Large pumping speed durable Low noise DRV rotary vane air pump vacuum pump
The DRV series vacuum pump is a double stage rotary vane oil-sealed vacuum pumpsuitable for low and medium vacuum applications, mainly used to remove air and other dry gases. It is one of the main equipment for low and medium vacuum, it can be used alone or as a fore
pump of other vacuum pumps.
The vacuum pump has the characteris-tics of reliable running performance, less wearing parts, low vibration, low noise and high efficiency.
The SV series vacuum pump is imported from foreign advanced technology, and the key com- ponents are imported components or imported
materials. The DRV series vacuum pump can completely replace similar foreign products.
Brochure for the EVFB Series Molecular Pump Product
Model：
EVFB-100/301 Compound integrated molecular pump
EVFB-160/401 Compound integrated molecular pump
EVFB-160/450D Anti-vibration molecular pump
EVFB-160/701Compound integrated molecular pump
EVFB-200/1401 Compound integrated molecular pump
EVFB-250/2201 Compound integrated molecular pump
EVFB-160/701Compound molecular pump
EVFB-200/1401 Compound molecular pump
EVFB-250/2201 Compound molecular pump
EVFB-400/3600 Turbo molecular pump
EVFB-400/4500 Turbo molecular pump
Product Overview
Molecular pump is a kind of high speed rotating momentum transfer vacuum pump, its working pressure range is generally 10-1Pa ~ 10-7Pa, is one of the important vacuum acquisition equipment to achieve high vacuum and ultra-high vacuum. Molecular pump has the advantages of fast start-up speed, wide working range, low power consumption, high cleanliness and simple maintenance.
Molecular pump products described in this sample book are the second generation of products
newly launched by the company, which are mainly designed and optimized for industrial vacuum and scientific research fields, including the first series of industrial vacuum molecular pump products with integrated controllers and flexible application scenarios. According to the caliber, there are mainly DN100, DN160, DN200, DN250 and DN400 and other products.
Grease lubricated integral molecular pump
Main features of this series of products:
（1） Integrated controller: Integrated controller design，Facilitate system integration，A key start- stop；
（2） Precision bearing：Grease lubrication precision ceramic ball bearing，Installed at any Angle；
（3） High reliability：Overall rotors，BLDC driving technology；
（4） Functional diversity：Full range of accessories，Customized solutions are available；
（5） Provide adjustable speed function，To meet the requirements of a variety of pumping speed；
This series of products are mainly suitable for PVD, CVD, liquid crystal plate and other industrial coating; Mass spectrometry, high-energy physics, vacuum leak detection, medicine and biological engineering and other scientific research fields.
Molecular pump technical Specifications
|
Model |
EVFB-100/301 | EVFB-160/401 | EVFB-160/450D（custom-made） | ||||
| ☑ The vacuum parameters | |||||||
| Pumping speed (L/s) |
N2 |
He |
N2 |
He |
N2 |
He |
|
| 300 |
230 |
460 | 380 |
38 |
310 |
||
| Ultimate pressure | < 5×10-6 Pa (LF) ; < 5×10 -7 Pa (CF) | < 8×10 -6 Pa (LF)
< 8×10 -7 Pa (CF) |
|||||
| Compression ratio | > | > | > | > | > 1×108 |
> 1×10 3 |
|
| Maximumcontinuousinletpress ure | 10 Pa |
2Pa |
10 Pa | 2 Pa |
20 |
5 Pa |
|
| MaximumcontinuousForelinepressure | 300 | 200 | 300 | 200 Pa |
20 |
10 Pa |
|
| Maxforelinepressuretolerance | 1000 | 500 | 1000 | 500 Pa |
50 |
20 Pa |
|
| ☑ Physical parameter | |||||||
| Inlet flange |
DN100 ISO-K (LF) or CF |
DN160 ISO-K (LF) or CF | |||||
| Foreline flange | DN25 ISO-KF or DN40KF（Optional） | ||||||
| Purge flange |
DN16 ISO-KF |
||||||
|
Weight |
9.6 kg（ISO-K |
10kg（ISO-K） |
|||||
| 10kg（CF） |
11 kg（CF） |
||||||
| Vibration |
≤0.05 μm |
||||||
| Noise |
≤55 dB（The standard air cooling） |
||||||
| Bearing |
Grease lubricated ceramic ball bearing |
||||||
| Operating position |
Any |
||||||
| Oper.ambient Magnetic field |
≤3 mT（Thelargest 10mT，Need to customize） |
||||||
| Oper.ambie nt | Aircooling |
5 ~ 35 ℃ |
|||||
| Watercooling |
5 ~ 40 ℃ |
||||||
| Coolingwaterrequirements | Watertemperature：15-30℃；pressure：0.15Mpa；PH6~8，clearly，Oilfree；flow：≥1L/min | ||||||
| Recommended forepump | 2~6 L/s |
3~8L/s |
|||||
| ☑ Controller parameters | |||||||
| Controller |
EVFB-II |
||||||
| Rotational speed |
48000rp |
36000rpm |
|||||
| Low speed |
33600rp |
25200rpm |
|||||
| Start-up time |
≤5min |
||||||
| Voltage |
48VAC±2% |
||||||
| Communication mode |
RS-485 |
||||||
|
Model |
EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | ||||
| ☑ The vacuum parameters | |||||||
| Ultimate pressure(Pa) |
<5x10-6（LF）；<5x10-7（CF） |
||||||
| Pumping speed (L/s) |
N2 |
He |
N |
He |
N2 |
He |
|
|
6 |
5 |
1350 | 1200 | 2050 | 1800 | ||
| Compression ratio | >1x1011 | >1x104 | >1x1011 | >1x104 | >1x1010 | >1x104 | |
| Maximumcontinuousinletpress ure(Pa) |
2 |
1 |
2 |
1 |
2 |
1 |
|
| MaximumcontinuousForelinepressure(Pa) |
30 |
2 |
3 |
2 |
2 |
1 |
|
| Maxforelinepress uretolerance(Pa) |
10 |
5 |
1000 |
5 |
5 |
2 |
|
| ☑Physical parameter | |||||||
| Inlet flange | DN160 ISO-K（LF）or CF | DN200 ISO-K
（LF）或 CF |
DN250 ISO-K （LF）or |
||||
| Foreline flange | DN25 ISO-KF or KF40(Optional) | DN40 ISO-KF or KF50(Optional) | |||||
| Purge flange |
DN16 ISO-KF |
||||||
| Recommended forepump(L/s) |
4~ |
8~ |
16~2 |
||||
| Weight（kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ||||
|
23 (CF) |
34 |
45 (CF) |
|||||
| Vibration |
≤ |
||||||
| Noise(dB) |
≤ |
||||||
| Bearing |
Grease lubricated ceramic ball bearing |
||||||
| Operating position |
Any |
||||||
| Magnetic field intensity(mT) | ≤3（The largest 10mT，Need to customize） | ||||||
| Oper.ambient
temperature |
Air cooling |
5~35℃ |
|||||
| Water cooling |
5~40℃ |
||||||
| Cooling water requirements |
Water temperature：15-25 ℃；pressure：0.15Mpa；PH6~8，clearly，Oil free ；flow：≥1.5L/min |
||||||
| ☑Controller parameters | |||||||
| Controller |
EVFB-III-A |
||||||
| Communication mode |
RS-485 |
||||||
| Voltage（V） |
220V AC±10% |
||||||
| Frequency（Hz） |
50/60±5% |
||||||
| Maximum input Power（W） |
100 |
||||||
| Start/stop control mode | Controller buttons control start and stop /RS485 controller start and stop /DB15 Control start and stop | ||||||
| Protections | Controller overcurrent, overvoltage, undervoltage, overheating protection, molecular pump overcurrent, overload, overheating protection, etc | ||||||
| Rotational speed (r/min) | 36000±0.1% | 30000±0.1% | 24000±0.1% | ||||
| Low speed (r/min) | 25200±0.1% | 21000±0.1% | 16800±0.1% | ||||
| Current（A） |
≤0.6 |
≤1 |
≤1 |
||||
| Protection fuse（A） |
6.5 |
6.5 |
6.5 |
||||
| Start-uptime（min） |
~5 |
~6 |
~7 |
||||
| Downtime（min） |
~5 |
~10 |
~12 |
||||
Overall Dimension
| Model |
DN |
d1 |
h |
h1 |
h2 |
d2 |
n |
|
EVFB-100/301 |
100 LF |
130 |
253.5 |
180 |
170 |
— |
— |
|
100 CF |
152 |
274.5 |
201 |
191 |
130.3 |
16 |
|
|
EVFB-160/401 |
160 LF |
180 |
239.5 |
169.5 |
159.5 |
— |
— |
|
160 CF |
202 |
238.5 |
168.5 |
158.5 |
181 |
20 |
|
|
EVFB-160/450D |
160 LF |
180 |
243 |
169.5 |
159.5 |
— |
— |
|
160 CF |
202 |
242 |
168.5 |
158.5 |
181 |
20 |
| Model |
DN |
d1 |
d2 |
h |
h1 |
h3 |
L |
| EVFB-160/700 |
160 LF |
180 |
218.5 |
241.8 |
336.8 |
201.8 |
124.8 |
| EVFB-160/701 |
160CF |
202 |
218.5 |
268.8 |
359.8 |
224.8 |
124.8 |
| EVFB-200/1400 |
200 LF |
240 |
267 |
257.5 |
352.5 |
231.5 |
155.1 |
| EVFB-200/1401 |
200CF |
253 |
267 |
274.5 |
369.5 |
248.5 |
155.1 |
| EVFB-250/2200 |
250 LF |
290 |
296 |
229.8 |
324.8 |
203.8 |
165.3 |
| EVFB-250/2201 |
250CF |
305 |
296 |
259.8 |
354.8 |
233.8 |
165.3 |
Ordering Information
| Number | Product model | Product code | Accessories | Ordernumber |
Explain |
|
1 |
EVFB-100/301(LF) |
A3123 |
standard molecular pump |
A3123 |
The standard pump（Air cooling is standard by default） |
| Purge valve accessories（small flow） |
A3123-A |
The standard pump + Purge valve accessories（small flow） | |||
| Water-cooling components |
A3123-B |
The standard pump + Water-cooling components（Replace air cooled components） | |||
| Purge valve accessories
（small flow）、Water- cooling components |
A3123-C |
The standard pump + Purge valve accessories（small flow）+ Water- cooling components（Replace air cooled components） | |||
|
2 |
EVFB-100/301(CF) |
A3124 |
standard molecular pump |
A3124 |
The standard pump（Air cooling is standard by default） |
| Purge valve accessories（small flow） |
A3124-A |
The standard pump + Purge valve accessories（small flow） | |||
| Water-cooling components |
A3124-B |
The standard pump + Water-cooling components（Replace air cooled components） | |||
| Purge valve accessories
（small flow）、Water- cooling components |
A3124-C |
The standard pump + Purge valve accessories（small flow）+ Water- cooling components（Replace air cooled components） | |||
|
3 |
EVFB-160/401(LF) |
A3127 |
standard molecular pump |
A3127 |
The standard pump（Air cooling is standard by default） |
| Purge valve accessories（small flow） |
A3127-A |
The standard pump + Purge valve accessories（small flow） | |||
| Water-cooling components |
A3127-B |
The standard pump + Water-cooling components（Replace air cooled components） | |||
| Purge valve accessories
（small flow）、Water- cooling components |
A3127-C |
The standard pump + Purge valve accessories（small flow）+ Water- cooling components（Replace air cooled components） | |||
|
4 |
EVFB-160/401(CF) |
A3128 |
standard molecular pump |
A3128 |
The standard pump（Air cooling is standard by default） |
| Purge valve accessories（small flow） |
A3128-A |
The standard pump + Purge valve accessories（small flow） | |||
| Water-cooling components |
A3128-B |
The standard pump + Water-cooling components（Replace air cooled components） | |||
| Purge valve accessories |
A3128-C |
The standard pump + Purge valve |
| （small flow）、Water- cooling components | accessories（small flow）+ Water- cooling components(Replaceair cooled components） | ||||
|
5 |
EVFB-160/450D(LF) |
A3129 |
standard molecular pump |
A3129 |
The standard pump（Air cooling is standard by default） |
| Purge valve accessories（small flow） |
A3129-A |
The standard pump + Purge valve accessories（small flow） | |||
| Water-cooling components |
A3129-B |
The standard pump + Water-cooling components（Replace air cooled components） | |||
| Purge valve accessories
（small flow）、Water- cooling components |
A3129-C |
The standard pump + Purge valve accessories（small flow）+ Water- cooling components（Replace air cooled components） | |||
|
6 |
EVFB-160/450D(CF) |
A3130 |
standard molecular pump |
A3130 |
The standard pump（Air cooling is standard by default） |
| Purge valve accessories（small flow） |
A3130-A |
The standard pump + Purge valve accessories（small flow） | |||
| Water-cooling components |
A3130-B |
The standard pump + Water-cooling components（Replace air cooled components） | |||
| Purge valve accessories
（small flow）、Water- cooling components |
A3130-C |
The standard pump + Purge valve accessories（small flow）+ Water- cooling components（Replace air cooled components） | |||
|
7 |
EVFB-160/701(LF) |
A3139 |
standard molecular pump |
A3139 |
The standard pump（Water coolingis standard by default） |
| Purge valve accessories |
A3139-A |
The standard pump + Purge valveaccessories | |||
| Fan components |
A3139-B |
The standard pump + Fan | |||
| Purge valve accessories、Fan components |
A3139-C |
The standard pump + Purge valveaccessories + Fan components | |||
|
8 |
EVFB-160/701(CF) |
A3140 |
standard molecular pump |
A3140 |
The standard pump（Water coolingis standard by default） |
| Purge valve accessories |
A3140-A |
The standard pump + Purge valveaccessories | |||
| Fan components |
A3140-B |
The standard pump + Fan components | |||
| Purge valve accessories、Fan components |
A3140-C |
The standard pump + Purge valveaccessories + Fan components | |||
|
9 |
EVFB-200/1401(LF) |
A3135 |
standard molecular pump |
A3135 |
The standard pump（Water cooling is standard by default） |
| Purge valve accessories |
A3135-A |
The standard pump + Purge valveaccessories | |||
| Fan components |
A3135-B |
The standard pump + Fan components | |||
| Purge valve accessories、 |
A3135-C |
The standard pump + Purge valve |
| Fan components | accessories + Fan components | ||||
|
10 |
EVFB-200/1401(CF) |
A3136 |
standard molecular pump |
A3136 |
The standard pump（Water cooling is standard by default） |
| Purge valve accessories |
A3136-A |
The standard pump + Purge valveaccessories | |||
| Fan components |
A3136-B |
The standard pump + Fan components | |||
| Purge valve accessories、 |
A3136-C |
The standard pump + Purge valveaccessories + Fan components | |||
|
11 |
EVFB-250/2201(LF) |
A3141 |
standard molecular pump |
A3141 |
The standard pump（Water cooling is standard by default） |
| Purge valve accessories |
A3141-A |
The standard pump + Purge valveaccessories | |||
| Fan components |
A3141-B |
The standard pump + Fan | |||
| Purge valve accessories、Fan components |
A3141-C |
The standard pump + Purge valveaccessories + Fan components | |||
|
12 |
EVFB-250/2201(CF) |
A3142 |
standard molecular pump |
A3142 |
The standard pump（Water cooling is standard by default） |
| Purge valve accessories |
A3142-A |
The standard pump + Purge valveaccessories | |||
| Fan components |
A3142-B |
The standard pump + Fan | |||
| Purge valve accessories、 |
A3142-C |
The standard pump + Purge valveaccessories + Fan components | |||
|
13 |
EVFB-II |
A3261 |
- |
A3261 |
Molecular pump controller（ Suitable for molecular pumps such as EVFB- 100/301、EVFB- 160/401、EVFB-100/450D） |
|
14 |
EVFB-III-A |
A3263 |
- |
A3263 |
Molecular pump controller（ Suitable for molecular pumps such as EVFB- 160/701、EVFB- 200/1401、EVFB-250/2201） |
Separated Compound molecular pumps
Main features of this series of products：
（1） Separated controller：AC220V power supply，A key start-stop；
（2） High reliability：Overall rotors，BLDC driving technology；
（3） Precision bearing：Precision ceramic ball bearing，Installed at any Angle（Only grease lubricated models）；
（4） Functional diversity：Full range of accessories，Customized solutions are available；
（5） Provide adjustable speed function，To meet the requirements of a variety of pumping speed； This series of products are mainly applicable to PVD, CVD, liquid crystal plate and other
industrial coating, scientific research and other fields.
Molecular pump technical parameters
|
Model |
EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | EVFB-400/3600 | EVFB-400/4500 | |||||
| ☑ The vacuum parameters | ||||||||||
| Ultimatepressure(Pa) |
<5x10-6（LF）；<5x10-7（CF） |
|||||||||
| Pumping speed (L/s) |
N2 |
He |
N2 |
He |
N2 |
H |
N2 |
He |
N2 |
He |
|
650 |
550 |
1350 |
1200 |
2050 |
1800 |
3600 |
3000 |
4800 |
3500 |
|
| Compressionratio |
>1x1011 |
>1x104 |
>1x1011 |
>1x104 |
>1x1010 |
>1x104 |
>1x108 | >6x102 |
>1x108 |
>8x103 |
| Maximum continuous inletpressure(Pa) |
2 |
1 |
2 |
1 |
2 |
1 |
0.05 |
0.02 |
0.03 |
0.01 |
| Maximum continuous Foreline |
300 |
200 | 300 | 200 |
200 |
100 |
50 |
35 |
40 |
30 |
| Maxforelinepressuretolerance(Pa) |
1000 |
500 |
1000 |
500 |
500 |
200 |
340 |
160 | 160 | 80 |
| ☑ Physical parameter | ||||||||||
| Inlet flange | DN160 ISO-K（LF）orCF | DN200 ISO-K（LF）orCF | DN250 ISO-K（LF）orCF | DN400 ISO-K（LF）orCF | DN400 ISO-K（LF）orCF | |||||
| Foreline flange | DN25 ISO-KF，KF40（Optional） | DN40 ISO-KF，KF50（Optional） | DN100 ISO-K（LF） | DN100 ISO-K（LF）orKF50（Optional） | ||||||
| Purge flange | DN16 ISO-KF |
/ |
DN16 ISO-KF | |||||||
| Recommended | 4~10 L/s | 8~16 L/s | 16~24 L/s |
30~70 L/s |
||||||
| Weight（kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ≈ 100 ISO-K(LF) |
≈ 83 ISO-K(LF) |
|
| 23 (CF) | 34 (CF) | 45 (CF) | ≈ 105 (CF) |
≈ 88 (CF) |
||
| Vibration |
≤ 0.05 |
≤ 0.3 |
||||
| Noise (dB) |
≤ 50 |
≤ 60 |
||||
| Bearing | Grease lubricated ceramic ball bearing | Ceramic ball bearing | ||||
| Operating position |
Any |
Vertical±5° |
||||
| Oper.Ambient Magneticfield | ≤ 3mT（The largest 10mT，Need to customize） |
≤ 3mT |
||||
| Oper. ambient temperature |
Air cooling |
5~35oC |
/ |
/ |
||
|
Watercooling |
5~40oC |
|||||
| Cooling water requirements | Water temperature：15-25 ℃；pre sure：0.15Mpa；flow：≥1.5L/min | flow：≥ 3L/min | ||||
| ☑ Controller parameters | ||||||
| Separated controller |
EVFB-III-B（2U） |
EVFB-VI（4U） | ||||
| Remote control |
Ultra-distance control （please consult our engineers） |
|||||
| Communication mode |
RS-485 |
|||||
| Voltage（V） | From 100 to 240VAC（± | 220VAC（±10%） | ||||
| Frequency（Hz） |
50/60Hz±5% |
|||||
| Maximuminputpower（W） |
1000 |
1500 |
||||
| Start/stop control mode | Controller buttons control start and stop /RS485 controller start and stop /DB15 Control start and stop | |||||
| Protections | Controller overcurrent, overvoltage, undervoltage, overheating protection, molecular pump overcurrent,overload, overheating protection, etc | |||||
| Rotational speed (r/min) | 36000±0.1% | 30000±0.1% | 24000±0.1% | 13500±0.1% |
16200±0.1% |
|
| Low speed (r/min) | 25200±0.1% | 21000±0.1% | 16800±0.1% |
/ |
||
| Current（A） | ≤ 0.6 |
≤ 1 |
≤ 1 |
≤ 5 |
||
| Protection fuse（A） |
6.5 |
6.5 |
6.5 |
12 |
||
| Start-up time（min） |
~5 |
~6 |
~7 |
~20 |
||
| Downtime（min） |
~5 |
~10 |
~12 |
~30 |
||
| Oper. ambient condition | No corrosive gases and obvious dust particles；environment temperature：-10℃~50℃；environmenthumidity：≤ 90%，vibration intensity：≤ 0.5g | |||||
0verall Dimension
|
Model |
D N |
d1 |
d2 |
h |
h1 |
h3 |
L |
| EVFB-160/700 EVFB-160/701 |
160 LF |
180 |
218.5 |
241.8 |
336.8 |
201.8 |
124.8 |
|
160CF |
202 |
218.5 |
268.8 |
359.8 |
224.8 |
124.8 |
|
| EVFB-200/1400 EVFB-200/1401 |
200 LF |
240 |
267 |
257.5 |
352.5 |
231.5 |
155.1 |
|
200CF |
253 |
267 |
274.5 |
369.5 |
248.5 |
155.1 |
|
| EVFB-250/2200 EVFB-250/2201 |
250 LF |
290 |
296 |
229.8 |
324.8 |
203.8 |
165.3 |
|
250CF |
305 |
296 |
259.8 |
354.8 |
233.8 |
165.3 |
EVFB-400/3600 Turbomolecular pump dimensions
EVFB-400/4500 Turbomolecular pump dimensions
Appearance of separated controller
EVFB-III-B（2U）separated controller
EVFB-VI（4U）separated controller
Order Information
|
number |
Product model |
product code |
Accessories |
Order number |
Explain |
|
1 |
EVFB-160/701(LF) |
A3139-F |
Standard molecular pump |
A3139-F |
The standard pump（Water cooling is standard by default） |
| Purge valve accessories | A3139-FA | The standard pump + Purge valve accessories | |||
| Fan components | A3139-FB | The standard pump + Fan components | |||
| Purge valve accessories、Fan components |
A3139-FC |
The standard pump + Purge valve accessories + Fan components | |||
|
2 |
EVFB-160/701(CF) |
A3140-F |
standard molecular pump |
A3140-F |
The standard pump（Water cooling is standard by default） |
|
Purge valve accessories |
A3140-FA |
The standard pump + Purge valve accessories | |||
| Fan components | A3140-FB | The standard pump + Fan components | |||
| Purge valve accessories、Fan components |
A3140-FC |
The standard pump + Purge valve accessories + Fan components | |||
|
3 |
EVFB-200/1401(LF) |
A3135-F |
standard molecular pump |
A3135-F |
The standard pump（Water cooling is
standard by default） |
|
Purge valve accessories |
A3135-FA |
The standard pump + Purge valve accessories | |||
| Fan components | A3135-FB | The standard pump + Fan components | |||
| Purge valve accessories、Fan components |
A3135-FC |
The standard pump + Purge valve accessories + Fan components | |||
|
4 |
EVFB-200/1401(CF) |
A3136-F |
standard molecular pump |
A3136-F |
The standard pump（Water cooling is standard by default） |
|
Purge valve accessories |
A3136-FA |
The standard pump + Purge valve accessories | |||
| Fan components | A3136-FB | The standard pump + Fan components | |||
| Purge valve accessories、Fan components |
A3136-FC |
The standard pump + Purge valve accessories + Fan components | |||
|
5 |
EVFB-250/2201(LF) |
A3141-F |
standard molecular pump |
A3141-F |
The standard pump（Water cooling is standard by default） |
|
Purge valve accessories |
A3141-FA |
The standard pump + Purge valve accessories | |||
| Fan components | A3141-FB | The standard pump + Fan components | |||
| Purge valve accessories、Fan components |
A3141-FC |
The standard pump + Purge valve accessories + Fan components | |||
|
6 |
EVFB-250/2201(CF) |
A3142-F |
standard molecular pump |
A3142-F |
The standard pump（Water cooling is standard by default） |
|
Purge valve accessories |
A3142-FA |
The standard pump + Purge valve accessories | |||
| Fan components | A3142-FB | The standard pump + Fan components | |||
| Purge valve accessories | A3142-FC | The standard pump + Purge valve |
| Fan components | accessories + Fan components | ||||
|
7 |
EVFB-400/3600(LF) |
A3187 |
standard molecular pump |
A3187 |
The standard pump（Water cooling
is standard by default） |
|
8 |
EVFB-400/3600(CF) |
A3188 |
standard molecular pump |
A3188 |
The standard pump（Water cooling
is standard by default） |
|
9 |
EVFB-400/4500(LF) |
A3185 |
standard molecular pump |
A3185 |
The standard pump（Water cooling is standard by default） |
|
Purge valve accessories |
A3185-A |
The standard pump + Purge valve accessories | |||
|
10 |
EVFB-400/4500(CF) |
A3186 |
standard molecular pump |
A3186 |
The standard pump（Water cooling is standard by default） |
|
Purge valve accessories |
A3186-A |
The standard pump + Purge valve accessories | |||
|
11 |
EVFB-III-HMI |
A3261-1 |
Hand operated panel |
A3261-1 |
Customer optional ，Suitable for molecular pumps such as EVFB- 160/701 、 EVFB-200/1401 、EVFB-250/2201 |
|
12 |
EVFB-VI |
A3270 |
Separated controller
（4U） |
A3270 |
Suitable for Turbo molecular pumps such as EVFB-400/3600、EVFB-400/450 |
|
13 |
EVFB-III-B |
A3264 |
Separated controller （2U） |
A3264 |
Suitable for molecular pumps such as EVFB-160/701 、 EVFB- 200/1401 、 EVFB-250/2201
(separated type) |
