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CF Bakeable All-Metal Angle Valve

Short Description:

Bakeable all-metal valves are one type of the poppet valves. There are 3 kinds of type:all-metal valve angle and Y-inline valves and Mini type all-metal valve. When the poppet is moved toward the top of the valve, the internal body cavity is open to the system, and flow is unimpeded (maximum conductance). Once the actuator moves the poppet to the bottom of the valve, a copper gasket sealing ring is compressed onto the sealing surface of the lower body of the valve. This action creates a vacuum tight seal and stops the flow. This bakeable all-metal valves are designed to use for use in ultra-high vacuum environment and applications in semiconductor manufacturing, synchronous radiation, vacuum thin film technology, etc. where elevated temperatures preclude the use of elastomers and low temperature gasket metals. designs all series angle valves and inline valves suited for vacuum applications with venting processes,high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

■ Baking temperature: 400 ℃ (valve open), 300 ℃ (valve closed)

■ The sealing gasket can be easily replaced with a screwdriver, and the gasket can be loaded and unloaded through the nozzle

■ The whole is made of stainless steel Sealed with bellows shaft and oxygen-free copper gasket

■ Standard sizes are:CF16/CF35/CF63

■ Can be installed at any angle


  • Type: Vacuum angle valve, CF Vacuum Angle Valve
  • Brand Name: Super Q
  • Application: Industrial vacuum field, semiconductor technology/ research systems
  • Model Number: CF Bakeable All-Metal Vacuum Angle Valve
  • Port Size: CF 16/35/63
  • Material: 304 stainless steel
  • Pressure: <10^-10 torr
  • Working Temperature: ≤ 400 ℃
  • Product Detail

    Product Tags

    The bakeable all-metal valves are designed to use for use in ultra-high vacuum environment and applications in semiconductor manufacturing, synchronous radiation, vacuum thin film technology, etc. where elevated temperatures preclude the use of elastomers and low temperature gasket metals. Suited for vacuum applications with venting processes,high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

    Ultra high vacuum support

    High leakage rate

    All metal design

    High temperature baking resistance

    Corrosion resistant design

    Good durability

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