Thermal gas Mass Flow Controller (MFC)

Koarte beskriuwing:

Thermal gas massa flow controller (MFC) net allinnich hat de funksje fan massa flow meter, mar ek wichtiger it kin kontrolearje de gas flow automatysk dat betsjut dat de brûker kin ynstelle de stream as fersyk.MFC sil de stream op 'e ynstelde wearde automatysk reparearje.De ynstelde wearde sil net ôfwike, sels as de systeemdrukfluktuaasjes of omlizzende temperatuer feroaret.Koartsein, de massa flow controller is in stream stabile apparaat, is in gas flow stabile apparaat kin wurde programmearre mei de hân of regele troch in kompjûter automatysk.

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Produkt Detail

Produkt Tags

Dermalgasmkontfleechmeter(MFM) isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpressure, net nedichthecompensationoftemperatureandpressure.

Model	SQC-100
Flowberiken (N2)	0~5, 10, 20, 30, 50, 100, 200, 500 SCCM
Flowberiken (N2)	0~1, 2, 3, 5, 10, 15, 20, 30SLM
Krektens	±1％FS(≤15SLM)；±2％FS(＞15SLM)
Valve Drive Type	Normaal sluten
Lineariteit	±1％FS(≤15SLM)；±2％FS(＞15SLM)
Repeatabiliteit	±0.2％FS
Reaksjetiid	≤1 sek
Ynfier / útfier sinjaal	0-5v
Elektryske Joint	DB15 pin (naald)
Operaasje Tem.	5-45 ℃
Differinsjaal Pre.	0.05 ~ 0.5 MPa (MFC); 0.03 ~ 3.0 MPa (MFM)
Leak Rate	1 × 10-8SCCS (Hy)
Max.Druk	3 MPa
Medium Materiaal	316L SS en sealing materiaal
Sealing Materiaal	Viton, Silicone rubber, NBR, Teflon, Metal seal.
Joint Grutte	VCR 1/4"；Swagelok 1/8"、1/4"；φ3, φ6mm
Streamtafier	+15V,50mA;-15V,200mA

Model	SQC-200
Flowberiken (N2)	MFC: 0~20, 30, 50, 100, 150, 200 SLM
Flowberiken (N2)	MFM: 0~20, 30, 50, 100, 150, 200, 250, 300 SLM
Krektens	±2％FS
Valve Drive Type	Normaal sluten
Lineariteit	±2％FS
Repeatabiliteit	±0.2％FS
Reaksjetiid	≤5 sek
Ynfier / útfier sinjaal	1–5V;4–20mA
Elektryske Joint	DB15 pin (naald)
Operaasje Tem.	5-45 ℃
Differinsjaal Pre.	0.1 ~ 0.3 MPa (MFC); 0.05 ~ 3.0 MPa (MFM)
Leak Rate	1 × 10-8SCCS (Hy)
Max.Druk	3 MPa
Medium Materiaal	316L SS en sealing materiaal
Sealing Materiaal	Viton, Silicone rubber, NBR, ERP, Teflon
Joint Grutte	Swagelok 3/8"、1/2"； φ8、φ10、φ12mm
Streamtafier	24V, 0,5A