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Molecular Turbo Pump -
High Vacuum Pneumatic Angle Valve, DC24V or AC220V – Super Q Featured Image

Molecular Turbo Pump - High Vacuum Pneumatic Angle Valve, DC24V or AC220V – Super Q

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Molecular Turbo Pump - High Vacuum Pneumatic Angle Valve, DC24V or AC220V – Super Q Detail:

Model		EVGDQ-J16B(KF)S	EVGDQ-J25B(KF)S		EVGDQ-J40B(KF)S	EVGDQ-J50B(KF)S
Pressure Range	Pa	1×10^-6Pa～1.2×10⁵Pa(sealed with bellows)1×10^-5Pa～1.2×10⁵Pa(sealed with viton O ring)
Inside nominal diameter	mm	16		25	40	50
Leak rate	Pa·L/s	＜1.3×10^-7
Service life until first maintenance	time	1000 000(sealed with bellows)600 000(sealed with fluorine rubber ring)
Heating temperature(Valve body)	℃	＜120
Supply voltage	—	AC220V 50Hz,6W or DC24V,3W (Other specifications can be customized)
Opening / closing time	s	＜1
Compressed air	MPa	0.4~0.7
Position indicator of the valve	—	Magnetic switch(component choosed)
Installation orientation	—	Any
Ambient temperature	℃	5~40

Pneumatic Type EVGDQ Series High Vacuum Angle Valve, DN63-DN250

Model		EVGDQ-J63B(ISO-K)S	EVGDQ-J80B(ISO-K)S	EVGDQ-J100B(ISO-K)S	EVGDQ-S160B(ISO-K)S	EVGDQ-S200B(ISO-K)S	EVGDQ-S250B(ISO-K)S
Pressure Range	Pa	1×10^-6Pa～1.2×10⁵Pa(sealed with bellows) 1×10^-5Pa～1.2×10⁵Pa(sealed with fluorine rubber ring)
Inside nominal diameter	mm	63	80	100	150	200	250
Leak rate	Pa·L/s	≤1.3×10^-7
Service life until first maintenance	time	200000
Heating temperature(Valve body)	℃	≤120
Supply voltage	—	AC220V 50Hz,6W or DC24V,3W (Other specifications can be customized)
Opening / closing time	s	≤1
Compressed air	MPa	0.4~0.7
Position indicator of the valve	—	Magnetic switch(component optional)
Installation orientation	—	Any
Ambient temperature	℃	5~40

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