Thermal gas Mass Flow Controller (MFC)

Lus piav qhia luv luv:

Thermal gas mass flow controller (MFC) tsis tsuas yog muaj kev ua haujlwm ntawm huab hwm coj ntsuas, tab sis tseem ceeb dua nws tuaj yeem tswj cov roj ntws tau txais txiaj ntsig uas txhais tau tias tus neeg siv tuaj yeem teeb tsa qhov ntws raws li kev thov.MFC yuav kho qhov ntws ntawm tus nqi teeb tsa tau.Tus nqi teev yuav tsis deviated txawm tias lub kaw lus siab hloov pauv lossis ib puag ncig kub hloov.Nyob rau hauv luv luv, lub loj txaus tswj yog ib tug txaus ruaj khov ntaus ntawv, yog ib tug roj txaus ruaj khov ntaus ntawv yuav programmed manually los yog tswj los ntawm lub computer txiav.

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Product Detail

Khoom cim npe

Covrmalgasmassfqismeter(MFM) ibkindofacura uatemeasu uarementofgasflow,the measu uaredvaluesarenotcontrolledby uafluc uatuationsintemua peratua ureorpressur, tsis xav tauthecompensationoftua emperatua urandpre uassure.

Qauv	SQC-100
Qhov ntau ntawm Flow (N2)	0 ~ 5, 10, 20, 30, 50, 100, 200, 500SCCM
Qhov ntau ntawm Flow (N2)	0 ~ 1, 2, 3, 5, 10, 15, 20, 30 SLM
Qhov tseeb	± 1％FS(≤15SLM) ± 2％FS(＞15SLM)
Valve Tsav Hom	Ib txwm kaw
Linearity	± 1％FS(≤15SLM) ± 2％FS(＞15SLM)
Rov ua dua	± 0.2% FS
Teb Sijhawm	≤ 1 sec
Input/output Signal	0 v5v
Hluav taws xob sib koom	DB15 pin (koob)
Kev Ua Haujlwm Teem.	5 ~ 45 ℃
Differential Pre.	0.05 ~ 0.5MPa (MFC) 0.03 ~ 3.0MPa (MFM)
Leak Rate	1 × 10-8SCCS (Nws)
Max.Siab	3 MPa
Khoom siv nruab nrab	316L SS thiab sealing khoom
Sealing Khoom	Viton, Silicone roj hmab, NBR, Teflon, Hlau foob.
Qhov Loj	VCR 1/4 "; Swagelok 1/8" , 1/4 "; φ3, φ6mm
Fais fab mov	+ 15V, 50mA; -15V, 200mA

Qauv	SQC-200
Qhov ntau ntawm Flow (N2)	MFC: 0 ~ 20, 30, 50, 100, 150, 200 SLM
Qhov ntau ntawm Flow (N2)	MFM: 0 ~ 20, 30, 50, 100, 150, 200, 250, 300 SLM
Qhov tseeb	± 2% FS
Valve Tsav Hom	Ib txwm kaw
Linearity	± 2% FS
Rov ua dua	± 0.2% FS
Teb Sijhawm	≤ 5 sec
Input/output Signal	1 ~ 5V; 4 ~ 20mA
Hluav taws xob sib koom	DB15 pin (koob)
Kev Ua Haujlwm Teem.	5 ~ 45 ℃
Differential Pre.	0.1 ~ 0.3MPa (MFC); 0.05 ~ 3.0MPa (MFM)
Leak Rate	1 × 10-8SCCS (Nws)
Max.Siab	3 MPa
Khoom siv nruab nrab	316L SS thiab sealing khoom
Sealing Khoom	Viton, Silicone roj hmab, NBR, ERP, Teflon
Qhov Loj	Swagelok 3/8 ", 1/2"; φ8, φ10, φ12mm
Fais fab mov	24 V, 0.5A