΦ6； | KompresjefittingΦ6, | ||||||
| Kompresjefitting 3/8 ";Kompresjefitting 1/4"; | KompresjefittingΦ3, | ||||||
| Kompresjefitting 1/8 ";KompresjefittingΦ3； | Kompresjefitting 1/4 "， | ||||||
| Ф6(binnen)×1slang;ф5(binnen)×1.5slang;ф4(binnen)×1slang; | W-seal, | ||||||
| A-sael ; | C-seal | ||||||
| Gewicht | 1 kg | 0,8kg | 1,2kg | 1 kg | 1,2kg | 1 kg | |
