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Mai Kula da Mass Flow Controller (MFC)

Takaitaccen Bayani:

Mai kula da iskar gas na thermal (MFC) ba wai kawai yana da aikin madaidaicin mita ba, amma kuma mafi mahimmanci yana iya sarrafa kwararar iskar gas ta atomatik wanda ke nufin mai amfani zai iya saita kwarara azaman buƙata.MFC za ta gyara magudanar ruwa akan ƙimar saita ta atomatik.Ƙimar da aka saita ba za ta karkata ba ko da canjin yanayin tsarin ko yanayin zafi ya canza.A takaice, na'ura mai kula da kwararar taro shine na'urar tsayayye, iskar gas ce tsayayyen na'urar ana iya tsara shi da hannu ko sarrafa ta kwamfuta ta atomatik.

 


Cikakken Bayani

Tags samfurin

Thermalgasmassfƙanananmeter(MFM) isakindogaskiyatemeasuremshigagasflow,the measuredvalkasarinotcontrolledbyfluctuationsintemperatureorpressure, ba bukatathecompensationoftemperratureandpressure.

Samfura Saukewa: SQC-100
Matsakaicin Tafiya (N2) 0~5,10,20,30,50,100,200,500SCCM
0~1, 2, 3, 5, 10, 15, 20, 30SLM
Daidaito ±1%FS(≤15SLM):2%FS(>15SLM)
Nau'in Driver Valve An rufe na al'ada
Linearity ±1%FS(≤15SLM):2%FS(>15SLM)
Maimaituwa ± 0.2 FS
Lokacin Amsa ≤1 dakika
Siginar shigarwa/fitarwa 0 ~5V
Haɗin Wutar Lantarki DB15 fil (allura)
Operation Tem. 5 ℃ 45
Daban-daban Pre. 0.05 ~ 0.5MPa (MFC); 0.03 ~ 3.0MPa (MFM)
Yawan Leak 1 × 10-8SCCS (Shi)
Max.Matsin lamba 3MPa
Matsakaici Material 316L SS da abin rufewa
Abun rufewa Viton, Silicone roba, NBR, Teflon, Karfe hatimi.
Girman haɗin gwiwa VCR 1/4 "; Swagelok 1/8" , 1/4 "; φ3, φ6mm
Tushen wutan lantarki + 15V, 50mA; -15V,200mA
Samfura SQC-200
Matsakaicin Tafiya (N2) MFC: 0 ~ 20, 30, 50, 100, 150, 200SLM
MFM: 0-20, 30, 50, 100, 150, 200, 250, 300SLM
Daidaito ± 2 FS
Nau'in Driver Valve An rufe na al'ada
Linearity ± 2 FS
Maimaituwa ± 0.2 FS
Lokacin Amsa ≤5 dakika
Siginar shigarwa/fitarwa 1 5V; 4 ~ 20mA
Haɗin Wutar Lantarki DB15 fil (allura)
Operation Tem. 5 ℃ 45
Daban-daban Pre. 0.1 ~ 0.3MPa (MFC); 0.05 ~ 3.0MPa (MFM)
Yawan Leak 1 × 10-8SCCS (Shi)
Max.Matsin lamba 3MPa
Matsakaici Material 316L SS da abin rufewa
Abun rufewa Viton, roba silicone, NBR, ERP, Teflon
Girman haɗin gwiwa Swagelok 3/8 ", 1/2"; φ8, φ10, φ12mm
Tushen wutan lantarki 24V, 0.5A

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