ʻO ka wikiwiki pahū nui ʻoi loa ka haʻahaʻa haʻahaʻa DRV rotary vane ea pauma ʻumeke
ʻO ka DRV series vacuum pump he ʻāpana pālua rotary vane oil-sealed vacuum pump kūpono no nā noi haʻahaʻa haʻahaʻa a waena, hoʻohana nui ʻia e wehe i ka ea a me nā kinoea maloʻo ʻē aʻe.ʻO ia kekahi o nā mea hana nui no ka haʻahaʻa haʻahaʻa a me ka haʻahaʻa haʻahaʻa, hiki ke hoʻohana wale ʻia a i ʻole ma mua
ʻo ka pauma o nā ʻumeke ʻē aʻe.
He mau hi'ohi'ona o ka pauma ha'aha'a o ka holo pono 'ana, ka emi 'ana o ka lole 'ana, ka ha'alulu ha'aha'a, ka ha'aha'a ka leo a me ke ki'eki'e.
Hoʻokomo ʻia ka pauma SV series mai nā ʻenehana holomua ʻē aʻe, a ʻo nā mea nui nā mea i lawe ʻia a lawe ʻia mai paha.
mea waiwai.Hiki i ka DRV series vacuum pump ke pani piha i nā huahana like ʻole.
Palapala no ka EVFB Series Molecular Pump Product
Model:
EVFB-100/301 Pumi molekala hui pū
EVFB-160/401 Pumi molekala hui pū
EVFB-160/450D ʻAi-vibration molecular pump
EVFB-160/701Compound hoʻohuihui molekala pauma
EVFB-200/1401 Pumi i hoʻohui ʻia i ka pauma molekala
EVFB-250/2201 Pahu hoʻohuihui molecular pump
EVFB-160/701Pamu kinikini hui
EVFB-200/1401 Pumi moleki hui
EVFB-250/2201 Pumi molekiko hui
EVFB-400/3600 Turbo molekala pauma
EVFB-400/4500 Turbo molecular pump
Nānā Huahana
ʻO ka pauma Molecular kahi ʻano o ke kiʻekiʻe kiʻekiʻe rotating momentum transfer vacuum pump, ʻo kāna pae hana hana maʻamau he 10-1Pa ~ 10-7ʻO Pa, ʻo ia kekahi o nā mea waiwai nui e loaʻa ai ka ʻūhā kiʻekiʻe a me ka ʻūhā kiʻekiʻe.Loaʻa i ka pauma Molecular nā pōmaikaʻi o ka wikiwiki hoʻomaka wikiwiki, ka laulā hana ākea, ka hoʻohana haʻahaʻa haʻahaʻa, ka maʻemaʻe kiʻekiʻe a me ka mālama maʻalahi.
ʻO nā huahana pauma molecular i wehewehe ʻia ma kēia puke laʻana, ʻo ia ka lua o ka hanauna o nā huahana
hoʻokuʻu hou ʻia e ka ʻoihana, ka mea i hoʻolālā nui ʻia a hoʻopaʻa ʻia no ka ʻenehana ʻenehana a me nā ʻimi noiʻi ʻepekema, me ka pūʻulu mua o nā huahana ʻenehana molecular molecular pump me nā mea hoʻoponopono hoʻohui a me nā hiʻohiʻona noi maʻalahi.Wahi a ka caliber, aia ka nui o DN100, DN160, DN200, DN250 a me DN400 a me nā huahana ʻē aʻe.
E hoʻomaʻamaʻa i ka paila molecular integral
ʻO nā hiʻohiʻona nui o kēia pūʻulu huahana:
（1） Mea hoʻoponopono i hoʻohui ʻia: Hoʻolālā hoʻoponopono i hoʻohui ʻia，E hoʻomaʻamaʻa i ka hoʻohui ʻana i ka ʻōnaehana, kahi kī hoʻomaka-kū;
（2） Hāpai pololei: ʻO ka ʻaila lubrication kūpono i ka poʻe pōpō seramika, hoʻokomo ʻia ma kēlā me kēia kihi;
（3） hilinaʻi kiʻekiʻe: nā rotors holoʻokoʻa, ʻenehana hoʻokele BLDC;
（4） Nā ʻokoʻa hana: Loaʻa nā ʻano mea hoʻohana piha, Loaʻa nā hoʻoponopono maʻamau;
（5） Hāʻawi i ka hana wikiwiki hiki ke hoʻololi, e hoʻokō i nā koi o nā ʻano o ka wikiwiki pump;
ʻO kēia kaʻina o nā huahana he mea kūpono loa ia no PVD, CVD, ka pā aniani wai a me nā uhi ʻoihana ʻē aʻe;Mass spectrometry, kiʻekiʻe ikehu physics, vacuum leak detection, lāʻau lapaʻau a me ka ʻenekinia olaola a me nā ʻoihana noiʻi ʻepekema ʻē aʻe.
ʻO nā ʻōlelo kikoʻī ʻenehana molecular pump
| Hoʻohālike | EVFB-100/301 | EVFB-160/401 | EVFB-160/450D（hana maʻamau） | ||||
| ☑ʻO ka hoʻomāmā nā palena | |||||||
| Pākī ka māmā holo (L/s) | N2 | He | N2 | He | N2 | He | |
| 300 | 230 | 460 | 380 | 38 | 310 | ||
| hope loa kaomi | < 5×10-6 Pa (LF) ;< 5×10 -7 Pa (CF) | < 8×10 -6 Pa (LF) < 8×10 -7 Pa (CF) | |||||
| Hoʻopiʻi ratio | > | > | > | > | > 1×108 | > 1×10 3 | |
| Maximumcontinuousinletpress ure | 10 Pa | 2Pa | 10 Pa | 2 Pa | 20 | 5 Pa | |
| MaximumcontinuousForelinepressure | 300 | 200 | 300 | 200 Pa | 20 | 10 Pa | |
| Maxforelinepressuretolerance | 1000 | 500 | 1000 | 500 Pa | 50 | 20 Pa | |
| ☑Kikino hoʻohālikelike | |||||||
| Komo loko flange | DN100 ISO-K (LF) a i ʻole CF | DN160 ISO-K (LF) a i ʻole CF | |||||
| Foreline flange | DN25 ISO-KF a i ʻole DN40KF (koho) | ||||||
| Hoʻomaʻemaʻe flange | DN16 ISO-KF | ||||||
| Kaumaha | 9.6 kg（ISO-K | 10kg（ISO-K） | |||||
| 10kg（CF） | 11 kg（CF） | ||||||
| Haʻalulu | ≤0.05 μm | ||||||
| walaʻau | ≤55 dB (ʻO ka hoʻoluʻu ea maʻamau) | ||||||
| Hāpai | E hoʻomaʻamaʻa i ka poʻe poʻo poʻo | ||||||
| Ke hana nei kūlana | Kekahi | ||||||
| Oper.ambient Magnetic kahua | ≤3 mT (10mT nui loa, pono e hoʻopilikino) | ||||||
| Oper.ambie nt | Ea hoʻoluʻu | 5 ~ 35 ℃ | |||||
| Hoʻolili wai | 5 ~ 40 ℃ | ||||||
| Koi wai hooluolu | Ka mahana wai: 15-30 ℃; puʻe: 0.15Mpa; PH6 ~ 8, maopopo, ʻAla ʻole; kahe: ≥1L/min | ||||||
| Paipai ʻia forepump | 2~6 L/s | 3~8L/s | |||||
| ☑Mea hooponopono nā palena | |||||||
| Mea hooponopono | EVFB-II | ||||||
| Hoʻololi ka māmā holo | 48000rp | 36000rpm | |||||
| Haʻahaʻa ka māmā holo | 33600rp | 25200rpm | |||||
| Hoʻomaka manawa | ≤5min | ||||||
| Voltage | 48VAC±2% | ||||||
| Kūkākūkā ʻano hana | RS-485 | ||||||
| Hoʻohālike | EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | ||||
| ☑ʻO ka hoʻomāmā nā palena | |||||||
| hope loa kaomi (Pa) | <5x10-6（LF）；<5x10-7（CF） | ||||||
| Pākī ka māmā holo (L/s) | N2 | He | N | He | N2 | He | |
| 6 | 5 | 1350 | 1200 | 2050 | 1800 | ||
| Hoʻopiʻi ratio | >1x1011 | >1x104 | >1x1011 | >1x104 | >1x1010 | >1x104 | |
| Maximumcontinuousinletpress ure(Pa) | 2 | 1 | 2 | 1 | 2 | 1 | |
| KiʻekiʻecontinuousForelinepressure(Pa) | 30 | 2 | 3 | 2 | 2 | 1 | |
| Maxforelinepress uretolerance(Pa) | 10 | 5 | 1000 | 5 | 5 | 2 | |
| ☑Kikino hoʻohālikelike | |||||||
| Komo loko flange | DN160 ISO-K(LF) a i ʻole CF | DN200 ISO-K （LF）或 CF | DN250 ISO-K （LF） a i ʻole | ||||
| Foreline flange | DN25 ISO-KF a i ʻole KF40 (Koho) | DN40 ISO-KF a i ʻole KF50(Koho) | |||||
| Hoʻomaʻemaʻe flange | DN16 ISO-KF | ||||||
| Paipai ʻia pani mua (L/s) | 4~ | 8~ | 16~2 | ||||
| Kaumaha（kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ||||
| 23 (CF) | 34 | 45 (CF) | |||||
| Haʻalulu | ≤ | ||||||
| Ka halulu(dB) | ≤ | ||||||
| Hāpai | E hoʻomaʻamaʻa i ka poʻe poʻo poʻo | ||||||
| Ke hana nei kūlana | Kekahi | ||||||
| Magnetic kahua ikaika (mT) | ≤3（ʻO ka 10mT nui loa, pono e hoʻopilikino） | ||||||
| Oper.ambient mahana wela | Ea hooluolu | 5~35 ℃ | |||||
| Wai hooluolu | 5~40 ℃ | ||||||
| Hoʻoluʻu wai koi | Ka wela o ka wai:15-25 ℃; puʻe: 0.15Mpa; PH6 ~ 8, maopopo, ʻAʻole aila ； kahe: ≥1.5L/min | ||||||
| ☑Mea hooponopono nā palena | |||||||
| Mea hooponopono | EVFB-III-A | ||||||
| Kūkākūkā ʻano hana | RS-485 | ||||||
| Voltage（V） | 220V AC±10% | ||||||
| Ka pinepine（Hz） | 50/60±5% | ||||||
| Ka nui hookomo Ka mana（W） | 100 | ||||||
| Hoʻomaka/kū hoʻomalu ʻano hana | Hoʻomaka a hoʻopau nā pihi hoʻomalu / hoʻomaka a hoʻōki ka mana RS485 / hoʻomaka a hoʻōki ka mana | ||||||
| Nā pale | Manaʻo overcurrent, overvoltage, undervoltage, overheating protection, molecular pump overcurrent, overload, overheating protection, etc. | ||||||
| Hoʻololi ka māmā holo (r/min) | 36000±0.1% | 30000±0.1% | 24000±0.1% | ||||
| Haʻahaʻa ka māmā holo (r/min) | 25200±0.1% | 21000±0.1% | 16800±0.1% | ||||
| ʻO kēia manawa（A） | ≤0.6 | ≤1 | ≤1 | ||||
| Palekana fuse（A） | 6.5 | 6.5 | 6.5 | ||||
| Ka manawa hoʻomaka（min） | ~5 | ~6 | ~7 | ||||
| Hoʻohaʻahaʻa manawa（min） | ~5 | ~10 | ~12 | ||||
Ana Nui
| Hoʻohālike | DN | d1 | h | h1 | h2 | d2 | n |
| EVFB-100/301 | 100 LF | 130 | 253.5 | 180 | 170 | — | — |
| 100 CF | 152 | 274.5 | 201 | 191 | 130.3 | 16 | |
| EVFB-160/401 | 160 LF | 180 | 239.5 | 169.5 | 159.5 | — | — |
| 160 CF | 202 | 238.5 | 168.5 | 158.5 | 181 | 20 | |
| EVFB-160/450D | 160 LF | 180 | 243 | 169.5 | 159.5 | — | — |
| 160 CF | 202 | 242 | 168.5 | 158.5 | 181 | 20 |
| Hoʻohālike | DN | d1 | d2 | h | h1 | h3 | L |
| EVFB-160/700 | 160 LF | 180 | 218.5 | 241.8 | 336.8 | 201.8 | 124.8 |
| EVFB-160/701 | 160CF | 202 | 218.5 | 268.8 | 359.8 | 224.8 | 124.8 |
| EVFB-200/1400 | 200 LF | 240 | 267 | 257.5 | 352.5 | 231.5 | 155.1 |
| EVFB-200/1401 | 200CF | 253 | 267 | 274.5 | 369.5 | 248.5 | 155.1 |
| EVFB-250/2200 | 250 LF | 290 | 296 | 229.8 | 324.8 | 203.8 | 165.3 |
| EVFB-250/2201 | 250CF | 305 | 296 | 259.8 | 354.8 | 233.8 | 165.3 |
Kauoha ʻIkepili
| Helu | Huahana kumu hoʻohālike | Huahana code | Mea lako | Kauohahelu | E wehewehe |
|
1 |
EVFB-100/301(LF) |
A3123 | ʻO ka pauma molekula maʻamau | A3123 | ʻO ka paila maʻamau (ʻo ka maʻamau ka hoʻoluʻu ʻana o ka ea) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve(kahe liʻiliʻi) | A3123-A | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo pahu (ka kahe liʻiliʻi) | |||
| Nā ʻāpana hoʻoluʻu wai | A3123-B | ʻO ka pauma maʻamau + ʻāpana hoʻoluʻu wai(Hoʻololi i nā mea hoʻoluʻu ea) | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve （Kahe liʻiliʻi）、ʻO nā ʻāpana hoʻoluʻu wai | A3123-C | ʻO ka pauma maʻamau + Hoʻomaʻemaʻe i nā mea komo (ka kahe liʻiliʻi) + Nā ʻāpana hoʻoluʻu wai (Hoʻololi i nā ʻāpana hoʻoluʻu ea) | |||
|
2 |
EVFB-100/301(CF) |
A3124 | ʻO ka pauma molekula maʻamau | A3124 | ʻO ka paila maʻamau (ʻo ka maʻamau ka hoʻoluʻu ʻana o ka ea) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve(kahe liʻiliʻi) | A3124-A | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo pahu (ka kahe liʻiliʻi) | |||
| Nā ʻāpana hoʻoluʻu wai | A3124-B | ʻO ka pauma maʻamau + ʻāpana hoʻoluʻu wai(Hoʻololi i nā mea hoʻoluʻu ea) | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve （Kahe liʻiliʻi）、ʻO nā ʻāpana hoʻoluʻu wai | A3124-C | ʻO ka pauma maʻamau + Hoʻomaʻemaʻe i nā mea komo (ka kahe liʻiliʻi) + Nā ʻāpana hoʻoluʻu wai (Hoʻololi i nā ʻāpana hoʻoluʻu ea) | |||
|
3 |
EVFB-160/401(LF) |
A3127 | ʻO ka pauma molekula maʻamau | A3127 | ʻO ka paila maʻamau (ʻo ka maʻamau ka hoʻoluʻu ʻana o ka ea) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve(kahe liʻiliʻi) | A3127-A | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo pahu (ka kahe liʻiliʻi) | |||
| Nā ʻāpana hoʻoluʻu wai | A3127-B | ʻO ka pauma maʻamau + ʻāpana hoʻoluʻu wai(Hoʻololi i nā mea hoʻoluʻu ea) | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve （Kahe liʻiliʻi）、ʻO nā ʻāpana hoʻoluʻu wai | A3127-C | ʻO ka pauma maʻamau + Hoʻomaʻemaʻe i nā mea komo (ka kahe liʻiliʻi) + Nā ʻāpana hoʻoluʻu wai (Hoʻololi i nā ʻāpana hoʻoluʻu ea) | |||
|
4 |
EVFB-160/401(CF) |
A3128 | ʻO ka pauma molekula maʻamau | A3128 | ʻO ka paila maʻamau (ʻo ka maʻamau ka hoʻoluʻu ʻana o ka ea) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve(kahe liʻiliʻi) | A3128-A | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo pahu (ka kahe liʻiliʻi) | |||
| Nā ʻāpana hoʻoluʻu wai | A3128-B | ʻO ka pauma maʻamau + ʻāpana hoʻoluʻu wai(Hoʻololi i nā mea hoʻoluʻu ea) | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3128-C | ʻO ka paila maʻamau + Purge valve |
| （Kahe liʻiliʻi）、ʻO nā ʻāpana hoʻoluʻu wai | nā mea lako(kahe liʻiliʻi) + ʻāpana hoʻoluʻu wai(Hoʻololiʻāpana hoʻoluʻu ea） | ||||
|
5 |
EVFB-160/450D(LF) |
A3129 | ʻO ka pauma molekula maʻamau | A3129 | ʻO ka paila maʻamau (ʻo ka maʻamau ka hoʻoluʻu ʻana o ka ea) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve(kahe liʻiliʻi) | A3129-A | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo pahu (ka kahe liʻiliʻi) | |||
| Nā ʻāpana hoʻoluʻu wai | A3129-B | ʻO ka pauma maʻamau + ʻāpana hoʻoluʻu wai(Hoʻololi i nā mea hoʻoluʻu ea) | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve （Kahe liʻiliʻi）、ʻO nā ʻāpana hoʻoluʻu wai | A3129-C | ʻO ka pauma maʻamau + Hoʻomaʻemaʻe i nā mea komo (ka kahe liʻiliʻi) + Nā ʻāpana hoʻoluʻu wai (Hoʻololi i nā ʻāpana hoʻoluʻu ea) | |||
|
6 |
EVFB-160/450D(CF) |
A3130 | ʻO ka pauma molekula maʻamau | A3130 | ʻO ka paila maʻamau (ʻo ka maʻamau ka hoʻoluʻu ʻana o ka ea) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve(kahe liʻiliʻi) | A3130-A | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo pahu (ka kahe liʻiliʻi) | |||
| Nā ʻāpana hoʻoluʻu wai | A3130-B | ʻO ka pauma maʻamau + ʻāpana hoʻoluʻu wai(Hoʻololi i nā mea hoʻoluʻu ea) | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve （Kahe liʻiliʻi）、ʻO nā ʻāpana hoʻoluʻu wai | A3130-C | ʻO ka pauma maʻamau + Hoʻomaʻemaʻe i nā mea komo (ka kahe liʻiliʻi) + Nā ʻāpana hoʻoluʻu wai (Hoʻololi i nā ʻāpana hoʻoluʻu ea) | |||
|
7 |
EVFB-160/701(LF) |
A3139 | ʻO ka pauma molekula maʻamau | A3139 | ʻO ka pauma maʻamau（Ka hoʻoluʻu waihe maʻamau ma ka paʻamau） |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3139-A | ʻO ka paila maʻamau + Purge valvemea komo | |||
| Nā mea pā | A3139-B | ʻO ka pauma maʻamau + Fan | |||
| Hoʻomaʻemaʻe valveNā mea pā | A3139-C | ʻO ka paila maʻamau + Purge valvenā mea komo + Nā mea pā | |||
|
8 |
EVFB-160/701(CF) |
A3140 | ʻO ka pauma molekula maʻamau | A3140 | ʻO ka pauma maʻamau（Ka hoʻoluʻu waihe maʻamau ma ka paʻamau） |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3140-A | ʻO ka paila maʻamau + Purge valvemea komo | |||
| Nā mea pā | A3140-B | ʻO ka pauma maʻamau + Nā mea pā | |||
| Hoʻomaʻemaʻe valveNā mea pā | A3140-C | ʻO ka paila maʻamau + Purge valvenā mea komo + Nā mea pā | |||
|
9 |
EVFB-200/1401(LF) |
A3135 | ʻO ka pauma molekula maʻamau | A3135 | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3135-A | ʻO ka paila maʻamau + Purge valvemea komo | |||
| Nā mea pā | A3135-B | ʻO ka pauma maʻamau + Nā mea pā | |||
| Hoʻomaʻemaʻe valve | A3135-C | ʻO ka paila maʻamau + Purge valve |
| Nā mea pā | nā mea komo + Nā mea pā | ||||
|
10 |
EVFB-200/1401(CF) |
A3136 | ʻO ka pauma molekula maʻamau | A3136 | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3136-A | ʻO ka paila maʻamau + Purge valvemea komo | |||
| Nā mea pā | A3136-B | ʻO ka pauma maʻamau + Nā mea pā | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve、 | A3136-C | ʻO ka paila maʻamau + Purge valvenā mea komo + Nā mea pā | |||
|
11 |
EVFB-250/2201(LF) |
A3141 | ʻO ka pauma molekula maʻamau | A3141 | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3141-A | ʻO ka paila maʻamau + Purge valvemea komo | |||
| Nā mea pā | A3141-B | ʻO ka pauma maʻamau + Fan | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve、Nā mea pā | A3141-C | ʻO ka paila maʻamau + Purge valvenā mea komo + Nā mea pā | |||
|
12 |
EVFB-250/2201(CF) |
A3142 | ʻO ka pauma molekula maʻamau | A3142 | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3142-A | ʻO ka paila maʻamau + Purge valvemea komo | |||
| Nā mea pā | A3142-B | ʻO ka pauma maʻamau + Fan | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve、 | A3142-C | ʻO ka paila maʻamau + Purge valvenā mea komo + Nā mea pā | |||
| 13 | EVFB-II | A3261 | - | A3261 | ʻO ka mea hoʻoponopono pauma molecular（ kūpono no nā pauma molekala e like me EVFB- 100/301, EVFB- 160/401, EVFB-100/450D) |
| 14 | EVFB-III-A | A3263 | - | A3263 | ʻO ka mea hoʻoponopono molecular pump （ kūpono no nā pauma molekala e like me EVFB- 160/701, EVFB- 200/1401, EVFB-250/2201） |
ʻO nā pump molecular Compound i hoʻokaʻawale ʻia
Nā hiʻohiʻona nui o kēia pūʻulu huahana:
（1） Mana hoʻokaʻawale: AC220V lako mana, kahi kī hoʻomaka;
（2） hilinaʻi kiʻekiʻe: nā rotors holoʻokoʻa, ʻenehana hoʻokele BLDC;
（3） Hāpai pololei: ʻO ka hali pōpō seramika pololei，Hoʻokomo ʻia ma kēlā me kēia Angle（He mau hiʻohiʻona lubricated momona wale nō）；
（4） Nā ʻokoʻa hana: Loaʻa nā ʻano mea hoʻohana piha, Loaʻa nā hoʻoponopono maʻamau;
（5） Hāʻawi i ka hana wikiwiki hiki ke hoʻololi ʻia, No ka hoʻokō ʻana i nā koi o nā ʻano o ka wikiwiki pumping; ʻO kēia ʻano huahana e pili nui i ka PVD, CVD, ka pā aniani wai a me nā mea ʻē aʻe.
ka uhi ʻenehana, ka noiʻi ʻepekema a me nā ʻano ʻē aʻe.
Nā palena ʻenehana molecular pump
| Hoʻohālike | EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | EVFB-400/3600 | EVFB-400/4500 | |||||
| ☑ʻO ka hoʻomāmā nā palena | ||||||||||
| Paʻa hope loa(Pa) | <5x10-6（LF）；<5x10-7（CF） | |||||||||
| Pākī ka māmā holo (L/s) | N2 | He | N2 | He | N2 | H | N2 | He | N2 | He |
| 650 | 550 | 1350 | 1200 | 2050 | 1800 | 3600 | 3000 | 4800 | 3500 | |
| Pākuʻi hoʻopiʻi | >1x1011 | >1x104 | >1x1011 | >1x104 | >1x1010 | >1x104 | >1x108 | >6x102 | >1x108 | >8x103 |
| Ka nui mau puka komokaomi (Pa) | 2 | 1 | 2 | 1 | 2 | 1 | 0.05 | 0.02 | 0.03 | 0.01 |
| Ka nuimau Foreline | 300 | 200 | 300 | 200 | 200 | 100 | 50 | 35 | 40 | 30 |
| Maxforelinepressuretolerance(Pa) | 1000 | 500 | 1000 | 500 | 500 | 200 | 340 | 160 | 160 | 80 |
| ☑Kikino hoʻohālikelike | ||||||||||
| Komo loko flange | DN160 ISO-K（LF） a i ʻole CF | DN200 ISO-K（LF） a i ʻoleCF | DN250 ISO-K（LF） a i ʻoleCF | DN400 ISO-K（LF） a i ʻoleCF | DN400 ISO-K（LF） a i ʻoleCF | |||||
| Foreline flange | DN25 ISO-KF，KF40（Koho） | DN40 ISO-KF，KF50（Koho） | DN100 ISO-K（LF） | DN100 ISO-K（LF）orKF50（Koho） | ||||||
| Hoʻomaʻemaʻe flange | DN16 ISO-KF | / | DN16 ISO-KF | |||||||
| Paipai ʻia | 4~10 L/s | 8~16 L/s | 16~24 L/s | 30~70 L/s | ||||||
| Kaumaha（kg） | 20 ISO-K(LF) | 30 ISO-K(LF) | 40 ISO-K(LF) | ≈ 100 ISO-K(LF) | ≈ 83 ISO-K(LF) | |
| 23 (CF) | 34 (CF) | 45 (CF) | ≈ 105 (CF) | ≈ 88 (CF) | ||
| Haʻalulu | ≤ 0.05 | ≤ 0.3 | ||||
| walaʻau (dB) | ≤ 50 | ≤ 60 | ||||
| Hāpai | E hoʻomaʻamaʻa i ka poʻe poʻo poʻo | Piʻi kinipōpō seramika | ||||
| Ke hana nei kūlana | Kekahi | Kūleʻa±5° | ||||
| Oper.Ambient kahua mākēneki | ≤ 3mT (ʻO ka 10mT nui loa, pono e hoʻopilikino) | ≤ 3mT | ||||
| Oper.ambient mahana wela | Ea hooluolu | 5~35oC | / | / | ||
| Hoʻolili wai | 5~40oC | |||||
| Hoʻoluʻu wai koi | Ka mahana wai: 15-25 ℃ | kahe: ≥ 3L/min | ||||
| ☑Mea hooponopono nā palena | ||||||
| Kaawale mea hooponopono | EVFB-III-B（2U） | EVFB-VI（4U） | ||||
| mamao hoʻomalu | Ka mana mamao loa （ʻoluʻolu e nīnau i kā mākou poʻe ʻenekinia） | |||||
| Kūkākūkā ʻano hana | RS-485 | |||||
| Voltage（V） | Mai 100 a 240VAC（± | 220VAC（±10%） | ||||
| Ka pinepine（Hz） | 50/60Hz±5% | |||||
| Ka mana kiʻekiʻe loa（W） | 1000 | 1500 | ||||
| Hoʻomaka/kū hoʻomalu ʻano hana | Hoʻomaka a hoʻopau nā pihi hoʻomalu / hoʻomaka a hoʻōki ka mana RS485 / hoʻomaka a hoʻōki ka mana | |||||
| Nā pale | Manaʻo overcurrent, overvoltage, undervoltage, pale wela wela, overcurrent molecular pump,overload, pale wela wela, etc | |||||
| Hoʻololi ka māmā holo (r/min) | 36000±0.1% | 30000±0.1% | 24000±0.1% | 13500±0.1% | 16200±0.1% | |
| Haʻahaʻa ka māmā holo (r/min) | 25200±0.1% | 21000±0.1% | 16800±0.1% | / | ||
| ʻO kēia manawa（A） | ≤ 0.6 | ≤ 1 | ≤ 1 | ≤ 5 | ||
| Palekana fuse（A） | 6.5 | 6.5 | 6.5 | 12 | ||
| Hoʻomaka manawa（min） | ~5 | ~6 | ~7 | ~20 | ||
| Hoʻohaʻahaʻa manawa（min） | ~5 | ~10 | ~12 | ~30 | ||
| Oper. ambient kūlana | ʻAʻohe kinoea ʻino a me nā ʻāpana lepo maopopo; ka mahana o ke kaiapuni: -10 ℃ ~ 50 ℃ ； kaiapunika haʻahaʻa: ≤ 90%, ka ikaika haʻalulu: ≤ 0.5g | |||||
0Ana nui
| Hoʻohālike | D N | d1 | d2 | h | h1 | h3 | L |
| EVFB-160/700 EVFB-160/701 | 160 LF | 180 | 218.5 | 241.8 | 336.8 | 201.8 | 124.8 |
| 160CF | 202 | 218.5 | 268.8 | 359.8 | 224.8 | 124.8 | |
| EVFB-200/1400 EVFB-200/1401 | 200 LF | 240 | 267 | 257.5 | 352.5 | 231.5 | 155.1 |
| 200CF | 253 | 267 | 274.5 | 369.5 | 248.5 | 155.1 | |
| EVFB-250/2200 EVFB-250/2201 | 250 LF | 290 | 296 | 229.8 | 324.8 | 203.8 | 165.3 |
| 250CF | 305 | 296 | 259.8 | 354.8 | 233.8 | 165.3 |
EVFB-400/3600 Turbomolecular pume ana
EVFB-400/4500 Turbomolecular pauma ana
ʻO ke ʻano o ka mana hoʻokaʻawale
EVFB-III-B（2U）) i hoʻokaʻawale ʻia
EVFB-VI（4U）) i hoʻokaʻawale ʻia
Kauoha ʻIkepili
| helu | Huahana kumu hoʻohālike | huahana code | Mea lako | Kauoha helu | E wehewehe |
|
1 |
EVFB-160/701(LF) |
A3139-F | ʻO ka pauma molekala maʻamau | A3139-F | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3139-FA | ʻO ka pauma maʻamau + Purge valve accessories | |||
| Nā mea pā | A3139-FB | ʻO ka pauma maʻamau + Nā mea pā | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve, nā mea pā | A3139-FC | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo valve + Nā ʻāpana Fan | |||
|
2 |
EVFB-160/701(CF) |
A3140-F | ʻO ka pauma molekula maʻamau | A3140-F | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3140-FA | ʻO ka pauma maʻamau + Purge valve accessories | |||
| Nā mea pā | A3140-FB | ʻO ka pauma maʻamau + Nā mea pā | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve, nā mea pā | A3140-FC | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo valve + Nā ʻāpana Fan | |||
|
3 |
EVFB-200/1401(LF) |
A3135-F | ʻO ka pauma molekula maʻamau | A3135-F | ʻO ka paila maʻamau (ʻO ka hoʻoluʻu wai maʻamau ma ka paʻamau） |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3135-FA | ʻO ka pauma maʻamau + Purge valve accessories | |||
| Nā mea pā | A3135-FB | ʻO ka pauma maʻamau + Nā mea pā | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve, nā mea pā | A3135-FC | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo valve + Nā ʻāpana Fan | |||
|
4 |
EVFB-200/1401(CF) |
A3136-F | ʻO ka pauma molekula maʻamau | A3136-F | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3136-FA | ʻO ka pauma maʻamau + Purge valve accessories | |||
| Nā mea pā | A3136-FB | ʻO ka pauma maʻamau + Nā mea pā | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve, nā mea pā | A3136-FC | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo valve + Nā ʻāpana Fan | |||
|
5 |
EVFB-250/2201(LF) |
A3141-F | ʻO ka pauma molekula maʻamau | A3141-F | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3141-FA | ʻO ka pauma maʻamau + Purge valve accessories | |||
| Nā mea pā | A3141-FB | ʻO ka pauma maʻamau + Nā mea pā | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve, nā mea pā | A3141-FC | ʻO ka pāpaʻi maʻamau + Hoʻomaʻemaʻe i nā mea komo valve + Nā ʻāpana Fan | |||
|
6 |
EVFB-250/2201(CF) |
A3142-F | ʻO ka pauma molekula maʻamau | A3142-F | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3142-FA | ʻO ka pauma maʻamau + Purge valve accessories | |||
| Nā mea pā | A3142-FB | ʻO ka pauma maʻamau + Nā mea pā | |||
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3142-FC | ʻO ka paila maʻamau + Purge valve |
| Nā mea pā | nā mea komo + Nā mea pā | ||||
| 7 | EVFB-400/3600(LF) | A3187 | ʻO ka pauma molekula maʻamau | A3187 | ʻO ka pauma maʻamau（Ka hoʻoluʻu wai he maʻamau ma ka paʻamau） |
| 8 | EVFB-400/3600(CF) | A3188 | ʻO ka pauma molekula maʻamau | A3188 | ʻO ka pauma maʻamau（Ka hoʻoluʻu wai he maʻamau ma ka paʻamau） |
|
9 |
EVFB-400/4500(LF) |
A3185 | ʻO ka pauma molekula maʻamau | A3185 | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3185-A | ʻO ka pauma maʻamau + Purge valve accessories | |||
|
10 |
EVFB-400/4500(CF) |
A3186 | ʻO ka pauma molekula maʻamau | A3186 | ʻO ka pauma maʻamau (ʻO ka hoʻoluʻu wai maʻamau maʻamau) |
| E hoʻomaʻemaʻe i nā mea hoʻohui valve | A3186-A | ʻO ka pauma maʻamau + Purge valve accessories | |||
|
11 |
EVFB-III-HMI |
A3261-1 |
Papa hana lima |
A3261-1 | ʻO ka mea kūʻai aku koho ， He kūpono no nā pauma molekala e like me EVFB- 160/701 、 EVFB-200/1401 、EVFB-250/2201 |
| 12 | EVFB-VI | A3270 | Hoʻokaʻawale ʻia ka mea hoʻoponopono （4U） | A3270 | He kūpono no nā paila molekala Turbo e like me EVFB-400/3600, EVFB-400/450 |
| 13 | EVFB-III-B | A3264 | Hoʻokaʻawale ʻia ka mea hoʻoponopono （2U） | A3264 | He kūpono no nā pauma molekala e like me EVFB-160/701 、 EVFB- 200/1401 、 EVFB-250/2201 (ʻano kaʻawale) |
