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EV series grease lubricating molecular pump

Short Description:

The impeller of EV type grease lubricating compound molecular pump adopts the vane tooth of variable cross section, and the bearing adopts grease lubricated ceramic precision bearing, which realizes the installation of pump body at any angle and cleans the oil-free high vacuum environment with higher reliability.


Product Detail

Product Tags

EV-300Z and EV-300ZF Technical Data

Model

EV-300Z

EV-300ZF

Inlet Flange (mm)

100CF

100 ISO-K

100CF

100 ISO-K

Outlet Flange (mm)

25 KF

25 KF

Pumping Speed (L/S)

300

300

Compression Ratio

N2

>108

>108

H2

>1X103

>1X103

Ultimate Vacuum(Pa)

<3X10-7

<2X10-6

<3X10-7

<2X10-6

Rotation Speed(rpm)

30000

30000

Bearing

Grease-lubricated Ceramic Bearing

Grease-lubricated Ceramic Bearing

Run-up Time(min)

<4

<4

Backing Pump

2 L/S

2 L/S

Cooling Method

Air Cooling

WaterCooling

ambient temperature

5-36℃

<38℃

Mounting

Any position

Any position

Weight(kg) (kg)

≈11

≈10.8

EV series grease lubricating molecular pump

Compression ratio curve of EV-300ZF grease lubricated air-cooled molecular pump to air

EV series grease lubricating molecular pump01

Compression ratio curve of EV-300ZF grease lubricated air-cooled molecular pump for nitrogen and hydrogen

Product dimension, mounting connection dimension

EV series grease lubricating molecular pump01

EV-300Z Grease lubricated water-cooled molecular pumps-shape dimensions, mounting connection dimensions

EV series grease lubricating molecular pump01

EV-300ZF Grease lubricated water-cooled molecular pumps-shape dimensions, mounting connection dimensions

EV-650Z(ZF), EV-1300Z(ZF), EV-2000Z(ZF) Technical Data

The impeller of EV type grease lubricating compound molecular pump adopts the vane tooth of variable cross section, and the bearing adopts grease lubricated ceramic precision bearing, which realizes the installation of pump body at any angle and cleans the oil-free high vacuum environment with higher reliability.

Model

EV-650Z

EV-650ZF

EV-1300Z

EV-1300ZF

EV-2000Z

EV-2000ZF

Inlet Flange (mm)

150 CF

160 ISO-K

200 CF

200 ISO-K

250 CF

250 ISO-K

Outlet Flange (mm)

40 KF

40KF

50KF

The flange of protective air

(anticorrosive pump)

16KF

16KF

16KF

Pumping Rate(L/S)

650

1300

2000

Compression Ratio

N2

>109

>109

>109

H2

>8X103

>1X104

>1X104

Ultimate Pressure(Pa)

<8X10-8

<5X10-7

<8X10-8

<5X10-7

<8X10-8

<5X10-7

Rated Speed(rpm)

24000

24000

24000

Bearing

Grease-lubricated Ceramic Bearing

Grease-lubricated Ceramic Bearing

Grease-lubricated Ceramic Bearing

Vibration

≤0.1 μm

≤0.1 μm

≤0.1 μm

Starting Time(min)

<5

<5

<5

Suggested rotary pump

4-8 L/S

8-15 L/S

8-15 L/S

Cooling Method

Water(Air) Cooling

Water(Air) Cooling

Water(Air) Cooling

Temperature of Water Cooling(℃)

≤20

≤20

≤20

The flow of water cooling(L/min)

1

1

1

Installation Mod

Any position

Any position

Any position

Weight(kg)

≈22

≈27

≈35

EV-650Z, EV-1300Z, EV-2000Z Mounting Dimension Table of Lipid Lubricating Molecular pump

EV series grease lubricating molecular pump

Model

EV-650Z

EV-1300Z

EV-2000Z

Inlet Flange (mm)

150 CF

160 ISO-K

200 CF

200 ISO-K

250 CF

250 ISO-K

D1

Φ202

Φ180

Φ253

Φ240

Φ305

Φ290

D2

Φ212

Φ212

Φ243

Φ243

Φ274

Φ274

D3

Φ236

Φ236

Φ266

Φ266

Φ296

Φ296

L1

112

112

150

150

123

123

H1

315

315

339

339

316.5

312

H2

300

300

334

334

299

295

H3

239

239

283

283

252

248

H4

94.5

94.5

103.5

103.5

102.5

102.5


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