Isivinini sokumpompa esikhulu esihlala isikhathi eside Umsindo ophansi we-DRV ojikelezayo wephampu yephampu yomoya
Iphampu yevacuum yochungechunge lwe-DRV iyisiteji esiphindwe kabili se-vacuum vacuum evalwe ngamafutha elungele ukusetshenziswa kwevacuum ephansi namaphakathi, esetshenziselwa kakhulu ukususa umoya namanye amagesi owomile.Ingenye yemishini eyinhloko ye-vacuum ephansi nephakathi, ingasetshenziswa yodwa noma njengephambili
iphampu yamanye amaphampu evacuum.
Iphampu ye-vacuum inezici zokusebenza okuthembekile kokusebenza, izingxenye ezingagqoki kangako, ukudlidliza okuphansi, umsindo ophansi nokusebenza kahle okuphezulu.
Iphampu yevacuum yochungechunge lwe-SV ingeniswa kubuchwepheshe obuthuthukile bakwamanye amazwe, futhi izingxenye ezibalulekile yizingxenye ezingeniswa kwamanye amazwe noma zingeniswa kwamanye amazwe.
izinto zokwakha.Iphampu yevacuum yochungechunge lwe-DRV ingamiselela ngokuphelele imikhiqizo yangaphandle efanayo.
Ibhukwana lomkhiqizo we-EVFB Series Molecular Pump
Imodeli:
I-EVFB-100/301 Iphampu ye-molecular ehlanganisiwe ehlanganisiwe
I-EVFB-160/401 Iphampu ye-molecular ehlanganisiwe ehlanganisiwe
I-EVFB-160/450D Iphampu ye-molecular Anti-vibration
I-EVFB-160/701Iphampu ye-molecular ehlanganisiwe ehlanganisiwe
I-EVFB-200/1401 Iphampu ye-molecular ehlanganisiwe ehlanganisiwe
I-EVFB-250/2201 Iphampu ye-molecular ehlanganisiwe ehlanganisiwe
I-EVFB-160/701Iphampu ye-molecular eyinhlanganisela
I-EVFB-200/1401 Iphampu ye-molecular eyinhlanganisela
I-EVFB-250/2201 Iphampu ye-molecular eyinhlanganisela
I-EVFB-400/3600 iphampu yamangqamuzana e-Turbo
I-EVFB-400/4500 Iphampu yamangqamuzana ye-Turbo
Uhlolojikelele Lomkhiqizo
Iphampu ye-molecular iwuhlobo lwepompo ye-vacuum yokudlulisa umfutho egijima ngesivinini esiphezulu, ububanzi bayo bengcindezi yokusebenza ngokuvamile bungu-10.-1Pa ~ 10-7I-Pa, ingenye yemishini ebalulekile yokuthola i-vacuum ukuze kutholakale i-vacuum ephezulu kanye ne-ultra-high vacuum.Iphampu yamangqamuzana inezinzuzo zejubane lokuqalisa ngokushesha, ububanzi obubanzi bokusebenza, ukusetshenziswa kwamandla okuphansi, ukuhlanzeka okuphezulu nokugcinwa okulula.
Imikhiqizo yephampu yamangqamuzana echazwe kule sampula yencwadi iyisizukulwane sesibili semikhiqizo
esanda kwethulwa yinkampani, eklanyelwe futhi yalungiselelwa izikhala zezimboni kanye nezinkambu zocwaningo lwesayensi, okuhlanganisa uchungechunge lokuqala lwemikhiqizo yephampu ye-vacuum yamangqamuzana yezimboni enazilawuli ezididiyelwe kanye nezimo zesicelo ezivumelana nezimo.Ngokwezinga, kukhona ikakhulukazi i-DN100, i-DN160, i-DN200, i-DN250 ne-DN400 neminye imikhiqizo.
Gcoba iphampu yamangqamuzana agcotshiwe
Izici eziyinhloko zalolu chungechunge lwemikhiqizo:
(1) Isilawuli esihlanganisiwe: Idizayini yesilawuli edidiyelwe, Lungiselela ukuhlanganiswa kwesistimu, Isiqalo esibalulekile sokumisa;
(2) Ukunemba okunembayo: Ukugcotshwa kwamafutha okunemba ngebhola le-ceramic, Kufakwe kunoma iyiphi i-Engeli;
(3) Ukuthembeka okuphezulu: ama-rotor esewonke, ubuchwepheshe bokushayela be-BLDC;
(4) Ukuhlukahluka okusebenzayo: Uhla olugcwele lwezesekeli, izixazululo ezenziwe ngezifiso ziyatholakala;
(5) Nikeza umsebenzi wejubane oguquguqukayo, Ukuhlangabezana nezidingo zejubane lokupompa elihlukahlukene;
Lolu chungechunge lwemikhiqizo lufaneleka kakhulu i-PVD, i-CVD, ipuleti ye-crystal ewuketshezi kanye nezinye izimbobo zezimboni;I-mass spectrometry, i-high-energy physics, ukutholwa kokuvuza kwevacuum, ubunjiniyela bezokwelapha nobunjiniyela bebhayoloji kanye neminye imikhakha yocwaningo lwesayensi.
I-Molecular pump technical Specifications
| Imodeli | I-EVFB-100/301 | I-EVFB-160/401 | I-EVFB-160/450D(kwenzelwe ikhasimende） | ||||
| ☑I vacuum imingcele | |||||||
| Ukumpompa isivinini (L/s) | N2 | He | N2 | He | N2 | He | |
| 300 | 230 | 460 | 380 | 38 | 310 | ||
| Okokugcina ingcindezi | < 5×10-6 Pa (LF);< 5×10 -7 Pa (CF) | < 8×10 -6 Pa (LF) < 8×10 -7 Pa (CF) | |||||
| Ukucindezelwa isilinganiso | > | > | > | > | > 1×108 | > 1×10 3 | |
| Maximumcontinuousinletpress ure | 10 Pa | 2 Pa | 10 Pa | 2 Pa | 20 | 5 Pa | |
| MaximumcontinuousForelinepressure | 300 | 200 | 300 | 200 Pa | 20 | 10 Pa | |
| I-Maxforelinepressuretolerance | 1000 | 500 | 1000 | 500 Pa | 50 | 20 Pa | |
| ☑Okomzimba ipharamitha | |||||||
| Inlet i-flange | I-DN100 ISO-K (LF) noma CF | I-DN160 ISO-K (LF) noma i-CF | |||||
| I-Foreline i-flange | I-DN25 ISO-KF noma i-DN40KF (Ngokuzithandela) | ||||||
| Hlanza i-flange | I-DN16 ISO-KF | ||||||
| Isisindo | 9.6 kg (ISO-K | 10kg (ISO-K) | |||||
| 10kg (CF) | 11 kg (CF) | ||||||
| Ukudlidliza | ≤0.05 μm | ||||||
| Umsindo | ≤55 dB (Ukupholisa komoya okujwayelekile) | ||||||
| Ukuzala | Gcoba amabhola e-ceramic agcotshisiwe | ||||||
| Isebenza isikhundla | Noma yikuphi | ||||||
| I-Oper.ambient Uzibuthe inkambu | ≤3 mT (I-10mT enkulu kunazo zonke, Idinga ukwenza ngezifiso) | ||||||
| Oper.ambie nt | Ukupholisa umoya | 5 ~ 35 ℃ | |||||
| Ukupholisa amanzi | 5 ~ 40 ℃ | ||||||
| Izidingo zokupholisa amanzi | Ukushisa kwamanzi: 15-30 ℃; ingcindezi: 0.15Mpa; PH6~8, ngokusobala,Amafutha; flow:≥1L/min | ||||||
| Kunconyiwe iphampu | 2~6 amalitha/imizuzwana | 3~8L/s | |||||
| ☑Isilawuli imingcele | |||||||
| Isilawuli | I-EVFB-II | ||||||
| Ukujikeleza isivinini | 48000rp | 36000rpm | |||||
| Phansi isivinini | 33600rp | 25200rpm | |||||
| Qalisa isikhathi | ≤5 amaminithi | ||||||
| Amandla kagesi | 48VAC±2% | ||||||
| Ukuxhumana imodi | RS-485 | ||||||
| Imodeli | I-EVFB-160/701 | I-EVFB-200/1401 | I-EVFB-250/2201 | ||||
| ☑I vacuum imingcele | |||||||
| Okokugcina ingcindezi (Pa) | <5x10-6 (LF);<5x10-7(CF) | ||||||
| Ukumpompa isivinini (L/s) | N2 | He | N | He | N2 | He | |
| 6 | 5 | 1350 | 1200 | 2050 | 1800 | ||
| Ukucindezelwa isilinganiso | >1x1011 | >1x104 | >1x1011 | >1x104 | >1x1010 | >1x104 | |
| Maximumcontinuousinletpress ure(Pa) | 2 | 1 | 2 | 1 | 2 | 1 | |
| MaximumcontinuousForelinepressure(Pa) | 30 | 2 | 3 | 2 | 2 | 1 | |
| I-Maxforelinepress i-uretolerance (Pa) | 10 | 5 | 1000 | 5 | 5 | 2 | |
| ☑Okomzimba ipharamitha | |||||||
| Inlet i-flange | I-DN160 ISO-K (LF) noma i-CF | I-DN200 ISO-K (LF)或 CF | I-DN250 ISO-K (LF) noma | ||||
| I-Foreline i-flange | I-DN25 ISO-KF noma i-KF40(Uma uthanda) | I-DN40 ISO-KF noma i-KF50(Uma uthanda) | |||||
| Hlanza i-flange | I-DN16 ISO-KF | ||||||
| Kunconyiwe iphampu yangaphambili(L/s) | 4~ | 8~ | 16~2 | ||||
| Isisindo(kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ||||
| 23 (CF) | 34 | 45 (CF) | |||||
| Ukudlidliza | ≤ | ||||||
| Umsindo(dB) | ≤ | ||||||
| Ukuzala | Gcoba amabhola e-ceramic agcotshisiwe | ||||||
| Isebenza isikhundla | Noma yikuphi | ||||||
| Uzibuthe inkambu amandla (mT) | ≤3 (I-10mT enkulu kunazo zonke, Idinga ukwenza ngezifiso) | ||||||
| I-Oper.ambient izinga lokushisa | Umoya ukupholisa | 5 ~ 35℃ | |||||
| Amanzi ukupholisa | 5 ~ 40℃ | ||||||
| Ukupholisa amanzi izidingo | Ukushisa kwamanzi: 15-25 ℃; ingcindezi: 0.15Mpa; PH6~8, ngokusobala, Amafutha angenawo Ukugeleza:≥1.5L/min | ||||||
| ☑Isilawuli imingcele | |||||||
| Isilawuli | I-EVFB-III-A | ||||||
| Ukuxhumana imodi | RS-485 | ||||||
| Amandla kagesi(V） | 220V AC±10% | ||||||
| Imvamisa(Hz） | 50/60±5% | ||||||
| Ubuningi okokufaka Amandla(W） | 100 | ||||||
| Qala/misa ukulawula imodi | Izinkinobho zokulawula zilawula ukuqala nokumisa / isilawuli se-RS485 siqala futhi simise / DB15 Ukulawula ukuqala nokumisa | ||||||
| Ukuvikela | I-controller overcurrent, overvoltage, undervoltage, ukuvikela ukushisa ngokweqile, i-molecular pump overcurrent, overload, ukuvikela ukushisa ngokweqile, njll. | ||||||
| Ukujikeleza isivinini (r/min) | 36000±0.1% | 30000±0.1% | 24000±0.1% | ||||
| Phansi isivinini (r/min) | 25200±0.1% | 21000±0.1% | 16800±0.1% | ||||
| Okwamanje(A） | ≤0.6 | ≤1 | ≤1 | ||||
| Ukuvikelwa fuse(A） | 6.5 | 6.5 | 6.5 | ||||
| Isikhathi sokuqala(imiz） | ~5 | ~6 | ~7 | ||||
| Isikhathi sokuphumula(imiz） | ~5 | ~10 | ~12 | ||||
I-Dimension Ephelele
| Imodeli | DN | d1 | h | h1 | h2 | d2 | n |
| I-EVFB-100/301 | 100 LF | 130 | 253.5 | 180 | 170 | - | - |
| 100 CF | 152 | 274.5 | 201 | 191 | 130.3 | 16 | |
| I-EVFB-160/401 | 160 LF | 180 | 239.5 | 169.5 | 159.5 | - | - |
| 160 CF | 202 | 238.5 | 168.5 | 158.5 | 181 | 20 | |
| I-EVFB-160/450D | 160 LF | 180 | 243 | 169.5 | 159.5 | - | - |
| 160 CF | 202 | 242 | 168.5 | 158.5 | 181 | 20 |
| Imodeli | DN | d1 | d2 | h | h1 | h3 | L |
| I-EVFB-160/700 | 160 LF | 180 | 218.5 | 241.8 | 336.8 | 201.8 | 124.8 |
| I-EVFB-160/701 | 160CF | 202 | 218.5 | 268.8 | 359.8 | 224.8 | 124.8 |
| I-EVFB-200/1400 | 200 LF | 240 | 267 | 257.5 | 352.5 | 231.5 | 155.1 |
| I-EVFB-200/1401 | 200CF | 253 | 267 | 274.5 | 369.5 | 248.5 | 155.1 |
| I-EVFB-250/2200 | 250 LF | 290 | 296 | 229.8 | 324.8 | 203.8 | 165.3 |
| I-EVFB-250/2201 | 250CF | 305 | 296 | 259.8 | 354.8 | 233.8 | 165.3 |
Iya-oda Ulwazi
| Inombolo | Umkhiqizo imodeli | Umkhiqizo ikhodi | Izesekeli | Odainombolo | Chaza |
|
1 |
I-EVFB-100/301(LF) |
A3123 | iphampu ejwayelekile yamangqamuzana | A3123 | Iphampu ejwayelekile (Ukupholisa komoya kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve(ukugeleza okuncane) | I-A3123-A | Iphampu evamile + Izinsiza ze-valve Hlanza (ukugeleza okuncane) | |||
| Izingxenye zokupholisa amanzi | I-A3123-B | Iphampu evamile + Izingxenye zokupholisa amanzi (Faka esikhundleni sezingxenye ezipholile komoya) | |||
| Hlanza izesekeli ze-valve (ukugeleza okuncane), izingxenye zokupholisa amanzi | I-A3123-C | Iphampu evamile + Izesekeli ze-valve Hlanza (ukugeleza okuncane)+ Izingxenye zokupholisa amanzi (Shintsha izingxenye ezipholile komoya) | |||
|
2 |
I-EVFB-100/301(CF) |
A3124 | iphampu ejwayelekile yamangqamuzana | A3124 | Iphampu ejwayelekile (Ukupholisa komoya kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve(ukugeleza okuncane) | I-A3124-A | Iphampu evamile + Izinsiza ze-valve Hlanza (ukugeleza okuncane) | |||
| Izingxenye zokupholisa amanzi | I-A3124-B | Iphampu evamile + Izingxenye zokupholisa amanzi (Faka esikhundleni sezingxenye ezipholile komoya) | |||
| Hlanza izesekeli ze-valve (ukugeleza okuncane), izingxenye zokupholisa amanzi | I-A3124-C | Iphampu evamile + Izesekeli ze-valve Hlanza (ukugeleza okuncane)+ Izingxenye zokupholisa amanzi (Shintsha izingxenye ezipholile komoya) | |||
|
3 |
I-EVFB-160/401(LF) |
A3127 | iphampu ejwayelekile yamangqamuzana | A3127 | Iphampu ejwayelekile (Ukupholisa komoya kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve(ukugeleza okuncane) | I-A3127-A | Iphampu evamile + Izinsiza ze-valve Hlanza (ukugeleza okuncane) | |||
| Izingxenye zokupholisa amanzi | I-A3127-B | Iphampu evamile + Izingxenye zokupholisa amanzi (Faka esikhundleni sezingxenye ezipholile komoya) | |||
| Hlanza izesekeli ze-valve (ukugeleza okuncane), izingxenye zokupholisa amanzi | I-A3127-C | Iphampu evamile + Izesekeli ze-valve Hlanza (ukugeleza okuncane)+ Izingxenye zokupholisa amanzi (Shintsha izingxenye ezipholile komoya) | |||
|
4 |
I-EVFB-160/401(CF) |
A3128 | iphampu ejwayelekile yamangqamuzana | A3128 | Iphampu ejwayelekile (Ukupholisa komoya kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve(ukugeleza okuncane) | I-A3128-A | Iphampu evamile + Izinsiza ze-valve Hlanza (ukugeleza okuncane) | |||
| Izingxenye zokupholisa amanzi | I-A3128-B | Iphampu evamile + Izingxenye zokupholisa amanzi (Faka esikhundleni sezingxenye ezipholile komoya) | |||
| Hlanza izesekeli ze-valve | I-A3128-C | Iphampu evamile + I-valve yokuhlanza |
| (ukugeleza okuncane), izingxenye zokupholisa amanzi | izesekeli (ukugeleza okuncane)+ Izingxenye zokupholisa amanzi (Faka esikhundleniizingxenye ezipholile emoyeni) | ||||
|
5 |
I-EVFB-160/450D(LF) |
A3129 | iphampu ejwayelekile yamangqamuzana | A3129 | Iphampu ejwayelekile (Ukupholisa komoya kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve(ukugeleza okuncane) | I-A3129-A | Iphampu evamile + Izinsiza ze-valve Hlanza (ukugeleza okuncane) | |||
| Izingxenye zokupholisa amanzi | I-A3129-B | Iphampu evamile + Izingxenye zokupholisa amanzi (Faka esikhundleni sezingxenye ezipholile komoya) | |||
| Hlanza izesekeli ze-valve (ukugeleza okuncane), izingxenye zokupholisa amanzi | I-A3129-C | Iphampu evamile + Izesekeli ze-valve Hlanza (ukugeleza okuncane)+ Izingxenye zokupholisa amanzi (Shintsha izingxenye ezipholile komoya) | |||
|
6 |
I-EVFB-160/450D(CF) |
A3130 | iphampu ejwayelekile yamangqamuzana | A3130 | Iphampu ejwayelekile (Ukupholisa komoya kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve(ukugeleza okuncane) | I-A3130-A | Iphampu evamile + Izinsiza ze-valve Hlanza (ukugeleza okuncane) | |||
| Izingxenye zokupholisa amanzi | I-A3130-B | Iphampu evamile + Izingxenye zokupholisa amanzi (Faka esikhundleni sezingxenye ezipholile komoya) | |||
| Hlanza izesekeli ze-valve (ukugeleza okuncane), izingxenye zokupholisa amanzi | I-A3130-C | Iphampu evamile + Izesekeli ze-valve Hlanza (ukugeleza okuncane)+ Izingxenye zokupholisa amanzi (Shintsha izingxenye ezipholile komoya) | |||
|
7 |
I-EVFB-160/701(LF) |
A3139 | iphampu ejwayelekile yamangqamuzana | A3139 | Iphampu ejwayelekile (Ukupholisa amanziijwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3139-A | Iphampu evamile + I-valve yokuhlanzaizesekeli | |||
| Izingxenye zabalandeli | I-A3139-B | Iphampu evamile + Ifeni | |||
| Hlanza i-valve izesekeli,Izingxenye zabalandeli | I-A3139-C | Iphampu evamile + I-valve yokuhlanzaizesekeli + Izingxenye zabalandeli | |||
|
8 |
I-EVFB-160/701(CF) |
A3140 | iphampu ejwayelekile yamangqamuzana | A3140 | Iphampu ejwayelekile (Ukupholisa amanziijwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3140-A | Iphampu evamile + I-valve yokuhlanzaizesekeli | |||
| Izingxenye zabalandeli | I-A3140-B | Iphampu evamile + Izingxenye zabalandeli | |||
| Hlanza i-valve izesekeli,Izingxenye zabalandeli | I-A3140-C | Iphampu evamile + I-valve yokuhlanzaizesekeli + Izingxenye zabalandeli | |||
|
9 |
I-EVFB-200/1401(LF) |
A3135 | iphampu ejwayelekile yamangqamuzana | A3135 | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3135-A | Iphampu evamile + I-valve yokuhlanzaizesekeli | |||
| Izingxenye zabalandeli | I-A3135-B | Iphampu evamile + Izingxenye zabalandeli | |||
| Hlanza i-valve izesekeli, | I-A3135-C | Iphampu evamile + I-valve yokuhlanza |
| Izingxenye zabalandeli | izesekeli + Izingxenye zabalandeli | ||||
|
10 |
I-EVFB-200/1401(CF) |
A3136 | iphampu ejwayelekile yamangqamuzana | A3136 | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3136-A | Iphampu evamile + I-valve yokuhlanzaizesekeli | |||
| Izingxenye zabalandeli | I-A3136-B | Iphampu evamile + Izingxenye zabalandeli | |||
| Hlanza izesekeli ze-valve, | I-A3136-C | Iphampu evamile + I-valve yokuhlanzaizesekeli + Izingxenye zabalandeli | |||
|
11 |
I-EVFB-250/2201(LF) |
A3141 | iphampu ejwayelekile yamangqamuzana | A3141 | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3141-A | Iphampu evamile + I-valve yokuhlanzaizesekeli | |||
| Izingxenye zabalandeli | I-A3141-B | Iphampu evamile + Ifeni | |||
| Hlanza izesekeli ze-valve, Izingxenye zabalandeli | I-A3141-C | Iphampu evamile + I-valve yokuhlanzaizesekeli + Izingxenye zabalandeli | |||
|
12 |
I-EVFB-250/2201(CF) |
A3142 | iphampu ejwayelekile yamangqamuzana | A3142 | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3142-A | Iphampu evamile + I-valve yokuhlanzaizesekeli | |||
| Izingxenye zabalandeli | I-A3142-B | Iphampu evamile + Ifeni | |||
| Hlanza izesekeli ze-valve, | I-A3142-C | Iphampu evamile + I-valve yokuhlanzaizesekeli + Izingxenye zabalandeli | |||
| 13 | I-EVFB-II | A3261 | - | A3261 | Isilawuli sephampu yamangqamuzana (Sifanele amaphampu wamangqamuzana afana ne-EVFB- 100/301, EVFB- 160/401, EVFB-100/450D) |
| 14 | I-EVFB-III-A | A3263 | - | A3263 | Isilawuli sephampu yamangqamuzana (Sifanele amaphampu wamangqamuzana afana ne-EVFB-160/701, EVFB-200/1401, EVFB-250/2201) |
Amaphampu e-molecular Ehlanganisiwe Ehlanganisiwe
Izici eziyinhloko zalolu chungechunge lwemikhiqizo:
(1) Isilawuli esihlukanisiwe: Ukunikezwa kwamandla ka-AC220V, Ukhiye wokuqala wokumisa;
(2) Ukuthembeka okuphezulu: ama-rotor esewonke, ubuchwepheshe bokushayela be-BLDC;
(3) Ukunemba okunembayo: Ukunemba kwebhola le-ceramic eqondile, Kufakwe kunoma iyiphi i-Engeli (Amamodeli agcotshisiwe kuphela)
(4) Ukuhlukahluka okusebenzayo: Uhla olugcwele lwezesekeli, izixazululo ezenziwe ngezifiso ziyatholakala;
(5) Nikeza umsebenzi wejubane olungisekayo, Ukuze uhlangabezane nezidingo zejubane lokupompa elihlukahlukene; Lolu chungechunge lwemikhiqizo lusebenza kakhulu ku-PVD, CVD, ipuleti lekristalu eliwuketshezi nokunye.
enamathela ezimbonini, ucwaningo lwesayensi kanye neminye imikhakha.
Ipharamitha yephampu ye-molecular
| Imodeli | I-EVFB-160/701 | I-EVFB-200/1401 | I-EVFB-250/2201 | I-EVFB-400/3600 | I-EVFB-400/4500 | |||||
| ☑I vacuum imingcele | ||||||||||
| I-Ultimatepressure(Pa) | <5x10-6 (LF);<5x10-7(CF) | |||||||||
| Ukumpompa isivinini (L/s) | N2 | He | N2 | He | N2 | H | N2 | He | N2 | He |
| 650 | 550 | 1350 | 1200 | 2050 | 1800 | 3600 | 3000 | 4800 | 3500 | |
| I-Compressionratio | >1x1011 | >1x104 | >1x1011 | >1x104 | >1x1010 | >1x104 | >1x108 | > 6x102 | >1x108 | >8x103 |
| Ubuningi okuqhubekayo indawo yokungenaingcindezi (Pa) | 2 | 1 | 2 | 1 | 2 | 1 | 0.05 | 0.02 | 0.03 | 0.01 |
| Ubuningiokuqhubekayo I-Foreline | 300 | 200 | 300 | 200 | 200 | 100 | 50 | 35 | 40 | 30 |
| I-Maxforelinepressuretolerance(Pa) | 1000 | 500 | 1000 | 500 | 500 | 200 | 340 | 160 | 160 | 80 |
| ☑Okomzimba ipharamitha | ||||||||||
| Inlet i-flange | I-DN160 ISO-K (LF) noma iCF | I-DN200 ISO-K (LF) noma iCF | I-DN250 ISO-K (LF) noma iCF | I-DN400 ISO-K (LF) noma iCF | I-DN400 ISO-K (LF) noma iCF | |||||
| I-Foreline i-flange | DN25 ISO-KF,I-KF40 (Ngokuzithandela) | I-DN40 ISO-KF,KF50(Ngokuzithandela) | I-DN100 ISO-K (LF) | I-DN100 ISO-K (LF)orKF50 (Ngokuzithandela) | ||||||
| Hlanza i-flange | I-DN16 ISO-KF | / | I-DN16 ISO-KF | |||||||
| Kunconyiwe | 4~10 L/s | 8~16 L/s | 16~24 L/s | 30~70 L/s | ||||||
| Isisindo(kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ≈ 100 ISO-K(LF) | ≈ 83 ISO-K(LF) | |
| 23 (CF) | 34 (CF) | 45 (CF) | ≈ 105 (CF) | ≈ 88 (CF) | ||
| Ukudlidliza | ≤ 0.05 | ≤ 0.3 | ||||
| Umsindo (dB) | ≤ 50 | ≤ 60 | ||||
| Ukuzala | Gcoba amabhola e-ceramic agcotshisiwe | I-Ceramic ball bearing | ||||
| Isebenza isikhundla | Noma yikuphi | Iqonde ±5° | ||||
| I-Oper.Ambient I-Magneticfield | ≤ 3mT (I-10mT enkulu kunazo zonke, Idinga ukwenza ngokwezifiso) | ≤ 3mT | ||||
| I-Oper.endaweni izinga lokushisa | Umoya ukupholisa | 5~35oC | / | / | ||
| Ukupholisa amanzi | 5 ~ 40oC | |||||
| Ukupholisa amanzi izidingo | Izinga lokushisa lamanzi: 15-25 ℃; pre sure:0.15Mpa; flow:≥1.5L/min | ukugeleza:≥ 3L/min | ||||
| ☑Isilawuli imingcele | ||||||
| Ihlukanisiwe isilawuli | I-EVFB-III-B (2U) | I-EVFB-VI (4U) | ||||
| Isilawuli kude ukulawula | Ukulawula ibanga elide (sicela uxhumane nonjiniyela bethu) | |||||
| Ukuxhumana imodi | RS-485 | |||||
| Amandla kagesi(V） | Ukusuka ku-100 kuye ku-240VAC (± | 220VAC (±10%) | ||||
| Imvamisa(Hz） | 50/60Hz±5% | |||||
| Amandla amakhulu(W） | 1000 | 1500 | ||||
| Qala/misa ukulawula imodi | Izinkinobho zokulawula zilawula ukuqala nokumisa / isilawuli se-RS485 siqala futhi simise / DB15 Ukulawula ukuqala nokumisa | |||||
| Ukuvikela | I-controller overcurrent, overvoltage, undervoltage, ukuvikelwa kokushisisa ngokweqile, i-molecular pump overcurrent,ukulayisha ngokweqile, ukuvikela ukushisa ngokweqile, njll | |||||
| Ukujikeleza isivinini (r/min) | 36000±0.1% | 30000±0.1% | 24000±0.1% | 13500±0.1% | 16200±0.1% | |
| Phansi isivinini (r/min) | 25200±0.1% | 21000±0.1% | 16800±0.1% | / | ||
| Okwamanje(A） | ≤ 0.6 | ≤1 | ≤1 | ≤ 5 | ||
| Ukuvikelwa fuse(A） | 6.5 | 6.5 | 6.5 | 12 | ||
| Qalisa isikhathi(imiz） | ~5 | ~6 | ~7 | ~20 | ||
| Isikhathi sokuphumula(imiz） | ~5 | ~10 | ~12 | ~30 | ||
| I-Oper. endaweni isimo | Awekho amagesi agqwalayo kanye nezinhlayiya zothuli ezisobala; izinga lokushisa lemvelo: -10 ℃ ~ 50 ℃; imveloumswakama: ≤ 90%, ukuqina kokudlidliza: ≤ 0.5g | |||||
0 jikelele Dimension
| Imodeli | D N | d1 | d2 | h | h1 | h3 | L |
| I-EVFB-160/700 I-EVFB-160/701 | 160 LF | 180 | 218.5 | 241.8 | 336.8 | 201.8 | 124.8 |
| 160CF | 202 | 218.5 | 268.8 | 359.8 | 224.8 | 124.8 | |
| I-EVFB-200/1400 I-EVFB-200/1401 | 200 LF | 240 | 267 | 257.5 | 352.5 | 231.5 | 155.1 |
| 200CF | 253 | 267 | 274.5 | 369.5 | 248.5 | 155.1 | |
| I-EVFB-250/2200 I-EVFB-250/2201 | 250 LF | 290 | 296 | 229.8 | 324.8 | 203.8 | 165.3 |
| 250CF | 305 | 296 | 259.8 | 354.8 | 233.8 | 165.3 |
I-EVFB-400/3600 Ubukhulu bephampu ye-Turbomolecular
I-EVFB-400/4500 Ubukhulu bephampu ye-Turbomolecular
Ukubukeka kwesilawuli esihlukanisiwe
I-EVFB-III-B (2U) isilawuli esihlukanisiwe
I-EVFB-VI (4U) isilawuli esihlukanisiwe
Oda Ulwazi
| inombolo | Umkhiqizo imodeli | umkhiqizo ikhodi | Izesekeli | Oda inombolo | Chaza |
|
1 |
I-EVFB-160/701(LF) |
I-A3139-F | Iphampu ye-molecular evamile | I-A3139-F | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3139-FA | Iphampu evamile + Izesekeli ze-valve yokuhlanza | |||
| Izingxenye zabalandeli | I-A3139-FB | Iphampu evamile + Izingxenye zabalandeli | |||
| Hlanza izinsiza ze-valve, Izingxenye zefeni | I-A3139-FC | Iphampu evamile + Izinsiza ze-valve yokuhlanzwa + Izingxenye zabalandeli | |||
|
2 |
I-EVFB-160/701(CF) |
I-A3140-F | iphampu ejwayelekile yamangqamuzana | I-A3140-F | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3140-FA | Iphampu evamile + Izesekeli ze-valve yokuhlanza | |||
| Izingxenye zabalandeli | I-A3140-FB | Iphampu evamile + Izingxenye zabalandeli | |||
| Hlanza izinsiza ze-valve, Izingxenye zefeni | I-A3140-FC | Iphampu evamile + Izinsiza ze-valve yokuhlanzwa + Izingxenye zabalandeli | |||
|
3 |
I-EVFB-200/1401(LF) |
I-A3135-F | iphampu ejwayelekile yamangqamuzana | I-A3135-F | Iphampu ejwayelekile (Ukupholisa amanzi ku okujwayelekile ngokuzenzakalela) |
| Hlanza izesekeli ze-valve | I-A3135-FA | Iphampu evamile + Izesekeli ze-valve yokuhlanza | |||
| Izingxenye zabalandeli | I-A3135-FB | Iphampu evamile + Izingxenye zabalandeli | |||
| Hlanza izinsiza ze-valve, Izingxenye zefeni | I-A3135-FC | Iphampu evamile + Izinsiza ze-valve yokuhlanzwa + Izingxenye zabalandeli | |||
|
4 |
I-EVFB-200/1401(CF) |
I-A3136-F | iphampu ejwayelekile yamangqamuzana | I-A3136-F | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3136-FA | Iphampu evamile + Izesekeli ze-valve yokuhlanza | |||
| Izingxenye zabalandeli | I-A3136-FB | Iphampu evamile + Izingxenye zabalandeli | |||
| Hlanza izinsiza ze-valve, Izingxenye zefeni | I-A3136-FC | Iphampu evamile + Izinsiza ze-valve yokuhlanzwa + Izingxenye zabalandeli | |||
|
5 |
I-EVFB-250/2201(LF) |
I-A3141-F | iphampu ejwayelekile yamangqamuzana | I-A3141-F | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3141-FA | Iphampu evamile + Izesekeli ze-valve yokuhlanza | |||
| Izingxenye zabalandeli | I-A3141-FB | Iphampu evamile + Izingxenye zabalandeli | |||
| Hlanza izinsiza ze-valve, Izingxenye zefeni | I-A3141-FC | Iphampu evamile + Izinsiza ze-valve yokuhlanzwa + Izingxenye zabalandeli | |||
|
6 |
I-EVFB-250/2201(CF) |
I-A3142-F | iphampu ejwayelekile yamangqamuzana | I-A3142-F | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3142-FA | Iphampu evamile + Izesekeli ze-valve yokuhlanza | |||
| Izingxenye zabalandeli | I-A3142-FB | Iphampu evamile + Izingxenye zabalandeli | |||
| Hlanza izesekeli ze-valve | I-A3142-FC | Iphampu evamile + I-valve yokuhlanza |
| Izingxenye zabalandeli | izesekeli + Izingxenye zabalandeli | ||||
| 7 | I-EVFB-400/3600(LF) | A3187 | iphampu ejwayelekile yamangqamuzana | A3187 | Iphampu ejwayelekile (Ukupholisa amanzi ijwayelekile ngokuzenzakalelayo) |
| 8 | I-EVFB-400/3600(CF) | A3188 | iphampu ejwayelekile yamangqamuzana | A3188 | Iphampu ejwayelekile (Ukupholisa amanzi ijwayelekile ngokuzenzakalelayo) |
|
9 |
I-EVFB-400/4500(LF) |
A3185 | iphampu ejwayelekile yamangqamuzana | A3185 | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3185-A | Iphampu evamile + Izesekeli ze-valve yokuhlanza | |||
|
10 |
I-EVFB-400/4500(CF) |
A3186 | iphampu ejwayelekile yamangqamuzana | A3186 | Iphampu ejwayelekile (Ukupholisa amanzi kujwayelekile ngokuzenzakalelayo) |
| Hlanza izesekeli ze-valve | I-A3186-A | Iphampu evamile + Izesekeli ze-valve yokuhlanza | |||
|
11 |
I-EVFB-III-HMI |
I-A3261-1 |
Iphaneli esetshenziswa ngesandla |
I-A3261-1 | Ikhasimende lizikhethela, Ifanele amaphampu wamangqamuzana afana ne-EVFB-160/701 、 EVFB-200/1401 、EVFB-250/2201 |
| 12 | I-EVFB-VI | A3270 | Isilawuli esihlukanisiwe (4U) | A3270 | Ifanele amaphampu wamangqamuzana e-Turbo afana ne-EVFB-400/3600, EVFB-400/450 |
| 13 | I-EVFB-III-B | A3264 | Isilawuli esihlukanisiwe (2U) | A3264 | Ifanele amaphampu wamangqamuzana afana ne-EVFB-160/701, EVFB-200/1401, EVFB-250/2201 (uhlobo oluhlukene) |
