Thermal gas Mass Flow Controller (MFC)

Kufotokozera Kwachidule:

Thermal gas flow controller (MFC) sikuti ili ndi ntchito ya mita yothamanga kwambiri, komanso yofunika kwambiri imatha kuwongolera kuyenda kwa gasi yokha zomwe zikutanthauza kuti wogwiritsa ntchitoyo akhoza kukhazikitsa ngati pempho.MFC idzakonza zoyenda pamtengo wokhazikitsidwa zokha.Mtengo wokhazikitsidwa sudzapatutsidwa ngakhale kusinthasintha kwa dongosolo kapena kutentha kozungulira.Mwachidule, misa otaya Mtsogoleri ndi otaya khola chipangizo, ndi mpweya otaya khola chipangizo akhoza anakonza pamanja kapena kulamulidwa ndi kompyuta basi.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Thermnderembulufotsikameter(MFM) ndikndiofackuratemeasuremchinthugasflow,the measuredvaluesarenotcontrolledbyfmwayituationsintemperatureorpressure, osafunikirathecompensationoftemperatureandpressure.

Chitsanzo	SQC-100
Mayendedwe (N2)	0～5,10,20,30,50,100,200,500SCCM
Mayendedwe (N2)	0～1, 2, 3, 5, 10, 15, 20, 30SLM
Kulondola	±1％FS(≤15SLM);±2％FS(＞15SLM)
Mtundu wa Valve Drive	Yachibadwa Yotsekedwa
Linearity	±1％FS(≤15SLM);±2％FS(＞15SLM)
Kubwerezabwereza	±0.2％FS
Nthawi Yoyankha	≤1sec
Chizindikiro / zotulutsa	0 ndi 5v
Mgwirizano Wamagetsi	DB15 pini (singano)
Operation Tem.	5 ~45℃
Kusiyana kwa Pre.	0.05 ~ 0.5MPa (MFC); 0.03 ~ 3.0MPa (MFM)
Leak Rate	1 × 10-8SCCS (Iye)
Max.Kupanikizika	3 MPa pa
Zinthu Zapakatikati	316L SS ndi zinthu zosindikizira
Kusindikiza Zinthu	Viton, mphira wa silicone, NBR, Teflon, Metal seal.
Kukula Kolumikizana	VCR 1/4”; Swagelok 1/8”, 1/4”; φ3, φ6mm
Magetsi	+ 15V, 50mA;-15V, 200mA

Chitsanzo	SQC-200
Mayendedwe (N2)	MFC: 0-20, 30, 50, 100, 150, 200SLM
Mayendedwe (N2)	MFM: 0-20, 30, 50, 100, 150, 200, 250, 300SLM
Kulondola	±2％FS
Mtundu wa Valve Drive	Yachibadwa Yotsekedwa
Linearity	±2％FS
Kubwerezabwereza	±0.2％FS
Nthawi Yoyankha	≤5sec
Chizindikiro / zotulutsa	1 ~ 5V; 4 ~ 20mA
Mgwirizano Wamagetsi	DB15 pini (singano)
Operation Tem.	5 ~45℃
Kusiyana kwa Pre.	0.1 ~ 0.3MPa (MFC); 0.05 ~ 3.0MPa (MFM)
Leak Rate	1 × 10-8SCCS (Iye)
Max.Kupanikizika	3 MPa pa
Zinthu Zapakatikati	316L SS ndi zinthu zosindikizira
Kusindikiza Zinthu	Viton, mphira wa silicone, NBR, ERP, Teflon
Kukula Kolumikizana	Swagelok 3/8”, 1/2”; φ8, φ10, φ12mm
Magetsi	24V,0.5A