Mass Flow Controllers (MFC) e fana ka tekanyo e nepahetseng le taolo ea phallo e boima ea likhase.
I. Phapano ke efe pakeng tsa MFC le MFM?
Mass flow meter(MFM) ke mofuta oa sesebelisoa se lekanyang phallo ea khase ka nepo, 'me boleng ba eona ha boa nepahala ka lebaka la ho feto-fetoha ha mocheso kapa khatello, 'me ha bo hloke matšeliso a mocheso le khatello.The mass flow controller(MFC) eseng feela e na le ts'ebetso ea meter ea phallo ea boima, empa ho bohlokoa le ho feta, e ka laola phallo ea khase ka bo eona, ke hore, mosebelisi a ka beha phallo ho latela litlhoko tsa bona, 'me MFC ka boeona e boloka phallo e tsitsitseng ka boleng bo behiloeng, le haeba khatello ea tsamaiso Ho feto-fetoha ha maemo kapa ho fetoha ha mocheso oa tikoloho ho ke ke ha etsa hore e khelohe boleng bo behiloeng.Molaoli oa phallo ea boima ke sesebelisoa sa phallo e tsitsitseng, e leng sesebelisoa sa khase se tsitsitseng se ka behoang ka letsoho kapa sa laoloa ka mokhoa o ikemetseng ka ho hokahanya le k'homphieutha.Limithara tsa phallo ea boima li lekanya feela empa ha li laole.Molaoli oa phallo ea boima o na le valve ea ho laola, e ka khonang ho lekanya le ho laola phallo ea khase.
II.Sebopeho lemolao-motheo oa ts'ebetso?
1、 Sebopeho
2, Molao-motheo oa Ts'ebetso
Ha phallo e kena pipe ea ho kenya, boholo ba phallo e feta ka mocha oa diverter, karolo e nyenyane ea eona e kenang ka har'a tube ea capillary ka hare ho sensor.Ka lebaka la sebopeho se khethehileng sa
mocha oa diverter, likarolo tse peli tsa phallo ea khase li ka lekana ka ho toba.Sensor e futhumetse ebile e futhumetse, 'me mocheso o ka hare o phahame ho feta mocheso oa moea o kenang.Ka nako ena, phallo e boima ea karolo e nyenyane ea khase e lekanngoa ka molao-motheo oa ho fetisa mocheso ka tube ea capillary le molao-motheo oa phapang ea mocheso oa calorimetry.Phallo ea khase e lekantsoeng ka tsela ena e ka hlokomoloha liphello tsa mocheso le khatello.Letšoao la ho lekanya phallo le bonoang ke sensor le kenya letsoho ho boto ea potoloho le ho holisoa le ho tsoa, 'me mosebetsi oa MFM o phethiloe.Ho eketsa ts'ebetso ea ho laola ka mokhoa o ikemetseng oa PID ho boto ea potoloho, Bapisa lets'oao la tekanyo ea phallo le lekantsoeng ke sensor le lets'oao le behiloeng le fanoeng ke mosebelisi.Ho itšetlehile ka sena, valve ea ho laola e laoloa e le hore letšoao la ho lemoha phallo le lekana le letšoao le behiloeng, ka hona ho hlokomela mosebetsi oa MFC.
III.Lisebelisoa le likarolo.
MFC, e sebelisoang haholo libakeng tse kang: semiconductor le IC fabrication, lisebelisoa tse khethehileng tsa saense, indasteri ea lik'hemik'hale, indasteri ea peterole, indasteri ea meriana, ts'ireletso ea tikoloho le lipatlisiso tsa tsamaiso ea vacuum, joalo-joalo. , oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation;lisebelisoa tsa vacuum deposition, optical fiber melting, lisebelisoa tsa micro-reaction, ho kopanya le ho bapisa tsamaiso ea khase, tsamaiso ea capillary flow control, chromatograph ea khase le lisebelisoa tse ling tsa tlhahlobo.
MFC e tlisa ho nepahala ho phahameng, ho pheta-pheta hantle, karabelo e potlakileng, ho qala ka bonolo, ho ts'epahala ho betere, mefuta e fapaneng ea khatello ea ts'ebetso (ts'ebetso e ntle khatellong e phahameng le maemo a vacuum), ts'ebetso e bonolo, ts'ebetso e bonolo, ho hokahana le PC ho etsa othomathiki. taolo ho sistimi ea basebelisi.
IV.Mokhoa oa ho tseba le ho sebetsana le failures?
Khamphani ea rona e na le moenjiniere ea sebetsang ka mor'a thekiso, e ka u thusang ho rarolla mathata a ho kenya le ho sebelisa.
Nako ea poso: Jul-29-2022