EV series turbo molecular pump

Short Description:

EV-3600 The impeller of turbomolecular pump adopts the variable cross-section blade teeth originally invented in China, which enhances the blade strength, reduces the weight of the rotor, shortens the start-up time, reduces the mechanical loss and increases the service life.

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Product Detail

Product Tags

Profile dimensions and mounting connections of turbo-molecular pumps

The Velocity Curve of Turbo molecular pump
pumping nitrogen and hydrogen

The Velocity Curve of Turbo molecular
pump to the atmosphere

EV-3600 Technical Data

Inlet Flange (mm)		400 ISO - K
Outlet Flange (mm)		100 ISO - K
Pumping Rate（L/S）		3600
Compression Ratio	N²	>10⁸
	H²	>5X10²
Ultimate Pressure（Pa）		<2X10^-6
Rated Speed（rpm）		13500
Vibration		≤0.15 μm
Starting Time（min）		<11
Stop Time（min）		<20
Suggested rotary pump		30-70 L/S
Cooling Method		Water-cooling
Temperature of Water Cooling(℃)		≤25
The flow of water cooling（L/min）		2
Pump Body Baking Temperature		<120℃
Installation Mode		Vertical ±5°
Weight（kg）		≈100