EV series grease lubricating molecular pump
EV-300Z and EV-300ZF Technical Data
|
Model |
EV-300Z |
EV-300ZF |
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|
Inlet Flange (mm) |
100CF |
100 ISO-K |
100CF |
100 ISO-K |
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|
Outlet Flange (mm) |
25 KF |
25 KF |
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|
Pumping Speed (L/S) |
300 |
300 |
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|
Compression Ratio |
N2 |
>108 |
>108 |
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|
H2 |
>1X103 |
>1X103 |
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|
Ultimate Vacuum(Pa) |
<3X10-7 |
<2X10-6 |
<3X10-7 |
<2X10-6 |
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|
Rotation Speed(rpm) |
30000 |
30000 |
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|
Bearing |
Grease-lubricated Ceramic Bearing |
Grease-lubricated Ceramic Bearing |
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|
Run-up Time(min) |
<4 |
<4 |
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|
Backing Pump |
2 L/S |
2 L/S |
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|
Cooling Method |
Air Cooling |
WaterCooling |
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|
ambient temperature |
5-36℃ |
<38℃ |
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|
Mounting |
Any position |
Any position |
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|
Weight(kg) (kg) |
≈11 |
≈10.8 |
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Compression ratio curve of EV-300ZF grease lubricated air-cooled molecular pump to air
Compression ratio curve of EV-300ZF grease lubricated air-cooled molecular pump for nitrogen and hydrogen
Product dimension, mounting connection dimension
EV-300Z Grease lubricated water-cooled molecular pumps-shape dimensions, mounting connection dimensions
EV-300ZF Grease lubricated water-cooled molecular pumps-shape dimensions, mounting connection dimensions
EV-650Z(ZF), EV-1300Z(ZF), EV-2000Z(ZF) Technical Data
The impeller of EV type grease lubricating compound molecular pump adopts the vane tooth of variable cross section, and the bearing adopts grease lubricated ceramic precision bearing, which realizes the installation of pump body at any angle and cleans the oil-free high vacuum environment with higher reliability.
|
Model |
EV-650Z EV-650ZF |
EV-1300Z EV-1300ZF |
EV-2000Z EV-2000ZF |
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|
Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
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|
Outlet Flange (mm) |
40 KF |
40KF |
50KF |
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|
The flange of protective air （anticorrosive pump） |
16KF |
16KF |
16KF |
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|
Pumping Rate（L/S） |
650 |
1300 |
2000 |
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|
Compression Ratio |
N2 |
>109 |
>109 |
>109 |
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|
H2 |
>8X103 |
>1X104 |
>1X104 |
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|
Ultimate Pressure（Pa） |
<8X10-8 |
<5X10-7 |
<8X10-8 |
<5X10-7 |
<8X10-8 |
<5X10-7 |
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|
Rated Speed（rpm） |
24000 |
24000 |
24000 |
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|
Bearing |
Grease-lubricated Ceramic Bearing |
Grease-lubricated Ceramic Bearing |
Grease-lubricated Ceramic Bearing |
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|
Vibration |
≤0.1 μm |
≤0.1 μm |
≤0.1 μm |
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|
Starting Time（min） |
<5 |
<5 |
<5 |
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|
Suggested rotary pump |
4-8 L/S |
8-15 L/S |
8-15 L/S |
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|
Cooling Method |
Water(Air) Cooling |
Water(Air) Cooling |
Water(Air) Cooling |
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|
Temperature of Water Cooling(℃) |
≤20 |
≤20 |
≤20 |
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|
The flow of water cooling（L/min） |
1 |
1 |
1 |
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|
Installation Mod |
Any position |
Any position |
Any position |
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|
Weight（kg） |
≈22 |
≈27 |
≈35 |
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EV-650Z, EV-1300Z, EV-2000Z Mounting Dimension Table of Lipid Lubricating Molecular pump
|
Model |
EV-650Z |
EV-1300Z |
EV-2000Z |
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|
Inlet Flange (mm) |
150 CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
|
D1 |
Φ202 |
Φ180 |
Φ253 |
Φ240 |
Φ305 |
Φ290 |
|
D2 |
Φ212 |
Φ212 |
Φ243 |
Φ243 |
Φ274 |
Φ274 |
|
D3 |
Φ236 |
Φ236 |
Φ266 |
Φ266 |
Φ296 |
Φ296 |
|
L1 |
112 |
112 |
150 |
150 |
123 |
123 |
|
H1 |
315 |
315 |
339 |
339 |
316.5 |
312 |
|
H2 |
300 |
300 |
334 |
334 |
299 |
295 |
|
H3 |
239 |
239 |
283 |
283 |
252 |
248 |
|
H4 |
94.5 |
94.5 |
103.5 |
103.5 |
102.5 |
102.5 |
