Lub twj tso kua mis loj ceev ruaj tsis muaj suab nrov DRV rotary vane cua twj tso kua mis lub tshuab nqus tsev twj
DRV series lub tshuab nqus tsev twj tso kua mis yog ob theem rotary vane roj-sealed lub tshuab nqus tsev twj tso kua mis haum rau qis thiab nruab nrab lub tshuab nqus tsev, feem ntau yog siv los tshem tawm cua thiab lwm yam roj av qhuav.Nws yog ib qho ntawm cov khoom siv tseem ceeb rau lub tshuab nqus tsev qis thiab nruab nrab, nws tuaj yeem siv ib leeg lossis ua ntej
twj tso kua mis ntawm lwm lub tshuab nqus tsev twj.
Lub tshuab nqus tsev twj tso kua mis muaj cov yam ntxwv-tics ntawm kev txhim khu kev qha khiav, tsis tshua hnav qhov chaw, tsis tshua muaj kev vibration, tsis tshua muaj suab nrov thiab siab fficiency.
SV series lub tshuab nqus tsev twj tso kua mis yog imported los ntawm txawv teb chaws advanced technology, thiab cov khoom tseem ceeb yog imported Cheebtsam los yog imported.
cov ntaub ntawv.DRV series lub tshuab nqus tsev twj tuaj yeem hloov pauv cov khoom lag luam txawv teb chaws zoo sib xws.
Daim ntawv qhia rau EVFB Series Molecular Pump Khoom
Qauv:
EVFB-100/301 Compound integrated molecular twj tso kua mis
EVFB-160/401 Compound integrated molecular twj tso kua mis
EVFB-160/450D Anti-vibration molecular twj tso kua mis
EVFB-160/701Compound integrated molecular twj tso kua mis
EVFB-200/1401 Compound integrated molecular twj tso kua mis
EVFB-250/2201 Compound integrated molecular twj tso kua mis
EVFB-160/701Compound molecular twj tso kua mis
EVFB-200/1401 Compound molecular twj tso kua mis
EVFB-250/2201 Compound molecular twj tso kua mis
EVFB-400/3600 Turbo molecular twj tso kua mis
EVFB-400/4500 Turbo molecular twj tso kua mis
Product Overview
Molecular twj tso kua mis yog ib hom kev kub ceev rotating momentum hloov lub tshuab nqus tsev twj, nws ua hauj lwm siab ntau yog feem ntau 10-1Peb ~ 10-7Pa, yog ib qho tseem ceeb ntawm cov khoom siv nqus tsev vacuum kom ua tiav lub tshuab nqus tsev siab thiab ultra-siab nqus.Molecular twj tso kua mis muaj qhov zoo ntawm kev pib ceev ceev, kev ua haujlwm ntau, kev siv hluav taws xob tsawg, kev ua kom huv siab thiab kev saib xyuas yooj yim.
Cov khoom siv twj tso kua mis molecular piav qhia hauv phau ntawv piv txwv no yog lub cim thib ob ntawm cov khoom
nyuam qhuav pib los ntawm lub tuam txhab, uas yog tsim thiab optimized rau industrial nqus tsev thiab scientific kev tshawb fawb teb, nrog rau cov thawj series ntawm industrial nqus molecular twj tso kua mis cov khoom nrog integrated controllers thiab saj zawg zog daim ntawv thov scenarios.Raws li lub caliber, muaj DN100, DN160, DN200, DN250 thiab DN400 thiab lwm yam khoom.
Roj lubricated ib lub twj tso kua mis molecular
Cov yam ntxwv tseem ceeb ntawm cov khoom siv no:
(1) Integrated maub los: Integrated maub los tsim, Ua kom muaj kev sib koom ua ke, Ib qho tseem ceeb pib- nres;
(2) Precision bearing: Roj lubrication precision ceramic pob bearing, Nruab ntawm lub kaum ntse ntse;
(3) Kev ntseeg siab: Tag nrho cov rotors, BLDC tsav tshuab;
(4) Muaj ntau hom kev ua haujlwm: Muaj ntau yam khoom siv, kev daws teeb meem muaj nyob;
(5) Muab kev ua haujlwm nrawm, kom ua tau raws li qhov yuav tsum tau muaj ntawm ntau yam twj tso kua mis;
Cov khoom siv no yog tsim rau PVD, CVD, kua siv lead ua phaj thiab lwm yam txheej txheej;Mass spectrometry, high-zog physics, nqus pa nqus tsev vacuum, tshuaj thiab biological engineering thiab lwm yam kev tshawb fawb teb.
Molecular Pump Technical Specifications
| Qauv | EVFB-100/301 | EVFB-160/401 | EVFB-160/450D(kev cai ua) | ||||
| ☑Cov lub tshuab nqus tsev tsis muaj | |||||||
| Tso dej ceev (L/s) | N2 | He | N2 | He | N2 | He | |
| 300 | 230 | 460 | 380 | 38 | 310 | ||
| Qhov kawg siab | < 5 × 10-6 Pa (LF);< 5 × 10 -7 Pa (CF) | <8 × 10 -6 Pa (LF) <8 × 10 -7 Pa (CF) | |||||
| Compression piv | > | > | > | > | > 1 × 108 | > 1 × 10 3 | |
| Maximumcontinuousinletpress ua ur | 10 pab | 2 pab | 10 pab | 2 pab | 20 | 5 pab | |
| MaximumcontinuousForelinepressure | 300 | 200 | 300 | 200 pab | 20 | 10 pab | |
| Maxforelinepressuretolerance | 1000 | 500 | 1000 | 500 pab | 50 | 20 pab | |
| ☑Lub cev parameter | |||||||
| Inlet flange | DN100 ISO-K (LF) los yog CF | DN160 ISO-K (LF) lossis CF | |||||
| Foreline flange | DN25 ISO-KF lossis DN40KF (Yeem) | ||||||
| Tshem tawm flange | DN16 ISO-KF | ||||||
| Qhov hnyav | 9.6 kg (ISO-K | 10kg (ISO-K) | |||||
| 10kg (CF) | 11kg (CF) | ||||||
| Kev vibration | ≤0.05 hli | ||||||
| Suab nrov | ≤ 55 dB (Tus qauv cua txias) | ||||||
| Cov kabmob | Roj lubricated ceramic pob bearing | ||||||
| Kev khiav haujlwm txoj hauj lwm | Ib qho | ||||||
| Opera.ambient Sib nqus teb | ≤3 mT (Qhov loj tshaj 10mT, Yuav tsum tau kho) | ||||||
| Opera.ambie nt | Cua txias | 5 ~ 35 ℃ | |||||
| Dej txias | 5 ~ 40 ℃ | ||||||
| Coolingwaterrequirements | Dej kub: 15-30 ℃; siab: 0.15Mpa; PH6 ~ 8, ntshiab, Oilfree; ntws: ≥1L / min | ||||||
| Pom zoo forepump | 2-6 L / s | 3 ~ 8L / s | |||||
| ☑Tus tswj tsis muaj | |||||||
| Tus tswj | EVFB-II | ||||||
| Kev sib hloov ceev | 48 000 rp | 36 000 rpm | |||||
| Tsawg ceev | 3 3600r | 25 200 rpm | |||||
| Pib-up sij hawm | ≤ 5 feeb | ||||||
| Qhov hluav taws xob | 48VAC ± 2% | ||||||
| Kev sib txuas lus hom | Qauv: RS-485 | ||||||
| Qauv | EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | ||||
| ☑Cov lub tshuab nqus tsev tsis muaj | |||||||
| Qhov kawg siab (Pa) | <5x10-6 (LF) ； <5x10-7 (CF) | ||||||
| Tso dej ceev (L/s) | N2 | He | N | He | N2 | He | |
| 6 | 5 | 1350 | 1200 | 2050 | 1800 | ||
| Compression piv | > 1x1011 | > 1x104 | > 1x1011 | > 1x104 | > 1x1010 | > 1x104 | |
| Maximumcontinuousinletpress ure (Pa) | 2 | 1 | 2 | 1 | 2 | 1 | |
| MaximumcontinuousForelinepressure(Pa) | 30 | 2 | 3 | 2 | 2 | 1 | |
| Maxforelinepress uretolerance (Pa) | 10 | 5 | 1000 | 5 | 5 | 2 | |
| ☑Lub cev parameter | |||||||
| Inlet flange | DN160 ISO-K (LF) lossis CF | DN200 ISO-K (LF) CF | DN250 ISO-K (LF) lub | ||||
| Foreline flange | DN25 ISO-KF lossis KF40 (Yeem) | DN40 ISO-KF lossis KF50 (Yeem) | |||||
| Tshem tawm flange | DN16 ISO-KF | ||||||
| Pom zoo pem hauv ntej (L / s) | 4~ | 8~ | 16 ~ 2 | ||||
| Qhov hnyav(kg) | 20 ISO-K (LF) | 30 ISO-K (LF) | 40 ISO-K (LF) | ||||
| 23 (CF) | 34 | 45 (CF) | |||||
| Kev vibration | ≤ | ||||||
| Suab nrov (dB) | ≤ | ||||||
| Cov kabmob | Roj lubricated ceramic pob bearing | ||||||
| Kev khiav haujlwm txoj hauj lwm | Ib qho | ||||||
| Sib nqus teb kev siv zog (mT) | ≤3 (Qhov loj tshaj 10mT, Yuav tsum tau kho) | ||||||
| Opera.ambient kub | Cua cua txias | 5 ~ 35 ℃ | |||||
| Dej cua txias | 5 ~ 40 ℃ | ||||||
| Txias dej kev xav tau | Dej kub: 15-25 ℃; siab: 0.15Mpa; PH6 ~ 8, meej, Roj tsis muaj Dej ntws: ≥1.5L / min | ||||||
| ☑Tus tswj tsis muaj | |||||||
| Tus tswj | EVFB-III-A | ||||||
| Kev sib txuas lus hom | Qauv: RS-485 | ||||||
| Qhov hluav taws xob(V) | 220V AC ± 10% Tawm tswv yim | ||||||
| Ntau zaus(Hz) | 50/60 ± 5% | ||||||
| Qhov siab tshaj plaws nkag Hwj chim(W) | 100 | ||||||
| Pib / nres tswj hom | Controller nyees khawm tswj pib thiab nres / RS485 maub los pib thiab nres / DB15 Tswj pib thiab nres | ||||||
| Kev tiv thaiv | Controller overcurrent, overvoltage, undervoltage, overheating tiv thaiv, molecular twj tso kua mis overcurrent, overload, overheating tiv thaiv, thiab lwm yam | ||||||
| Kev sib hloov ceev (r/min) | 36000 ± 0.1% | 30000 ± 0.1% | 24000 ± 0.1% | ||||
| Tsawg ceev (r/min) | 25200 ± 0.1% | 21000 ± 0.1% | 16800 ± 0.1% | ||||
| Tam sim no(A) | ≤0.6 | ≤1 | ≤1 | ||||
| Kev tiv thaiv fuse(A) | 6.5 | 6.5 | 6.5 | ||||
| Lub sijhawm pib(min) | ~5 | ~6 | ~7 | ||||
| Lub sijhawm poob(min) | ~5 | ~ 10 | ~ 12 | ||||
Zuag qhia tag nrho Dimension
| Qauv | DN | d1 | h | h1 | h2 | d2 | n |
| EVFB-100/301 | 100 LF | 130 | 253.5 ib | 180 | 170 | — | — |
| 100 CF | 152 | 274.5 ib | 201 | 191 | 130.3 Nws | 16 | |
| EVFB-160/401 | 160 lfb | 180 | 239.5 ib | 169.5 ib | 159.5 ib | — | — |
| 160 CF ua | 202 | 238.5 ib | 168.5 ib | 158.5 ib | 181 | 20 | |
| EVFB-160/450D | 160 lfb | 180 | 243 | 169.5 ib | 159.5 ib | — | — |
| 160 CF ua | 202 | 242 | 168.5 ib | 158.5 ib | 181 | 20 |
| Qauv | DN | d1 | d2 | h | h1 | h3 | L |
| EVFB-160/700 | 160 lfb | 180 | 218.5 ib | 241.8 ib | 336.8 ib | 201.8 ib | 124.8 ib |
| EVFB-160/701 | 160 CF ua | 202 | 218.5 ib | 268.8 ib | 359.8 ib | 224.8 ib | 124.8 ib |
| EVFB-200/1400 | 200 LF | 240 | 267 | 257.5 ib | 352.5 ib | 231.5 ib | 155.1 ib |
| EVFB-200/1401 | 200 CF ua | 253 | 267 | 274.5 ib | 369.5 ib | 248.5 ib | 155.1 ib |
| EVFB-250/2200 | 250 LF | 290 | 296 ib | 229.8 ib | 324.8 ib | 203.8 ib | 165.3 ib |
| EVFB-250/2201 | 250 CF ua | 305 | 296 ib | 259.8 ib | 354.8 ib | 233.8 ib | 165.3 ib |
Kev txiav txim Cov ntaub ntawv
| Tus lej | Khoom qauv | Khoom code | Khoom siv | Kev txiav tximtus lej | Piav |
|
1 |
EVFB-100/301 (LF) |
A3123 | standard molecular twj tso kua mis | A3123 | Lub twj tso kua mis txheem (Cua txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories(me me ntws) | A3123-A | Lub twj tso kua mis txheem + Purge valve accessories (me me ntws) | |||
| Dej-txias Cheebtsam | A3123-B | Lub twj tso kua mis txheem + Cov khoom siv dej txias (Hloov cov khoom cua txias) | |||
| Purge valve accessories (me me ntws), Dej-txias Cheebtsam | A3123-C | Lub twj tso kua mis txheem + Purge valve accessories (small flow) + Dej txias Cheebtsam (Hloov cua txias Cheebtsam) | |||
|
2 |
EVFB-100/301 (CF) |
A3124 | standard molecular twj tso kua mis | A3124 | Lub twj tso kua mis txheem (Cua txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories(me me ntws) | A3124-A | Lub twj tso kua mis txheem + Purge valve accessories (me me ntws) | |||
| Dej-txias Cheebtsam | A3124-B | Lub twj tso kua mis txheem + Cov khoom siv dej txias (Hloov cov khoom cua txias) | |||
| Purge valve accessories (me me ntws), Dej-txias Cheebtsam | A3124-C | Lub twj tso kua mis txheem + Purge valve accessories (small flow) + Dej txias Cheebtsam (Hloov cua txias Cheebtsam) | |||
|
3 |
EVFB-160/401 (LF) |
A3127 | standard molecular twj tso kua mis | A3127 | Lub twj tso kua mis txheem (Cua txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories(me me ntws) | A3127-A | Lub twj tso kua mis txheem + Purge valve accessories (me me ntws) | |||
| Dej-txias Cheebtsam | A3127-B | Lub twj tso kua mis txheem + Cov khoom siv dej txias (Hloov cov khoom cua txias) | |||
| Purge valve accessories (me me ntws), Dej-txias Cheebtsam | A3127-C | Lub twj tso kua mis txheem + Purge valve accessories (small flow) + Dej txias Cheebtsam (Hloov cua txias Cheebtsam) | |||
|
4 |
EVFB-160/401 (CF) |
A3128 | standard molecular twj tso kua mis | A3128 | Lub twj tso kua mis txheem (Cua txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories(me me ntws) | A3128-A | Lub twj tso kua mis txheem + Purge valve accessories (me me ntws) | |||
| Dej-txias Cheebtsam | A3128-B | Lub twj tso kua mis txheem + Cov khoom siv dej txias (Hloov cov khoom cua txias) | |||
| Purge valve accessories | A3128-C | Lub twj tso kua mis txheem + Purge valve |
| (me me ntws), Dej-txias Cheebtsam | accessories (me me ntws) + Dej-txias Cheebtsam (Hloovcua txias Cheebtsam) | ||||
|
5 |
EVFB-160/450D (LF) |
A3129 | standard molecular twj tso kua mis | A3129 | Lub twj tso kua mis txheem (Cua txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories(me me ntws) | A3129-A | Lub twj tso kua mis txheem + Purge valve accessories (me me ntws) | |||
| Dej-txias Cheebtsam | A3129-B | Lub twj tso kua mis txheem + Cov khoom siv dej txias (Hloov cov khoom cua txias) | |||
| Purge valve accessories (me me ntws), Dej-txias Cheebtsam | A3129-C | Lub twj tso kua mis txheem + Purge valve accessories (small flow) + Dej txias Cheebtsam (Hloov cua txias Cheebtsam) | |||
|
6 |
EVFB-160/450D (CF) |
A3130 | standard molecular twj tso kua mis | A3130 | Lub twj tso kua mis txheem (Cua txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories(me me ntws) | A3130-A | Lub twj tso kua mis txheem + Purge valve accessories (me me ntws) | |||
| Dej-txias Cheebtsam | A3130-B | Lub twj tso kua mis txheem + Cov khoom siv dej txias (Hloov cov khoom cua txias) | |||
| Purge valve accessories (me me ntws), Dej-txias Cheebtsam | A3130-C | Lub twj tso kua mis txheem + Purge valve accessories (small flow) + Dej txias Cheebtsam (Hloov cua txias Cheebtsam) | |||
|
7 |
EVFB-160/701 (LF) |
A3139 | standard molecular twj tso kua mis | A3139 | Lub twj tso kua mis txheem (Dej txiasyog standard los ntawm default) |
| Purge valve accessories | A3139-A | Lub twj tso kua mis txheem + Purge valveaccessories | |||
| Cov khoom siv kiv cua | A3139-B | Lub twj tso kua mis txheem + Ntxuam | |||
| Purge valve accessories,Cov khoom siv kiv cua | A3139-C | Lub twj tso kua mis txheem + Purge valveaccessories + Ntxuam Cheebtsam | |||
|
8 |
EVFB-160/701 (CF) |
A3140 | standard molecular twj tso kua mis | A3140 | Lub twj tso kua mis txheem (Dej txiasyog standard los ntawm default) |
| Purge valve accessories | A3140-A | Lub twj tso kua mis txheem + Purge valveaccessories | |||
| Cov khoom siv kiv cua | A3140-B | Lub twj tso kua mis txheem + Ntxuam Cheebtsam | |||
| Purge valve accessories,Cov khoom siv kiv cua | A3140-C | Lub twj tso kua mis txheem + Purge valveaccessories + Ntxuam Cheebtsam | |||
|
9 |
EVFB-200/1401 (LF) |
A3135 | standard molecular twj tso kua mis | A3135 | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3135-A | Lub twj tso kua mis txheem + Purge valveaccessories | |||
| Cov khoom siv kiv cua | A3135-B | Lub twj tso kua mis txheem + Ntxuam Cheebtsam | |||
| Purge valve accessories, | A3135-C | Lub twj tso kua mis txheem + Purge valve |
| Cov khoom siv kiv cua | accessories + Ntxuam Cheebtsam | ||||
|
10 |
EVFB-200/1401 (CF) |
A3136 | standard molecular twj tso kua mis | A3136 | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3136-A | Lub twj tso kua mis txheem + Purge valveaccessories | |||
| Cov khoom siv kiv cua | A3136-B | Lub twj tso kua mis txheem + Ntxuam Cheebtsam | |||
| Purge valve accessories, | A3136-C | Lub twj tso kua mis txheem + Purge valveaccessories + Ntxuam Cheebtsam | |||
|
11 |
EVFB-250/2201 (LF) |
A3141 | standard molecular twj tso kua mis | A3141 | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3141-A | Lub twj tso kua mis txheem + Purge valveaccessories | |||
| Cov khoom siv kiv cua | A3141-B | Lub twj tso kua mis txheem + Ntxuam | |||
| Purge valve accessories, Ntxuam Cheebtsam | A3141-C | Lub twj tso kua mis txheem + Purge valveaccessories + Ntxuam Cheebtsam | |||
|
12 |
EVFB-250/2201 (CF) |
A3142 | standard molecular twj tso kua mis | A3142 | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3142-A | Lub twj tso kua mis txheem + Purge valveaccessories | |||
| Cov khoom siv kiv cua | A3142-B | Lub twj tso kua mis txheem + Ntxuam | |||
| Purge valve accessories, | A3142-C | Lub twj tso kua mis txheem + Purge valveaccessories + Ntxuam Cheebtsam | |||
| 13 | EVFB-II | A3261 | - | A3261 | Molecular Pump Controller (Zoo rau cov twj molecular xws li EVFB-100/301, EVFB-160/401, EVFB-100/450D) |
| 14 | EVFB-III-A | A3263 | - | A3263 | Molecular Pump Controller (Zoo rau cov twj molecular xws li EVFB- 160/701, EVFB- 200/1401, EVFB-250/2201) |
Separated Compound molecular twj tso kua mis
Cov yam ntxwv tseem ceeb ntawm cov khoom siv no:
(1) Sib cais tswj: AC220V fais fab mov, Ib qho tseem ceeb pib-nres;
(2) Kev ntseeg siab: Tag nrho cov rotors, BLDC tsav tshuab;
(3) Precision bearing: Precision ceramic pob bearing, Nruab ntawm txhua lub kaum sab xis (tsuas yog roj lubricated qauv) ;
(4) Muaj ntau hom kev ua haujlwm: Muaj ntau yam khoom siv, kev daws teeb meem muaj nyob;
(5) Muab kev ua haujlwm nrawm nrawm, kom ua tau raws li qhov yuav tsum tau muaj ntawm ntau yam kev siv ceev; Cov khoom siv no feem ntau siv rau PVD, CVD, kua siv lead ua phaj thiab lwm yam.
industrial txheej, kev tshawb fawb thiab lwm yam kev lag luam.
Molecular Pump Technical Parameters
| Qauv | EVFB-160/701 | EVFB-200/1401 | EVFB-250/2201 | EVFB-400/3600 | EVFB-400/4500 | |||||
| ☑Cov lub tshuab nqus tsev tsis muaj | ||||||||||
| Ultimatepressure (Pa) | <5x10-6 (LF) ； <5x10-7 (CF) | |||||||||
| Tso dej ceev (L/s) | N2 | He | N2 | He | N2 | H | N2 | He | N2 | He |
| 650 | 550 | 1350 | 1200 | 2050 | 1800 | 3600 ib | 3000 | 4800 ib | 3500 | |
| Compression ratio | > 1x1011 | > 1x104 | > 1x1011 | > 1x104 | > 1x1010 | > 1x104 | > 1x108 | > 6x102 | > 1x108 | > 8x103 |
| Qhov siab tshaj plaws tsis tu ncua nkagsiab (Pa) | 2 | 1 | 2 | 1 | 2 | 1 | 0.05 Nws | 0.02 ib | 0.03 ib | 0.01 ib |
| Qhov siab tshaj plawstsis tu ncua Foreline | 300 | 200 | 300 | 200 | 200 | 100 | 50 | 35 | 40 | 30 |
| Maxforelinepressuretolerance (Pa) | 1000 | 500 | 1000 | 500 | 500 | 200 | 340 | 160 | 160 | 80 |
| ☑Lub cev parameter | ||||||||||
| Inlet flange | DN160 ISO-K (LF) lossis CF | DN200 ISO-K (LF) lossis CF | DN250 ISO-K (LF) lossis CF | DN400 ISO-K (LF) lossis CF | DN400 ISO-K (LF) lossis CF | |||||
| Foreline flange | DN25 ISO-KF,KF40 (yeem) | DN40 ISO-KF, KF50 (Yeem) | DN100 ISO-K (LF) | DN100 ISO-K (LF)los yog KF50 (yeem) | ||||||
| Tshem tawm flange | DN16 ISO-KF | / | DN16 ISO-KF | |||||||
| Pom zoo | 4 ~ 10L / s | 8 ~ 16L / s | 16-24 L / s | 30 ~ 70L / s | ||||||
| Qhov hnyav(kg) | 20 ISO-K (LF) | 30 ISO-K (LF) | 40 ISO-K (LF) | ≈ 100 ISO-K (LF) | ≈ 83 ISO-K (LF) | |
| 23 (CF) | 34 (CF) | 45 (CF) | ≈ 105 (CF) | ≈ 88 (CF) | ||
| Kev vibration | ≤ 0.05 | ≤ 0.3 | ||||
| Suab nrov (dB) | ≤ 50 | ≤ 60 | ||||
| Cov kabmob | Roj lubricated ceramic pob bearing | Ceramic Pob Bearing | ||||
| Kev khiav haujlwm txoj hauj lwm | Ib qho | Vertical ± 5 ° | ||||
| Opera.Ambient Magneticfield | ≤ 3mT (Qhov loj tshaj 10mT, Yuav tsum tau kho) | ≤ 3mT | ||||
| Tus neeg ua haujlwm.ambient kub | Cua cua txias | 5-35 oC | / | / | ||
| Dej txias | 5 ~ 40oC | |||||
| Txias dej kev xav tau | Dej kub: 15-25 ℃; Ua ntej: 0.15Mpa; ntws: ≥1.5L / min | Kev khiav dej num: ≥ 3L / min | ||||
| ☑Tus tswj tsis muaj | ||||||
| Sib cais tus tswj | EVFB-III-B (2U) | EVFB-VI (4U) | ||||
| Chaw taws teeb tswj | Ultra-kev tswj kev deb (thov nrog peb cov engineers) | |||||
| Kev sib txuas lus hom | Qauv: RS-485 | |||||
| Qhov hluav taws xob(V) | Los ntawm 100 txog 240VAC (± | 220VAC (± 10%) | ||||
| Ntau zaus(Hz) | 50/60Hz ± 5% | |||||
| Maximuminput zog(W) | 1000 | 1500 | ||||
| Pib / nres tswj hom | Controller nyees khawm tswj pib thiab nres / RS485 maub los pib thiab nres / DB15 Tswj pib thiab nres | |||||
| Kev tiv thaiv | Controller overcurrent, overvoltage, undervoltage, overheating tiv thaiv, molecular twj tso kua mis overcurrent,overload, overheating tiv thaiv, thiab lwm yam | |||||
| Kev sib hloov ceev (r/min) | 36000 ± 0.1% | 30000 ± 0.1% | 24000 ± 0.1% | 13500 ± 0.1% | 16200 ± 0.1% | |
| Tsawg ceev (r/min) | 25200 ± 0.1% | 21000 ± 0.1% | 16800 ± 0.1% | / | ||
| Tam sim no(A) | ≤ 0.6 | ≤ 1 | ≤ 1 | ≤ 5 | ||
| Kev tiv thaiv fuse(A) | 6.5 | 6.5 | 6.5 | 12 | ||
| Pib-up sij hawm(min) | ~5 | ~6 | ~7 | ~ 20 | ||
| Lub sijhawm poob(min) | ~5 | ~ 10 | ~ 12 | ~ 30 | ||
| Tus neeg ua haujlwm. ambient mob | Tsis muaj corrosive gases thiab pom tseeb plua plav hais; ib puag ncig kub: -10 ℃ ~ 50 ℃ ； Ib puag ncigCov av noo: ≤ 90%, kev vibration siv: ≤ 0.5g | |||||
0 Verall Dimension
| Qauv | D N | d1 | d2 | h | h1 | h3 | L |
| EVFB-160/700 EVFB-160/701 | 160 lfb | 180 | 218.5 ib | 241.8 ib | 336.8 ib | 201.8 ib | 124.8 ib |
| 160 CF ua | 202 | 218.5 ib | 268.8 ib | 359.8 ib | 224.8 ib | 124.8 ib | |
| EVFB-200/1400 EVFB-200/1401 | 200 LF | 240 | 267 | 257.5 ib | 352.5 ib | 231.5 ib | 155.1 ib |
| 200 CF ua | 253 | 267 | 274.5 ib | 369.5 ib | 248.5 ib | 155.1 ib | |
| EVFB-250/2200 EVFB-250/2201 | 250 LF | 290 | 296 ib | 229.8 ib | 324.8 ib | 203.8 ib | 165.3 ib |
| 250 CF ua | 305 | 296 ib | 259.8 ib | 354.8 ib | 233.8 ib | 165.3 ib |
EVFB-400/3600 Turbomolecular twj qhov ntev
EVFB-400/4500 Turbomolecular twj qhov ntev
Qhov tshwm sim ntawm kev sib cais tswj
EVFB-III-B (2U) sib cais maub los
EVFB-VI (4U) sib cais maub los
Kev txiav txim Cov ntaub ntawv
| tus lej | Khoom qauv | khoom code | Khoom siv | Kev txiav txim tus lej | Piav |
|
1 |
EVFB-160/701 (LF) |
A3139-F | Standard molecular twj tso kua mis | A3139-F | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3139-FA | Lub twj tso kua mis txheem + Purge valve accessories | |||
| Cov khoom siv kiv cua | A3139-FB | Lub twj tso kua mis txheem + Ntxuam Cheebtsam | |||
| Purge valve accessories, Ntxuam Cheebtsam | A3139-FC | Lub twj tso kua mis txheem + Purge valve accessories + Ntxuam Cheebtsam | |||
|
2 |
EVFB-160/701 (CF) |
A3140-F | standard molecular twj tso kua mis | A3140-F | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3140-FA | Lub twj tso kua mis txheem + Purge valve accessories | |||
| Cov khoom siv kiv cua | A3140-FB | Lub twj tso kua mis txheem + Ntxuam Cheebtsam | |||
| Purge valve accessories, Ntxuam Cheebtsam | A3140-FC | Lub twj tso kua mis txheem + Purge valve accessories + Ntxuam Cheebtsam | |||
|
3 |
EVFB-200/1401 (LF) |
A3135-F | standard molecular twj tso kua mis | A3135-F | Lub twj tso kua mis txheem (Dej txias yog txheem los ntawm default) |
| Purge valve accessories | A3135-FA | Lub twj tso kua mis txheem + Purge valve accessories | |||
| Cov khoom siv kiv cua | A3135-FB | Lub twj tso kua mis txheem + Ntxuam Cheebtsam | |||
| Purge valve accessories, Ntxuam Cheebtsam | A3135-FC | Lub twj tso kua mis txheem + Purge valve accessories + Ntxuam Cheebtsam | |||
|
4 |
EVFB-200/1401 (CF) |
A3136-F | standard molecular twj tso kua mis | A3136-F | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3136-FA | Lub twj tso kua mis txheem + Purge valve accessories | |||
| Cov khoom siv kiv cua | A3136-FB | Lub twj tso kua mis txheem + Ntxuam Cheebtsam | |||
| Purge valve accessories, Ntxuam Cheebtsam | A3136-FC | Lub twj tso kua mis txheem + Purge valve accessories + Ntxuam Cheebtsam | |||
|
5 |
EVFB-250/2201 (LF) |
A3141-F | standard molecular twj tso kua mis | A3141-F | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3141-FA | Lub twj tso kua mis txheem + Purge valve accessories | |||
| Cov khoom siv kiv cua | A3141-FB | Lub twj tso kua mis txheem + Ntxuam Cheebtsam | |||
| Purge valve accessories, Ntxuam Cheebtsam | A3141-FC | Lub twj tso kua mis txheem + Purge valve accessories + Ntxuam Cheebtsam | |||
|
6 |
EVFB-250/2201 (CF) |
A3142-F | standard molecular twj tso kua mis | A3142-F | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3142-FA | Lub twj tso kua mis txheem + Purge valve accessories | |||
| Cov khoom siv kiv cua | A3142-FB | Lub twj tso kua mis txheem + Ntxuam Cheebtsam | |||
| Purge valve accessories | A3142-FC | Lub twj tso kua mis txheem + Purge valve |
| Cov khoom siv kiv cua | accessories + Ntxuam Cheebtsam | ||||
| 7 | EVFB-400/3600 (LF) | A3187 | standard molecular twj tso kua mis | A3187 | Lub twj tso kua mis txheem (Dej txias yog standard los ntawm default) |
| 8 | EVFB-400/3600 (CF) | A3188 | standard molecular twj tso kua mis | A3188 | Lub twj tso kua mis txheem (Dej txias yog standard los ntawm default) |
|
9 |
EVFB-400/4500 (LF) |
A3185 | standard molecular twj tso kua mis | A3185 | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3185-A | Lub twj tso kua mis txheem + Purge valve accessories | |||
|
10 |
EVFB-400/4500 (CF) |
A3186 | standard molecular twj tso kua mis | A3186 | Lub twj tso kua mis txheem (Dej txias yog tus qauv los ntawm lub neej ntawd) |
| Purge valve accessories | A3186-A | Lub twj tso kua mis txheem + Purge valve accessories | |||
|
11 |
EVFB-III-HMI |
A3261-1 |
Tes ua vaj huam sib luag |
A3261-1 | Cov neeg siv khoom xaiv tau, Tsim nyog rau cov twj molecular xws li EVFB-160/701, EVFB-200/1401, EVFB-250/2201 |
| 12 | EVFB-VI | A3270 | Sib cais tswj (4U) | A3270 | Haum rau Turbo molecular twj xws li EVFB-400/3600, EVFB-400/450 |
| 13 | EVFB-III-B | A3264 | Sib cais tswj (2U) | A3264 | Haum rau cov twj molecular xws li EVFB-160/701, EVFB-200/1401, EVFB-250/2201 (hom cais) |
