EV moʻo pūʻulu molekala pauma
ʻIkepili ʻenehana EV-series
| Hoʻohālike | EV-600 EV-600F | EV-1200 EV-1200F | EV-1600 EV-1600F | ||||
| ʻAla komo (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
| Puke puka (mm) | 40 KF | 40 KF | 50 KF | ||||
| ʻO ka māmā holo ʻana (L/S) | 600 | 1200 | 1600 | ||||
| Pākuʻi hoʻoemi | N2 | >109 | >109 | >109 | |||
| H2 | >8X103 | >1X104 | >1X104 | ||||
| Māmā Loa (Pa) | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | |
| ʻO ka holo ʻana (rpm) | 24000 | 24000 | 24000 | ||||
| Haʻalulu | ≤0.1 μm | ≤0.1 μm | ≤0.15 μm | ||||
| Ka manawa holo (min) | <4.5 | <5 | <6 | ||||
| Pum Paʻa | 4-8 L/S | 8-15 L/S | 15 L/S | ||||
| Hana Hooluu | Ka wai(ea) hooluolu | Ka wai(ea) hooluolu | Ka wai(ea) hooluolu | ||||
| Ka Mahana Wai Hooluu (℃) | ≤20 | ≤20 | ≤20 | ||||
| Ka Mahana Pahu (℃）) | ≤35 | ≤35 | ≤35 | ||||
| Ka nui o ke kahe wai hooluolu | 1-2 L/min | 1-2 L/min | 1-2 L/min | ||||
| Ka Mahana Bake-out (℃) | <120 | <120 | <120 | ||||
| Ka mana hoʻomehana (w) | <250 | <300 | <300 | ||||
| Voltage Hookomo Pumehana（v） | AC220 | AC220 | AC220 | ||||
| Ke kau ʻana | Kū pololei ±5° | Kū pololei ±5° | Kū pololei ±5° | ||||
| Kaumaha(kg) | ≈25 | ≈29 | ≈31 | ||||
ʻO ka pōʻaiapuni o ka lewa o ka hui
Pum Molekala
Pipi lākiō o ka nitrogen a me ka hydrogen
e ka pauma moleki hui
EV Series Hoʻonoho Ana Papaʻaina o ka hui Molecular Pump
| Hoʻohālike | EV-600 | EV-1200 | EV-1600 | ||||
| ʻAla komo (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
| D1 | Φ202 | Φ180 | Φ253 | Φ240 | Φ305 | Φ290 | |
| D2 | Φ212 | Φ212 | Φ237 | Φ237 | Φ274 | Φ274 | |
| D3 | Φ236 | Φ236 | Φ266 | Φ266 | Φ296 | Φ296 | |
| D4 | ¨145.7 | ¨145.7 | ¨167.6 | ¨167.6 | ¨183.9 | ¨183.9 | |
| H1 | 375 | 375 | 405 | 405 | 393 | 393 | |
| H2 | 235 | 235 | 265 | 265 | 250 | 250 | |
| H3 | 238 | 238 | 265 | 265 | 250 | 250 | |
| H4 | 108 | 108 | 113 | 113 | 110 | 110 | |
| H5 | 4 | 4 | 19 | 19 | 16 | 16 | |
| L1 | 130 | 130 | 145 | 145 | 160 | 160 | |
| L2 | 137 | 137 | 152 | 152 | 176 | 176 | |
| Pum wili wāwae | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | |
| Puke puka (mm) | KF40 | KF40 | KF40 | KF40 | KF50 | KF50 | |
EV Series Nā Pump Molecular Pumps Ea hoʻoluʻu
EV-series ea-cooled compound molecular pump is composed of turbomolecular pump and disc traction pump.Loaʻa iā ia nā hiʻohiʻona o ka wikiwiki pumping kiʻekiʻe a me ka lākiō hoʻopiʻi no ka kahe molecular o ka turbomolecular pump, ka wikiwiki pumping kiʻekiʻe a me ka lākiō hoʻopiʻi no ke kaomi kiʻekiʻe o ka traction pump, a hoʻonui i ka laulā noi o ka pauma molecular.
ʻAʻohe koho koho a me ka hopena hoʻomanaʻo o ka pauma molecular compound i ke kinoea i hoʻomake ʻia.Ma muli o kona kiʻekiʻe compression ratio i ke kinoea me ka nui molecular paona, hiki i ka paila ke loaʻa i ka maʻemaʻe kiʻekiʻe a me ke kiʻekiʻe kiʻekiʻe kiʻekiʻe me ka ʻole o ka pahele anu a me ka baffle aila.Hoʻohana nui ʻia ia i nā ʻano ʻenehana uila, metallurgy, ʻoihana kemika, noiʻi ʻepekema a me ka ʻenehana vacuum.
| Hoʻohālike | EV-600F | EV-1200F | EV-1600F | |||
| ʻAla komo (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K |
| D1 | Φ202 | Φ180 | Φ253 | Φ240 | Φ305 | Φ290 |
| D2 | Φ236 | Φ236 | Φ266 | Φ266 | Φ274 | Φ274 |
| D3 | ¨145.7 | ¨145.7 | ¨167.6 | ¨167.6 | ¨183.8 | ¨183.8 |
| H1 | 455 | 455 | 472 | 472 | 465 | 465 |
| H2 | 217.5 | 217.5 | 210 | 210 | 214.5 | 214.5 |
| H3 | 151 | 151 | 151 | 151 | 153 | 153 |
| L1 | 130 | 130 | 145 | 145 | 161 | 161 |
| L2 | 137 | 137 | 152 | 152 | 166 | 166 |
| Pum wili wāwae | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 |
